JPS6342054A - Recording medium - Google Patents
Recording mediumInfo
- Publication number
- JPS6342054A JPS6342054A JP18659886A JP18659886A JPS6342054A JP S6342054 A JPS6342054 A JP S6342054A JP 18659886 A JP18659886 A JP 18659886A JP 18659886 A JP18659886 A JP 18659886A JP S6342054 A JPS6342054 A JP S6342054A
- Authority
- JP
- Japan
- Prior art keywords
- layer
- magnetic
- recording medium
- recording
- intermediate layer
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 229910052738 indium Inorganic materials 0.000 abstract description 11
- 229910052782 aluminium Inorganic materials 0.000 abstract description 10
- 230000006866 deterioration Effects 0.000 abstract description 9
- 239000000758 substrate Substances 0.000 abstract description 6
- 239000010410 layer Substances 0.000 description 74
- 239000000463 material Substances 0.000 description 6
- 230000032683 aging Effects 0.000 description 5
- 229910045601 alloy Inorganic materials 0.000 description 5
- 239000000956 alloy Substances 0.000 description 5
- 238000004544 sputter deposition Methods 0.000 description 5
- 229910000846 In alloy Inorganic materials 0.000 description 4
- 150000001875 compounds Chemical class 0.000 description 4
- 239000002131 composite material Substances 0.000 description 3
- 238000010586 diagram Methods 0.000 description 3
- 230000000694 effects Effects 0.000 description 3
- 239000012528 membrane Substances 0.000 description 3
- 229910052751 metal Inorganic materials 0.000 description 3
- 239000002184 metal Substances 0.000 description 3
- 150000004767 nitrides Chemical class 0.000 description 3
- 229920000620 organic polymer Polymers 0.000 description 3
- 229910000838 Al alloy Inorganic materials 0.000 description 2
- 239000003989 dielectric material Substances 0.000 description 2
- 238000005516 engineering process Methods 0.000 description 2
- 239000011159 matrix material Substances 0.000 description 2
- 229910000684 Cobalt-chrome Inorganic materials 0.000 description 1
- 229910002837 PtCo Inorganic materials 0.000 description 1
- -1 TiOt Chemical class 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 239000003795 chemical substances by application Substances 0.000 description 1
- 239000010952 cobalt-chrome Substances 0.000 description 1
- 230000000052 comparative effect Effects 0.000 description 1
- 230000000550 effect on aging Effects 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- 150000002739 metals Chemical class 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 230000003287 optical effect Effects 0.000 description 1
- 239000008188 pellet Substances 0.000 description 1
- 238000007747 plating Methods 0.000 description 1
- 230000035945 sensitivity Effects 0.000 description 1
- 239000002356 single layer Substances 0.000 description 1
- 229910052723 transition metal Inorganic materials 0.000 description 1
Landscapes
- Magnetic Record Carriers (AREA)
Abstract
Description
【発明の詳細な説明】
〔発明の技術分野〕
本発明は記録媒体、さらに詳細には、高密度にして、高
信頼性の磁気記録または光磁気記録用媒体に関する。DETAILED DESCRIPTION OF THE INVENTION [Technical Field of the Invention] The present invention relates to a recording medium, and more particularly to a high-density, highly reliable magnetic recording or magneto-optical recording medium.
(発明の技術的背景〕
従来、磁気記録、光磁気記録に用いられる記録媒体にお
いて、非磁性層を介して磁性層を積層する構成の記録媒
体は公知であり、たとえば特願昭60−180420号
に開示されている。このような記録媒体は、磁性層が非
磁性層を介して3層以上積屓することにより記録感度の
向上と磁気特性、光学特性などの経時劣化の改善を意図
したものであった。(Technical Background of the Invention) Conventionally, among recording media used for magnetic recording and magneto-optical recording, recording media having a structure in which a magnetic layer is laminated via a non-magnetic layer are known, for example, as disclosed in Japanese Patent Application No. 180420/1983. Such a recording medium is intended to improve recording sensitivity and improve aging deterioration of magnetic properties, optical properties, etc. by stacking three or more magnetic layers with a non-magnetic layer in between. Met.
