JPS63171425A - Manufacture of magnetic recording medium - Google Patents
Manufacture of magnetic recording mediumInfo
- Publication number
- JPS63171425A JPS63171425A JP99487A JP99487A JPS63171425A JP S63171425 A JPS63171425 A JP S63171425A JP 99487 A JP99487 A JP 99487A JP 99487 A JP99487 A JP 99487A JP S63171425 A JPS63171425 A JP S63171425A
- Authority
- JP
- Japan
- Prior art keywords
- base
- magnetic
- magnet
- film
- substrate
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000004519 manufacturing process Methods 0.000 title claims description 12
- 239000010409 thin film Substances 0.000 claims abstract description 6
- 239000000758 substrate Substances 0.000 claims description 22
- 239000000428 dust Substances 0.000 abstract description 14
- 239000010408 film Substances 0.000 abstract description 14
- 230000004907 flux Effects 0.000 abstract description 5
- 238000004544 sputter deposition Methods 0.000 abstract description 4
- 238000004804 winding Methods 0.000 abstract description 2
- 239000007888 film coating Substances 0.000 abstract 1
- 238000009501 film coating Methods 0.000 abstract 1
- 239000006247 magnetic powder Substances 0.000 abstract 1
- 230000007723 transport mechanism Effects 0.000 description 3
- 230000015572 biosynthetic process Effects 0.000 description 2
- 238000000151 deposition Methods 0.000 description 2
- 230000008021 deposition Effects 0.000 description 2
- 239000002184 metal Substances 0.000 description 2
- 230000001154 acute effect Effects 0.000 description 1
- 229910045601 alloy Inorganic materials 0.000 description 1
- 239000000956 alloy Substances 0.000 description 1
- 239000011248 coating agent Substances 0.000 description 1
- 238000000576 coating method Methods 0.000 description 1
- 230000006866 deterioration Effects 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 238000005259 measurement Methods 0.000 description 1
- 230000007246 mechanism Effects 0.000 description 1
- 230000002265 prevention Effects 0.000 description 1
- 229910000938 samarium–cobalt magnet Inorganic materials 0.000 description 1
- 238000007740 vapor deposition Methods 0.000 description 1
- 229910000859 α-Fe Inorganic materials 0.000 description 1
Landscapes
- Manufacturing Of Magnetic Record Carriers (AREA)
Abstract
Description
【発明の詳細な説明】 〔産業上の利用分野〕 本発明は、真空成膜装置（例えばスパッタ装置。[Detailed description of the invention] [Industrial application field] The present invention relates to a vacuum film forming apparatus (for example, a sputtering apparatus).
蒸着装置等）を用い基体上に磁性膜を形成させることに
よる磁気記録媒体の製造装置に関するものである。The present invention relates to an apparatus for manufacturing a magnetic recording medium by forming a magnetic film on a substrate using a vapor deposition apparatus, etc.
従来、真空成膜装置を用いた磁気記録媒体の製造装置に
おいては、成膜室内で発生した粉塵及び凝集したフレー
クが基体の表面や、基体の搬送機構に付着し、製造する
磁気記録媒体の品質を著しく劣化させてしまう問題点が
あった。これを解決する装置として、特開昭５９−１３
９１３７号公報に記載の装置がある。即ち、基体の表面
又は基体のＩ！送機構に付着した磁性を有するフレーク
を取り除くため、基体及び基体の搬送機構の要所表面に
永久磁石を配置した装置である。Conventionally, in magnetic recording media manufacturing equipment using vacuum film deposition equipment, dust and agglomerated flakes generated in the film deposition chamber adhere to the surface of the substrate and the transport mechanism of the substrate, resulting in problems with the quality of the magnetic recording media being manufactured. There was a problem that caused significant deterioration. As a device to solve this problem, JP-A-59-13
There is an apparatus described in Japanese Patent No. 9137. That is, the surface of the substrate or the I! of the substrate. This is a device in which permanent magnets are placed on key surfaces of the substrate and the substrate transport mechanism in order to remove magnetic flakes attached to the transport mechanism.
しかるに上記装置では、磁石上に粉塵やフレークを捕獲
する効率が充分とはいえなかった。However, the efficiency of capturing dust and flakes on the magnet with the above device was not sufficient.
本発明の目的は金属磁性薄膜形成の際、装置内で発生す
る粉塵やフレークを効率的に捕獲し、長時間にわたる安
定した製造を可能にする装置を提供することにある。An object of the present invention is to provide an apparatus that efficiently captures dust and flakes generated within the apparatus during the formation of a metal magnetic thin film and enables stable production over a long period of time.
