JPS63174019U - - Google Patents
Info
- Publication number
- JPS63174019U JPS63174019U JP20099186U JP20099186U JPS63174019U JP S63174019 U JPS63174019 U JP S63174019U JP 20099186 U JP20099186 U JP 20099186U JP 20099186 U JP20099186 U JP 20099186U JP S63174019 U JPS63174019 U JP S63174019U
- Authority
- JP
- Japan
- Prior art keywords
- light receiving
- receiving element
- element group
- basic light
- basic
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000004065 semiconductor Substances 0.000 claims description 11
- 239000000758 substrate Substances 0.000 claims description 6
- 239000004020 conductor Substances 0.000 claims description 4
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 claims description 2
- 229910052782 aluminium Inorganic materials 0.000 claims description 2
- 230000000737 periodic effect Effects 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 1
- 238000009792 diffusion process Methods 0.000 description 1
Description
第１図Ａ〜Ｄ及び第２図Ａ，Ｂは、それぞれ本
考案に係る光電形エンコーダの異なる実施例の要
部を示す平面図、第３図は固定スリツト板を省略
した光電形エンコーダの要部の概略構成を示す断
面図、第４図Ａ，Ｂはそれぞれ従来の光電形エン
コーダの半導体受光装置の一例を示す平面図、第
５図は拡散電流が生成されて隣接受光素子へ混入
する状態を示す断面図、第６図Ａ，Ｂは第３図に
示した光電形エンコーダの動作の概要を示す説明
図、第７図は受光装置よりの信号を波形処理する
信号処理回路のブロツク図である。
１…基本受光素子、１０…基本受光素子群、２
ａ〜２ｅ…導電材配線としてのアルミ配線、４…
半導体基板、６…移動スリツト板、１０Ａ…第１
の基本受光素子群、１０Ｂ…第２の基本受光素子
群、１６Ａ…第１のスリツト群、１６Ｂ…第２の
スリツト群、２０…半導体受光装置。
1A to 2D and 2A and 2B are plan views showing the main parts of different embodiments of the photoelectric encoder according to the present invention, respectively, and FIG. 3 is the main part of the photoelectric encoder in which the fixed slit plate is omitted. 4A and 4B are plan views showing an example of a semiconductor light receiving device of a conventional photoelectric encoder, and FIG. 5 shows a state in which a diffusion current is generated and mixed into an adjacent light receiving element. FIGS. 6A and 6B are explanatory diagrams showing an overview of the operation of the photoelectric encoder shown in FIG. 3, and FIG. be. 1...Basic light receiving element, 10...Basic light receiving element group, 2
a~2e... Aluminum wiring as conductive material wiring, 4...
Semiconductor substrate, 6... moving slit plate, 10A... first
basic light receiving element group, 10B... second basic light receiving element group, 16A... first slit group, 16B... second slit group, 20... semiconductor light receiving device.
Claims (1)
リツトを通して半導体基板に複数個の受光素子が
形成されてなる半導体受光装置の前記受光素子に
当てることにより前記スリツト板と前記半導体受
光装置との間の相対的な移動速度に応じた周期的
な信号を発生する光電形エンコーダにおいて、 半導体基板上に複数個の同一形状の基本受光素
子が前記移動方向に所定の間隔をおいて列設され
、前記受光素子は隣接する所定数の前記基本受光
素子を導電材配線により並列接続して構成される
ことを特徴とする光電形エンコーダ。 (2) 前記複数個の基本受光素子は、エンコーダ
の最大分解能に対応する数だけ設けられた実用新
案登録請求の範囲第１項記載の光電形エンコーダ
。 (3) 前記半導体受光装置は、前記半導体基板上
に前記のように複数個の基本受光素子が列設され
た第１の基本受光素子群と、前記半導体基板と同
一若しくは別の半導体基板上に前記第１の基本受
光素子群に対して所定の位相関係をもつて該第１
の基本受光素子群と同様の構成で並設された第２
の基本受光素子群とを備え、前記各基本受光素子
群における隣接する所定数の前記基本受光素子が
導電材配線により並列接続されてなり、 前記スリツト板は、前記第１の基本受光素子群
に対向する第１のスリツト群と、該第１のスリツ
ト群に対して所定の位相関係をもつて並設されて
前記第２の基本受光素子群に対向する第２のスリ
ツト群とを有する実用新案登録請求の範囲第１項
記載の光電形エンコーダ。 (4) 前記導電材配線にアルミ配線を用いた実用
新案登録請求の範囲第１項又は第３項記載の光電
形エンコーダ。[Claims for Utility Model Registration] (1) Light from a light source passes through a slit formed in a slit plate and hits the light receiving element of a semiconductor light receiving device in which a plurality of light receiving elements are formed on a semiconductor substrate. In a photoelectric encoder that generates a periodic signal according to a relative moving speed between a plate and the semiconductor light receiving device, a plurality of basic light receiving elements of the same shape are arranged on a semiconductor substrate in a predetermined direction in the moving direction. A photoelectric encoder characterized in that the light receiving elements are arranged in a row at intervals, and the light receiving elements are constructed by connecting a predetermined number of adjacent basic light receiving elements in parallel with conductive material wiring. (2) The photoelectric encoder according to claim 1, wherein the plurality of basic light receiving elements are provided in a number corresponding to the maximum resolution of the encoder. (3) The semiconductor light-receiving device includes a first basic light-receiving element group in which a plurality of basic light-receiving elements are arranged in a row as described above on the semiconductor substrate, and a first basic light-receiving element group on the same or different semiconductor substrate as the semiconductor substrate. The first basic light receiving element group has a predetermined phase relationship with respect to the first basic light receiving element group.