このような発明において、前記非磁性層の材質はSiO
eなどの誘電体、TiOt、 SiNなどの全屈酸化物
および金属窒化物、CStなどの有機ポリマーなどの無
機、有機および結晶質、非晶質のいずれであってもよく
、また、金属であってもよいが、その熱電動率はできる
だけ小さい方がよいと明示されている。しかし、前記磁
性層と非磁性層の経時変化に対する効果は明確ではなか
った。In such an invention, the material of the nonmagnetic layer is SiO
They may be dielectrics such as e, total oxides and metal nitrides such as TiOt, SiN, inorganic, organic, crystalline or amorphous materials such as organic polymers such as CSt, or metals. However, it is clearly stated that the thermoelectric coefficient should be as small as possible. However, the effect on aging of the magnetic layer and nonmagnetic layer was not clear.
一方、記録媒体に、所謂第三元素を添加して経時変化あ
るいは他の磁気的、磁気光学的特性を改善する方法も公
知である。たとえば、特開昭59−103314号に第
三元素としてIn、 Alなどの添加効果について述べ
ている。しかし、これはInあるいはAlをたん含有す
るといえいるだけで、その記録媒体膜の構成については
、なんら記載していない。On the other hand, a method of adding a so-called third element to a recording medium to improve aging or other magnetic or magneto-optical properties is also known. For example, JP-A-59-103314 describes the effect of adding In, Al, etc. as a third element. However, this only states that it contains In or Al, and does not describe anything about the structure of the recording medium film.
特に経時変化の改善についてはなんら触れていない。In particular, there is no mention of improvement over time.
以上のように従来の技術においては、特に記録媒体の経
時変化の改善を主眼としたときに、記録媒体の膜構成と
その差異、有効性などに関しては何等研究がなされてい
ないのが現状であった。As mentioned above, in the conventional technology, no research has been conducted on the film structure of recording media, their differences, effectiveness, etc., especially when focusing on improving the aging of recording media. Ta.
本発明は上述の点に鑑みなされたものであり、記録媒体
の経時変化を改善し、かつ従来の発明の効果をさらに向
上せしめることを目的とし、磁性層(記録層)の挟持さ
れる新たな高信頼性の非磁性層を提供することによって
前記目的を達成せんとするものである。The present invention has been made in view of the above-mentioned points, and aims to improve the aging deterioration of a recording medium and further improve the effects of the conventional invention. The object is to achieve the above object by providing a highly reliable nonmagnetic layer.
したがって、本発明による記録媒体は、磁性層が、A1
%i、Ink、Alを含む層、Inを含む層のいずれか
の層を介して2層以上積層されていることを特徴とする
ものである。Therefore, in the recording medium according to the present invention, the magnetic layer has A1
%i, Ink, a layer containing Al, or a layer containing In, two or more layers are stacked therebetween.
本発明による記録媒体によれば、In層、AlJ’5、
Inを含む層、Alを含む層のいずれかの屓を介して磁
性層を多層構成としたため、経時劣化を防止する効果が
大きく、これによって高信頼性の記録媒体が実現できる
。According to the recording medium according to the present invention, the In layer, AlJ'5,
Since the magnetic layer has a multilayer structure through either the layer containing In or the layer containing Al, it is highly effective in preventing deterioration over time, thereby realizing a highly reliable recording medium.
第1図は本発明の構成を示す一具体例であり、1は磁気
記録用または光磁気記録用記録媒体、2は基板、3は本
発明による中間層を示す。FIG. 1 shows a specific example of the structure of the present invention, in which 1 is a recording medium for magnetic recording or magneto-optical recording, 2 is a substrate, and 3 is an intermediate layer according to the present invention.
この具体例においては、基板2上に磁性層1が積層され
、次いで中間層3が形成されているとともに、この中間
層3上にさらに磁性層1が形成されており、2つの磁性
層1によって中間rVI3が決着された構成になってい
る。In this specific example, a magnetic layer 1 is laminated on a substrate 2, and then an intermediate layer 3 is formed, and a magnetic layer 1 is further formed on this intermediate layer 3. Intermediate rVI3 is in a settled configuration.
磁気記録用または光磁気記録用などの磁性層1は、本発
明において基本的に限定されるものではなく、従来この
種の記録層として使用されている記録材料を有効に使用
できる。たとえば、CoCr、CoN1Pなどのめっき
、スパッタγ−Few O3、スパッタCo −r −
Fed O3などの磁気記録材料、TbTb5GdCo
などの希土類−遷移金属からなる非晶質材料、MnB1
. PtCoなど多結晶材料などを挙げることができる
。The magnetic layer 1 for magnetic recording or magneto-optical recording is not fundamentally limited in the present invention, and recording materials conventionally used for this type of recording layer can be effectively used. For example, plating such as CoCr, CoN1P, sputtering γ-Few O3, sputtering Co-r-
Magnetic recording materials such as Fed O3, TbTb5GdCo
Amorphous materials consisting of rare earth-transition metals such as MnB1
.. Examples include polycrystalline materials such as PtCo.
