JPS63171455A - Protective film for magneto-optical recording medium - Google Patents
Protective film for magneto-optical recording mediumInfo
- Publication number
- JPS63171455A JPS63171455A JP62003743A JP374387A JPS63171455A JP S63171455 A JPS63171455 A JP S63171455A JP 62003743 A JP62003743 A JP 62003743A JP 374387 A JP374387 A JP 374387A JP S63171455 A JPS63171455 A JP S63171455A
- Authority
- JP
- Japan
- Prior art keywords
- protective film
- magneto
- optical recording
- alkaline earth
- recording medium
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 230000001681 protective effect Effects 0.000 title claims abstract description 26
- 229910000287 alkaline earth metal oxide Inorganic materials 0.000 claims abstract description 11
- 230000007797 corrosion Effects 0.000 abstract description 10
- 238000005260 corrosion Methods 0.000 abstract description 10
- 229910052723 transition metal Inorganic materials 0.000 abstract description 7
- 230000000694 effects Effects 0.000 abstract description 6
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 abstract 6
- 229910011255 B2O3 Inorganic materials 0.000 abstract 3
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 abstract 3
- 229910052681 coesite Inorganic materials 0.000 abstract 3
- 229910052593 corundum Inorganic materials 0.000 abstract 3
- 229910052906 cristobalite Inorganic materials 0.000 abstract 3
- 239000000377 silicon dioxide Substances 0.000 abstract 3
- 235000012239 silicon dioxide Nutrition 0.000 abstract 3
- 229910052682 stishovite Inorganic materials 0.000 abstract 3
- 229910052905 tridymite Inorganic materials 0.000 abstract 3
- 229910001845 yogo sapphire Inorganic materials 0.000 abstract 3
- 230000003287 optical effect Effects 0.000 abstract 1
- 239000010408 film Substances 0.000 description 24
- 239000010410 layer Substances 0.000 description 20
- 239000010409 thin film Substances 0.000 description 6
- 239000002356 single layer Substances 0.000 description 5
- 239000000758 substrate Substances 0.000 description 5
- 238000000034 method Methods 0.000 description 4
- 229920000515 polycarbonate Polymers 0.000 description 3
- 239000004417 polycarbonate Substances 0.000 description 3
- 229910052761 rare earth metal Inorganic materials 0.000 description 3
- 229910017061 Fe Co Inorganic materials 0.000 description 2
- 229910045601 alloy Inorganic materials 0.000 description 2
- 239000000956 alloy Substances 0.000 description 2
- 229910052751 metal Inorganic materials 0.000 description 2
- 239000002184 metal Substances 0.000 description 2
- 239000011241 protective layer Substances 0.000 description 2
- 150000002910 rare earth metals Chemical class 0.000 description 2
- 238000004544 sputter deposition Methods 0.000 description 2
- 238000002834 transmittance Methods 0.000 description 2
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 2
- 238000007796 conventional method Methods 0.000 description 1
- 230000006866 deterioration Effects 0.000 description 1
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 1
- 239000010931 gold Substances 0.000 description 1
- 229910052737 gold Inorganic materials 0.000 description 1
- 230000001771 impaired effect Effects 0.000 description 1
- 239000011148 porous material Substances 0.000 description 1
- 150000003624 transition metals Chemical class 0.000 description 1
- 238000007740 vapor deposition Methods 0.000 description 1
Abstract
Description
【発明の詳細な説明】 （産業上の利用分野） 本発明は光磁気記録媒体の保護膜に関する。[Detailed description of the invention] (Industrial application field) The present invention relates to a protective film for a magneto-optical recording medium.