A second light-receiving element group arranged in parallel with the same configuration as the basic light-receiving element group of
a predetermined number of adjacent basic light receiving elements in each basic light receiving element group are connected in parallel by conductive material wiring, and the slit plate is connected to the first basic light receiving element group. A utility model comprising a first slit group facing each other and a second slit group arranged in parallel with a predetermined phase relationship with respect to the first slit group and facing the second basic light receiving element group. A photoelectric encoder according to claim 1. (4) The photoelectric encoder according to claim 1 or 3, wherein aluminum wiring is used as the conductive material wiring.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1986200991U JPH0729459Y2 (en) | 1986-12-29 | 1986-12-29 | Photoelectric encoder |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1986200991U JPH0729459Y2 (en) | 1986-12-29 | 1986-12-29 | Photoelectric encoder |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS63174019U true JPS63174019U (en) | 1988-11-11 |
| JPH0729459Y2 JPH0729459Y2 (en) | 1995-07-05 |
Family
ID=31164026
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1986200991U Expired - Lifetime JPH0729459Y2 (en) | 1986-12-29 | 1986-12-29 | Photoelectric encoder |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0729459Y2 (en) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH11108695A (en) * | 1997-10-03 | 1999-04-23 | Alps Electric Co Ltd | Optical encoder |
| JP2004501356A (en) * | 2000-04-28 | 2004-01-15 | ドクトル・ヨハネス・ハイデンハイン・ゲゼルシヤフト・ミツト・ベシユレンクテル・ハフツング | Scanning unit for optical position measuring device |
| JP2012181020A (en) * | 2011-02-28 | 2012-09-20 | Canon Inc | Optical encoder |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS494695U (en) * | 1972-04-14 | 1974-01-16 |
-
1986
- 1986-12-29 JP JP1986200991U patent/JPH0729459Y2/en not_active Expired - Lifetime
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS494695U (en) * | 1972-04-14 | 1974-01-16 |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH11108695A (en) * | 1997-10-03 | 1999-04-23 | Alps Electric Co Ltd | Optical encoder |
| JP2004501356A (en) * | 2000-04-28 | 2004-01-15 | ドクトル・ヨハネス・ハイデンハイン・ゲゼルシヤフト・ミツト・ベシユレンクテル・ハフツング | Scanning unit for optical position measuring device |
| US6965437B2 (en) | 2000-04-28 | 2005-11-15 | Dr. Johannes Heidenhain Gmbh | Scanning unit for an optical position measuring device |
| JP2012181020A (en) * | 2011-02-28 | 2012-09-20 | Canon Inc | Optical encoder |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0729459Y2 (en) | 1995-07-05 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| DE3683263D1 (en) | SEMICONDUCTOR ARRANGEMENT WITH A SILICON ON ISOLATOR STRUCTURE. | |
| JPS62101242U (en) | ||
| EP0256850A3 (en) | Photo-electric converter | |
| JPS63174019U (en) | ||
| DE3689393T2 (en) | Monolithic semiconductor superlattice structure. | |
| JPS5613779A (en) | Photoelectric converter and its preparation | |
| JPS6388708U (en) | ||
| JPS52124889A (en) | Semiconductor photoelectric transducer | |
| JPS63135222U (en) | ||
| JPH01107918U (en) | ||
| JPS63107821U (en) | ||
| JPS6339958U (en) | ||
| JPS5648161A (en) | Lead frame for semiconductor device | |
| JPH0231153U (en) | ||
| JPS6236923A (en) | Optical encoder | |
| JPH02110354U (en) | ||
| JPS62115196U (en) | ||
| JPS62178545U (en) | ||
| JPS6310406U (en) | ||
| JPS61177464U (en) | ||
| JPS63137959U (en) | ||
| JPS6439658U (en) | ||
| JPS60133848U (en) | Remaining paper amount detection device in copying machine | |
| JPS61189342U (en) | ||
| JPH0273746U (en) |