上記磁性層1に挟着される中間層3は、本発明において
、In層またはA1層またはrnを含む層またはAlを
含む層である。この明細書において、InないしA1を
含む層なる語は、前記Inないし^lを含む合金層、酸
化物、窒化物などの化合物層、さらにはInないしAl
またはIn合金ないしA1合金、前記InあるいはA1
を含む化合物をCS t 、フォトポリマなどの有機ポ
リマなどのマトリックス中に分散させた層などを示す概
念として使用されている。また、前記In合金、A1合
金、In化合物、Al化合物などは結晶質あるいは非晶
質のいずれでもよい、すなわち、AlないしInを含む
層であれば、本発明において基本的にその形態は限定さ
れない。In the present invention, the intermediate layer 3 sandwiched between the magnetic layers 1 is an In layer, an A1 layer, a layer containing rn, or a layer containing Al. In this specification, the term "layer containing In or Al" refers to an alloy layer containing In or Al, a compound layer such as an oxide or a nitride, or a layer containing In or Al.
or In alloy or A1 alloy, the above In or A1
It is used as a concept to indicate a layer in which a compound containing CS t is dispersed in a matrix such as an organic polymer such as a photopolymer. Further, the In alloy, A1 alloy, In compound, Al compound, etc. may be either crystalline or amorphous, that is, the form is basically not limited in the present invention as long as it is a layer containing Al or In. .
第2図は中間Jit3を2層以上設けた構成を示す具体
例である。この図より明らかなように、この具体例にお
いては、基板2上に磁性層lが設けられ、その磁性層1
に中間層3、磁性層1、第2の中間層3および磁性層1
が順次積層された構成になっている。FIG. 2 is a specific example showing a configuration in which two or more layers of intermediate JITs 3 are provided. As is clear from this figure, in this specific example, a magnetic layer l is provided on the substrate 2;
an intermediate layer 3, a magnetic layer 1, a second intermediate layer 3 and a magnetic layer 1;
are sequentially stacked.
このように上記具体例は、中間N3を2層設けた場合の
構成であるが、3層、4層、さらにそれ以上の多層にす
る場合も同様に構成可能であるのは明らかである。As described above, the above specific example is a configuration in which two layers of intermediate N3 are provided, but it is clear that a similar configuration is possible in the case of three, four, or even more layers.
なお、記録層である磁性層1は、所望の磁気特性、磁気
光学特性かえられれば、どんなに薄くてもよいが、現在
の成膜技術では磁性層だけの厚さは200λ程度が最薄
層であり、通常、厚さは5μ−程度である。同様に中間
層3は、磁性層1の所望の磁気特性あるいは磁気光学特
性を損なわない範囲ならば、どんなに厚くてもよいが、
通常は、1人〜tooo人の範囲であればよい。これら
の磁性膜1と中間層3の組み合わせは、機能的に種々窓
めることができる。Note that the magnetic layer 1, which is the recording layer, can be made as thin as desired as long as the desired magnetic and magneto-optical properties can be changed, but with the current film-forming technology, the thinnest thickness of the magnetic layer alone is about 200λ. Usually, the thickness is about 5 μm. Similarly, the intermediate layer 3 may be as thick as desired as long as it does not impair the desired magnetic properties or magneto-optical properties of the magnetic layer 1.
Usually, the number of people may range from 1 to too many people. The combination of the magnetic film 1 and the intermediate layer 3 can be functionally modified in various ways.
第3図は、In、 Al、 In合金、A1合金のいず
れかを、たとえばSi02層に分散させた中間層3を有
する場合の具体例であり、4は前記In、 Al、In
合金、Al合金のいずれか、5はSi02などの誘電体
、酸化物、窒化物、有機ポリマー、他の金属屑などのマ
トリックス層を示している。FIG. 3 shows a specific example of a case where the intermediate layer 3 has an intermediate layer 3 in which In, Al, In alloy, or A1 alloy is dispersed, for example, in a Si02 layer, and 4 indicates the above-mentioned In, Al, or In alloy.
alloy, Al alloy, and 5 indicates a matrix layer of dielectric material such as Si02, oxide, nitride, organic polymer, other metal scraps, etc.