（従来の技術）
光磁気記録媒体、たとえば希土類元素−遷移金属等の合
金薄膜を記録層とした光磁気記録媒体、において、希土
類−遷移金属の記Ｕ層を基板上に形成せしめ、該記ａｋ
７Ｊｉ層で使用すると、耐蝕性の欠如により保存特性の
悪いことが知られている。（第３２回応用物理学関係連
合講演会予稿集Ｐ３５５．１９８５．小林 他： ｒＲ
Ｅ−ＴＭ膜における孔軸について」）
このため従来は希土類−遷移金属に第３の金属たとえば
Ｃｒ、Ａｔ、Ｔｉ等の金属を添加し記録層に保護効果を
もたせたり、あるいは記録層をＺｎｓ、Ａ’ｌＮ、８
ｉｓ Ｎ４．Ｓ ｊｏｔ 等の膜で覆う方法（第３３回
応用物理学関係連合講演会予稿集Ｐ３９２，１９ｇ（３
，浅野 他：「光磁気記録媒体の保護膜の検討」）が知
られている。(Prior Art) In a magneto-optical recording medium, for example, a magneto-optical recording medium in which a recording layer is an alloy thin film of a rare earth element-transition metal, etc., a rare earth-transition metal layer is formed on a substrate, and the recording layer is formed on a substrate.
When used in 7Ji layers, it is known to have poor storage properties due to lack of corrosion resistance. (Proceedings of the 32nd Applied Physics Association Conference P355.1985. Kobayashi et al.: rR
Regarding pore axes in E-TM films, conventional methods have been to add a third metal such as Cr, At, or Ti to the rare earth-transition metal to provide a protective effect to the recording layer, or to add a third metal such as Cr, At, or Ti to the rare earth-transition metal. A'lN, 8
is N4. Method of covering with a film such as S jot (33rd Applied Physics Association Conference Proceedings P392, 19g (3
, Asano et al.: ``Study of protective film for magneto-optical recording media'') is known.
（発明が解決しようとする問題点）
従来提案されている、記り薄膜層に第３の成分を添加す
る方法、記録薄膜層上にＺｎＳ、ＡｆｔＮ、Ｓｉ、Ｎ４
．Ｓｉｎｇ等の保護膜を施す方法においては、前者の場
合、第３成分の添加により記録用薄膜の磁性が劣化する
などの望ましくない特性変化が生じたり、さらには耐蝕
性の向上も不充分である。後者の場合、耐ガス変化に酎
しては向上は見られるが、水に対する耐蝕性においては
不充分であった。(Problems to be Solved by the Invention) Conventionally proposed methods of adding a third component to the recording thin film layer include ZnS, AftN, Si, and N4 on the recording thin film layer.
．． In the method of applying a protective film such as Sing, in the former case, addition of the third component causes undesirable changes in characteristics such as deterioration of the magnetic properties of the recording thin film, and furthermore, corrosion resistance is not sufficiently improved. . In the latter case, although there was an improvement in gas resistance, the corrosion resistance against water was insufficient.
（間型を解決するための手段）
光磁気記録媒体において、記ｔ［とじての薄膜の保護、
耐蝕性向上のために、特にａ素、水に耐して保護作用の
ある、耐蝕作用のある保護膜を得るために検討した結果
、本発明に到達した。(Means for solving the gap) In magneto-optical recording media, protection of the thin film as a seal,
In order to improve corrosion resistance, the present invention was arrived at as a result of studies to obtain a protective film that is particularly resistant to atom and water and has a corrosion-resistant effect.
すなわち本発明は、Ｓ ｊ Ｏｓ ＋ Ａｆｔ Ｏｓ
＋ Ｂ、０３およびアルカリ土類金属酸化物を主たる成
分とする光磁気記録媒体用保Ｎ膜である。本発明の保護
膜としての好ましい形態としては、５ｉＯ１が５０〜６
０重量％、Ａぐｍ Ｏ３が１０〜２０重量％、ｎ、ｏ、
が５〜１５重量％、アルカリ土類金Ｉｉｌ酸化物が１５
〜３５重量％からなる保ＮｖＬであり、アルカリ土類金
属酸化物が、Ｃａｂ、ｌ５ａＯおよびＳｒＯから選ばれ
た一種または二種以上からなる保護膜である。That is, the present invention provides S j Os + Aft Os
+ B,03 and an alkaline earth metal oxide as main components. In a preferable form of the protective film of the present invention, 5iO1 is 50 to 6
0% by weight, Agm O3 10-20% by weight, n, o,
is 5 to 15% by weight, and alkaline earth gold Iil oxide is 15% by weight.
The protective film has a NvL of ~35% by weight, and the alkaline earth metal oxide is one or more selected from Cab, 15aO, and SrO.
