JPH0241436U - - Google Patents
Info
- Publication number
- JPH0241436U JPH0241436U JP11185686U JP11185686U JPH0241436U JP H0241436 U JPH0241436 U JP H0241436U JP 11185686 U JP11185686 U JP 11185686U JP 11185686 U JP11185686 U JP 11185686U JP H0241436 U JPH0241436 U JP H0241436U
- Authority
- JP
- Japan
- Prior art keywords
- wafer
- carrier
- wafer carrier
- shelf
- receiving plate
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11185686U JPH0521885Y2 (enExample) | 1986-07-21 | 1986-07-21 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11185686U JPH0521885Y2 (enExample) | 1986-07-21 | 1986-07-21 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH0241436U true JPH0241436U (enExample) | 1990-03-22 |
| JPH0521885Y2 JPH0521885Y2 (enExample) | 1993-06-04 |
Family
ID=31350276
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP11185686U Expired - Lifetime JPH0521885Y2 (enExample) | 1986-07-21 | 1986-07-21 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0521885Y2 (enExample) |
-
1986
- 1986-07-21 JP JP11185686U patent/JPH0521885Y2/ja not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0521885Y2 (enExample) | 1993-06-04 |
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