以下、本発明の実施例について説明する。Examples of the present invention will be described below.
実施例1
磁性層として、TbFe膜を使用し、2極RFスバフタ
装置で成膜した。基板としてはガラスを使用した。ター
ゲットは1001II+1φの大きさの99.99%純
度のFe上に、10+AlAl1角のFeベレット(純
度99.99%)を並べた複合ターゲットを使用した。Example 1 A TbFe film was used as the magnetic layer and was formed using a two-pole RF scrubber apparatus. Glass was used as the substrate. The target used was a composite target in which 10+AlAl1 square Fe pellets (purity 99.99%) were arranged on 99.99% pure Fe having a size of 1001II+1φ.
膜作製に当たっては、あらかじめ7 Xl0−7Tor
rの真空度に排気後、4 xto−2〜8 xto−2
TorrのArガス中でスパッタ成膜を行った。次ぎに
、真空を破ることなく、InターゲットからInをスパ
ッタした。When preparing the film, 7Xl0-7Tor is applied in advance.
After evacuation to r vacuum level, 4 xto-2 to 8 xto-2
Sputtering film formation was performed in Ar gas at Torr. Next, In was sputtered from the In target without breaking the vacuum.
スパッタ厚は同様であるが、RFパワーは低く抑えた。The sputter thickness was the same, but the RF power was kept low.
その後、再びTbFe複合ターゲットからTbFeをス
パッタし、In層を一層設けた構成の試料N001を得
た。各膜厚はTbFe層SOO人/In層100人/T
bFe層500人であった。この膜構成は、第1図の膜
構成と同様である。Thereafter, TbFe was sputtered again from the TbFe composite target to obtain sample N001 having a structure in which an In layer was further provided. Each film thickness is TbFe layer SOO/In layer 100/T
There were 500 people in the bFe layer. This membrane configuration is similar to the membrane configuration shown in FIG.
実施例2
実施例1と同様にして、In層を2屓有する試料No、
2を作製した。各膜厚はTbFe層350人、Inl
”550人とそれぞれのトータル膜厚を試料No、・1
と同様にした。この構成は、第2図に示す膜構成と同様
である。Example 2 Sample No. 2 having two In layers was prepared in the same manner as in Example 1.
2 was produced. Each film thickness is TbFe layer 350, Inl
``The total film thickness of each of the 550 people was measured as sample No. 1.
I did the same thing. This configuration is similar to the membrane configuration shown in FIG.
実施例3
実施例1のInの代わりにAlを使用し、成膜条件を同
じにして試料No、 3を作製した。Example 3 Sample No. 3 was prepared using Al instead of In in Example 1 and using the same film forming conditions.
実施例4
Inの代わりにSi02上にInチップを面積非がIn
: SiO* =30 : 70の割合で配置した複合
ターゲットを用いスパッタを行った。成膜条件は実施例
1と同様である。また、膜構成は第3図に示すものと同
様である。これを試料N004とした。Example 4 In place of In, an In chip was placed on Si02 with an area of In
: SiO* = 30: Sputtering was performed using a composite target arranged at a ratio of 70. The film forming conditions are the same as in Example 1. Further, the film structure is similar to that shown in FIG. This was designated as sample N004.
比較例I
In層を設けず、TbFe層だけの試料を上述のスパッ
タ条件で作製し、試料N015とした。膜厚は1000
人であった。Comparative Example I A sample having only a TbFe layer without providing an In layer was prepared under the above sputtering conditions and designated as sample N015. Film thickness is 1000
It was a person.
上述の試料を用いて、70℃、85パワーR1+の恒温
恒湿槽に入れ、膜の初期値からの特性変化を測定した。Using the above-mentioned sample, it was placed in a constant temperature and humidity chamber at 70° C. and 85 power R1+, and changes in the characteristics of the film from the initial values were measured.
特性は反射率と磁性変化である。結果を第1表に示す。The characteristics are reflectance and magnetic change. The results are shown in Table 1.
(以下余白) 第1表 * 各試料について経時変化試験前の値を1とした。(Margin below) Table 1 *For each sample, the value before the aging test was set to 1.
上述の第1表より、以下のことがわかった。From Table 1 above, the following was found.