本発明は、真空中で搬送される基体上に磁性薄膜を形成
し、磁気記録媒体を製造する装置において、該装置中に
基体に対向して突起を有する磁石を配設したことを特徴
とする磁気記録媒体の製造装置を要旨とする。The present invention is an apparatus for manufacturing a magnetic recording medium by forming a magnetic thin film on a substrate conveyed in a vacuum, characterized in that a magnet having a protrusion facing the substrate is disposed in the apparatus. The main subject is magnetic recording media manufacturing equipment.
上記本発明における磁石は永久磁石でも、電磁石でもよ
い。The magnet in the present invention may be a permanent magnet or an electromagnet.
以下、本発明を図面によって説明する。Hereinafter, the present invention will be explained with reference to the drawings.
第２図は本発明の基体に対向して突起を有する磁石を配
設した状態を説明するための側面図である。FIG. 2 is a side view for explaining a state in which a magnet having protrusions is disposed facing the base of the present invention.
（ａｌは本発明の板状の磁石の１例、（ｂ）は本発明の
円筒状で回転する磁石の１例をしめす。何れも磁石１２
は基体２１に対向して突起１３を有している。(al indicates an example of the plate-shaped magnet of the present invention, and (b) indicates an example of the cylindrical rotating magnet of the present invention. In each case, the magnet 12
has a protrusion 13 facing the base body 21.
本発明の基体に対向する突起は第２図に示すように断面
が三角柱形の頂点を持ったもので、先端はある程度の丸
味をもたしても良い。又突起の個数は必要によって（ａ
）に示すように磁石全面に分布したもの、または（ｂｌ
に示すように離して設置したものを用いる。The protrusion facing the base of the present invention has a triangular prism-shaped apex in cross section as shown in FIG. 2, and the tip may have a certain degree of roundness. Also, the number of protrusions may vary depending on necessity (a
), distributed over the entire surface of the magnet, or (bl
Use those installed at a distance as shown in the figure.
又本発明の磁石は、基体を挟んで２つの磁石を対向させ
て用いる場合は、第３図に示すように総磁束がほぼ同程
度の磁石をそれぞれの磁石２２のＮ極と磁石２３のＳ極
とを基体２１に対向して配設し、且つ基体２１表面側に
位置する磁石の磁界面積が基体裏面側に位置する磁石の
磁界面積よりも小にして、その表面に突起を有した本発
明の磁石を配設することが好ましい。In addition, when the magnet of the present invention is used with two magnets facing each other with a base body in between, as shown in FIG. The magnetic field area of the magnet located on the front side of the base body 21 is smaller than the magnetic field area of the magnet located on the back side of the base body, and the magnet has protrusions on its surface. Preferably, an inventive magnet is provided.
次に、本発明の突起１３の高さ、形状１個数等に関して
説明すると、第４図（ａｌは本発明の磁石の側面図であ
るが、磁石本体１２の厚み１１．突起１３の高さ１２．
先鋭角度θ、突起個所の磁束密度Ｂ２ 、その裏面の磁
束密度Ｂ、とする１２／ｌ＋ とθ及びＢ、／Ｂ、の関
係は、実測によると１例として第４図のようになる。Next, to explain the height, shape, number, etc. of the protrusions 13 of the present invention, as shown in FIG. ．．
According to actual measurements, the relationship between 12/l+ and θ, B, and /B, where the acute angle θ, the magnetic flux density B2 at the protrusion, and the magnetic flux density B2 on the back surface thereof, is as shown in FIG. 4, as an example.
基体の表面や、基体の搬送機構に付着している粉塵や、
凝集したフレークを強力に捕獲するには、基体に対向す
る突起面の磁束密度Ｂ２の高いことが有効である。従っ
て第４図（ｂｌに見られるように８２ ／ Ｂ ｔ の
高い値を示す条件に角度θ及びｅ２／１＋ の条件を設
定することが望ましい。Dust adhering to the surface of the substrate or the transportation mechanism of the substrate,
In order to strongly capture agglomerated flakes, it is effective that the magnetic flux density B2 of the protruding surface facing the base is high. Therefore, as shown in FIG. 4 (bl), it is desirable to set the conditions for the angle θ and e2/1+ to a condition that shows a high value of 82/B t .
図上、角度θ＝１５であると８２／Ｂｌは２．７倍にも
達し、ｊ２．／Ｎ、 の条件は０．２４≦１．２．／ｆ
ｆＩ ≦０．３２となる。又角度θ＝４５″の場合Ｂ
： ／ Ｂ Ｉの最高は２．４になり、０．７≦ｊ！
２／１． ≦１．２となることが判る。In the figure, when the angle θ=15, 82/Bl reaches 2.7 times, and j2. /N, the condition is 0.24≦1.2. /f
fI≦0.32. Also, when the angle θ=45'', B
: / The highest B I is 2.4, and 0.7≦j!