さらに好ましい形態としては、ｓｉｏｍが５４〜５８重
量％、Ａ紀、０．が１２〜１４重量％、Ｒｈｏｓが８〜
１２重量％、アルカリ土類金属酸化物が１８〜２２重量
％からなる保ＦＪＷＸである。More preferably, siom is 54 to 58% by weight, A period, 0. is 12-14% by weight, and Rhos is 8-14% by weight.
FJWX contains 12% by weight and 18-22% by weight of alkaline earth metal oxides.
本発明の保護膜の形成方法はスパッタリング法、蒸着法
、ＣＶＤ法等があり、特にスパッタリング方法が好適で
ある。Methods for forming the protective film of the present invention include sputtering, vapor deposition, CVD, etc., with sputtering being particularly preferred.
本発明の保護膜を記録層の上および／または下に形成す
ることで、特に記録層が希土類元素と遷移金属を主成分
とする場合に良好な保護作用、耐蝕作用が得られること
がわかった。本発明の保護膜は他の膜と併用しても、本
発明の目的、効果を損なわない限り、よいのは勿論であ
る。It has been found that by forming the protective film of the present invention on and/or under the recording layer, good protection and corrosion resistance can be obtained, especially when the recording layer mainly contains rare earth elements and transition metals. . It goes without saying that the protective film of the present invention may be used in combination with other films as long as the objects and effects of the present invention are not impaired.
（実施例）
ポリカーボネートの基板上に、Ａｒガス７ミリト、−ル
でＲＦスパッタ法により５１０ｍ５７ｆｆ［量％、Ａｆ
ｆｉ、０．１３重量％、Ｂｔ ｏｓ １０ｆｆＩ量％
、ＢａＯが２０ｆｆｉ量％からなる保護膜を形成した。(Example) On a polycarbonate substrate, 510 m 57 ff [amount %, Af
fi, 0.13% by weight, Btos 10ffI amount%
A protective film containing 20ffi% of BaO was formed.
このとき膜厚は８００＾であり、ＲＦパワーは２００Ｗ
であった。At this time, the film thickness was 800^, and the RF power was 200W.
Met.
この保護膜上にＴｂ−Ｆｅ−Ｃｏの合金ターゲットを用
いて、ＤＣパワー２００ＷでＤＣスパッタ法によりＴｂ
−Ｆｅ−Ｃｏの６００人の膜を成膜した。このときのＡ
ｒガス圧は３ミリトールであった。さらにこの２層薄膜
の上に前記保護膜を同一条件で同状態に形成し、ポリカ
ーボネート基板上に保ｗ１層、記録層、保護層の三層構
造の光磁気記録媒体（本発明媒・体）を得た。−一方、
ポリカーボネート基板上に前記記録層のみを形成せしめ
た単層媒体を得た。Using a Tb-Fe-Co alloy target on this protective film, Tb
-600 films of Fe-Co were deposited. A at this time
The r gas pressure was 3 mTorr. Furthermore, the above-mentioned protective film is formed on this two-layer thin film under the same conditions and in the same state, and is then held on a polycarbonate substrate to form a magneto-optical recording medium (medium/body of the present invention) having a three-layer structure of a layer, a recording layer, and a protective layer. I got it. -On the other hand,
A single-layer medium was obtained in which only the recording layer was formed on a polycarbonate substrate.
さらに、保護層が本発明の保護膜と異なるＳｉＳ Ｎ４
と５ｉｆｔの各単独保ＦｉｌＫである他の構成は本発
明と同様のＳ ｌ ３ Ｎａ媒体、Ｓ ｉＯ＊媒体を各
々得た。以上得られた本発明媒体、単層媒体、Ｓ １
ｓ Ｎａ媒体、５ｉｆｔ媒体の４者を、６０℃、８５％
ＲＨの環境下におき、孔軸による記録層の光透過率の変
化を測定した。結果を図−１に示した。Furthermore, the protective layer is SiS N4 different from the protective film of the present invention.
For the other configurations, each of which was a single holding FilK of 5ift and 5ift, S l 3 Na medium and SiO* medium similar to those of the present invention were obtained, respectively. Media of the present invention obtained above, single layer media, S 1
s Na medium and 5ift medium at 60°C and 85%
The recording layer was placed under an RH environment, and the change in light transmittance of the recording layer due to the hole axis was measured. The results are shown in Figure 1.