■ In層またはA1層を介して多層膜構成にした本発
明による記録媒体は、これを設けない記録媒体(試料N
o、 5 )に比較して経時変化が大幅に改善できる。■ The recording medium according to the present invention, which has a multilayer film structure through an In layer or an A1 layer, is different from a recording medium without this (sample N
o, 5), the change over time can be significantly improved.
■ 非磁性層はInを含む層構成の方がAlの場合より
劣化が少ない。(2) Deterioration of the nonmagnetic layer is less in a layer structure containing In than in the case of Al.
■ In層を一層設けた場合より多層とした方が効果が
ある。■ It is more effective to use multiple In layers than to provide a single In layer.
■ Si02にInを分散させたときよりもIn層担体
の方が効果がある。(2) An In layer carrier is more effective than when In is dispersed in Si02.
なお、本実施例においては、オーバコートを施さなかっ
たため、本発明による記録媒体においても表面劣化が多
少みられるが、オーバコートあるいは下地層またはそれ
らの両方を施せば、さらに経時変化を改善できる。Note that in this example, since no overcoat was applied, some surface deterioration was observed in the recording medium according to the present invention, but if an overcoat, an undercoat layer, or both were applied, the deterioration over time could be further improved.
以上説明したように、本発明においては、lnまたはA
1層、さらにはInまたはAlを含む眉を磁性層に挟持
せしめ、多層構造にすることにより、経時変化を防止す
ることが可能になる。このため高信頼性の記録媒体とす
ることが可能である。As explained above, in the present invention, ln or A
By sandwiching a single layer, or even a layer containing In or Al between magnetic layers to form a multilayer structure, it is possible to prevent deterioration over time. Therefore, it is possible to obtain a highly reliable recording medium.
第1図は本発明による記録媒体の一具体例の構成図、第
2図は他の具体例の構成図、第3図は第三の具体例の構
成図である。
■ ・・・磁性層、2 ・・・基板、3 ・・・中間層
。
出願人代理人 雨 宮 正 季
第1図
一\−2
第2図
一\−1
第3図FIG. 1 is a block diagram of one specific example of a recording medium according to the present invention, FIG. 2 is a block diagram of another specific example, and FIG. 3 is a block diagram of a third specific example. ■...Magnetic layer, 2...Substrate, 3...Intermediate layer. Applicant's agent Masaki Amemiya Figure 1-1\-2 Figure 2-1\-1 Figure 3
Claims (2)
層またはInを含む層を介して2層以上積層されている
ことを特徴とする記録媒体。(1) A recording medium characterized in that two or more magnetic layers are laminated with an Al layer, an In layer, a layer containing Al, or a layer containing In interposed therebetween.
m以下であることを特徴とする特許請求の範囲第1項記
載の記録媒体。(2) The total thickness of each magnetic layer is 200 Å or more and 5 μm
2. The recording medium according to claim 1, wherein the recording medium is less than or equal to m.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP61186598A JP2574768B2 (en) | 1986-08-08 | 1986-08-08 | Magneto-optical recording medium |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP61186598A JP2574768B2 (en) | 1986-08-08 | 1986-08-08 | Magneto-optical recording medium |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS6342054A true JPS6342054A (en) | 1988-02-23 |
JP2574768B2 JP2574768B2 (en) | 1997-01-22 |
Family
ID=16191358
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP61186598A Expired - Fee Related JP2574768B2 (en) | 1986-08-08 | 1986-08-08 | Magneto-optical recording medium |
Country Status (1)
Country | Link |
---|---|
JP (1) | JP2574768B2 (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5626973A (en) * | 1992-06-25 | 1997-05-06 | Teijin Limited | Magneto-optical layer and magneto-optical recording medium |
Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS62232738A (en) * | 1986-04-02 | 1987-10-13 | Oki Electric Ind Co Ltd | Photomagnetic recording medium |
-
1986
- 1986-08-08 JP JP61186598A patent/JP2574768B2/en not_active Expired - Fee Related
Patent Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS62232738A (en) * | 1986-04-02 | 1987-10-13 | Oki Electric Ind Co Ltd | Photomagnetic recording medium |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5626973A (en) * | 1992-06-25 | 1997-05-06 | Teijin Limited | Magneto-optical layer and magneto-optical recording medium |
Also Published As
Publication number | Publication date |
---|---|
JP2574768B2 (en) | 1997-01-22 |
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