図かられかるように、本発明の保護膜を用いた媒体にお
いては、単層は勿論、従来からの保：４膜の媒体に比較
しても、すぐれた耐蝕作用、保護作用がある。As can be seen from the figure, the medium using the protective film of the present invention has excellent corrosion resistance and protection effects, not only when compared to a single layer but also when compared to a conventional four-layer medium.
（発明の効果）
光磁気記録媒体、特に希土類元素−遷移金属からなる記
録層の光磁気記録媒体の保Ｎ膜として、本発明のＳ ｉ
ｏｎ ＋ Ａｆｔ Ｏｓ ＋ Ｂｍ Ｏｓ とアルカリ
土類金属酸化物を主成分とする保Ｎ膜を用いたとき、す
ぐれた保護作用、耐蝕作用を示すものであることがわか
った。(Effects of the Invention) The Si of the present invention can be used as a N retaining film for a magneto-optical recording medium, particularly a magneto-optical recording medium having a recording layer made of a rare earth element-transition metal.
It has been found that when an N retaining film containing on + Aft Os + Bm Os and an alkaline earth metal oxide as its main components is used, it exhibits excellent protection and corrosion resistance.
【図面の簡単な説明】
図−１は、本発明の保護膜を用いたもの（本発明媒体）
、Ｓ ｔｓ Ｎ４を保護膜として用いたもの（Ｓｉｓ
Ｎ４媒体）、ｓｉｏｍを保Ｎ膜として用いたもの−（Ｓ
ｉＯｍ媒体）および保ＦＩ膜を用いない単層記録層（単
層媒体）の各光磁気記録媒体の６０℃、８５％ＲＨにお
ける記録層の光透過率の変化を示したものである。[Brief explanation of the drawings] Figure 1 shows a device using the protective film of the present invention (media of the present invention)
, using S ts N4 as a protective film (Sis
(S
2 shows changes in the light transmittance of the recording layer at 60° C. and 85% RH for each magneto-optical recording medium, iOm medium) and a single-layer recording layer without an FI-retaining film (single-layer medium).
Claims (3)
びアルカリ土類金属酸化物を主たる成分とする光磁気記
録媒体用保護膜。(1) A protective film for a magneto-optical recording medium whose main components are SiO_2, Al_2O_3, B_2O_3 and an alkaline earth metal oxide.
が１０〜２０重量％、Ｂ＿２Ｏ＿３が５〜１５重量％、
アルカリ土類金属酸化物が１５〜３５重量％である特許
請求の範囲第１項記載の光磁気記録媒体用保護膜。(2) SiO_2 is 50-60% by weight, Al_2O_3
is 10 to 20% by weight, B_2O_3 is 5 to 15% by weight,
The protective film for a magneto-optical recording medium according to claim 1, wherein the alkaline earth metal oxide is contained in an amount of 15 to 35% by weight.
ＳｒＯから選ばれた一種または二種以上からなる特許請
求の範囲第１項または第２項記載の光磁気記録媒体用保
護膜。(3) The protective film for a magneto-optical recording medium according to claim 1 or 2, wherein the alkaline earth metal oxide is one or more selected from CaO, BaO and SrO.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP62003743A JPS63171455A (en) | 1987-01-09 | 1987-01-09 | Protective film for magneto-optical recording medium |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP62003743A JPS63171455A (en) | 1987-01-09 | 1987-01-09 | Protective film for magneto-optical recording medium |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS63171455A true JPS63171455A (en) | 1988-07-15 |
Family
ID=11565684
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP62003743A Pending JPS63171455A (en) | 1987-01-09 | 1987-01-09 | Protective film for magneto-optical recording medium |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS63171455A (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH03242843A (en) * | 1990-01-31 | 1991-10-29 | Internatl Business Mach Corp <Ibm> | Magneto-optic storage medium and dielectric layer thereof |
-
1987
- 1987-01-09 JP JP62003743A patent/JPS63171455A/en active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH03242843A (en) * | 1990-01-31 | 1991-10-29 | Internatl Business Mach Corp <Ibm> | Magneto-optic storage medium and dielectric layer thereof |
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