2/1. It can be seen that ≦1.2.
上記のことより、本発明の突起を有する磁石は第４図（
ｂｌに示すようなものについて、使用出来る条件として
Ｂ ／Ｂ が２以上を示すことより、５≦θ≦４５
’、０．２≦１２ ／ｅ＋ ≦１．５１７）範囲であ
り、好ましくは１５″≦θ≦４５°、０．２≦１！ｚ／
ｊ！＋ ≦１．４ということが言える。From the above, the magnet having protrusions of the present invention is shown in Fig. 4 (
Regarding the item shown in bl, the condition for use is that B /B is 2 or more, so 5≦θ≦45.
', 0.2≦12/e+≦1.517), preferably 15''≦θ≦45°, 0.2≦1!z/
j! It can be said that +≦1.4.
又本発明の突起の個数は１つの突起の底辺ｄ□。Also, the number of protrusions in the present invention is the base d□ of one protrusion.
磁石全体の底辺ｄ、としたときｄ＋／ｄｚ＝ｄ＋／（２
Ｊ：ｔａｎ θ／２）より求められろ。When the base of the entire magnet is d, d+/dz=d+/(2
J: tan θ/2).
本発明は、真空中に搬送される基体上に磁性薄膜を形成
し磁気記録媒体を製造する装置において、該装置中に基
体に対向して突起を有する磁石を配設したことにより、
突起部に磁束を集中させることにより基体表面に付着し
ている金属粉塵及び凝集したフレークを強力に捕獲する
ことが出来る。The present invention provides an apparatus for manufacturing a magnetic recording medium by forming a magnetic thin film on a substrate transported in a vacuum, in which a magnet having a protrusion facing the substrate is disposed in the apparatus.
By concentrating magnetic flux on the protrusion, metal dust and agglomerated flakes adhering to the surface of the substrate can be strongly captured.
本発明の一実施例を第１図によって説明する。 An embodiment of the present invention will be described with reference to FIG.
真空成膜装置１内において、キャン５の左右からターゲ
ット７ａ、７ｂがスパッタする構造の装置であり、磁性
被膜を形成される基体９は送り出しロール２からガイド
ロール４ａ、４ｂを経てキャン５に送られターゲット７
ａ、７ｂによるスパッタで磁性膜を被膜させられ、ガイ
ドロール４ｃ。In the vacuum film forming apparatus 1, targets 7a and 7b are sputtered from the left and right sides of the can 5, and the substrate 9 on which the magnetic coating is to be formed is sent from the delivery roll 2 to the can 5 via the guide rolls 4a and 4b. Target 7
The guide roll 4c is coated with a magnetic film by sputtering by a and 7b.
４ｄを経て巻取ロール３に巻取られる。スパッタする際
に発生する粉塵は真空成膜室内に拡がるが、キャン上部
で基体上に粉塵及びフレークが落下付着するのを防止す
るため防着板６がある。4d and then wound onto a take-up roll 3. Dust generated during sputtering spreads inside the vacuum film forming chamber, but an adhesion prevention plate 6 is provided above the can to prevent the dust and flakes from falling and adhering to the substrate.
成膜時に発生する磁性粉塵およびフレークが基体上に付
着するのを防止するため、送出しロール２の直後と巻取
ロール３の直前に、第３図に示すような本発明の磁石１
０ａ、１０ｂを配役した。In order to prevent magnetic dust and flakes generated during film formation from adhering to the substrate, a magnet 1 of the present invention as shown in FIG.
0a and 10b were cast.
磁石は基体表面側に ＳｍＣｏ合金（Ｂｒ、９７００Ｇ
、磁界面積１５ｃ＋Ｊ）を、基体裏面側にフェライトＣ
３ｒ系）（Ｂｒ、２０００Ｇ、磁界面積；７５ｃｄ）を
それぞれ使用した。The magnet is made of SmCo alloy (Br, 9700G) on the surface side of the base.
, magnetic field area 15c+J), and ferrite C on the back side of the base.
3r series) (Br, 2000G, magnetic field area: 75cd) were used.
なお本製造装置には受は皿８を設置し、その底部に磁石
Ｌ１ａ、１１ｂを配設することが粉塵及びフレークの捕
獲効率向上のために好ましい。In order to improve the efficiency of capturing dust and flakes, it is preferable to install a tray 8 in this manufacturing apparatus and to arrange magnets L1a and 11b at the bottom thereof.
尚、基体がキャン５に支持される前後に第２図（ａｌに
示すような板状の磁石１３ａ、１３ｂを配設した。Note that plate-shaped magnets 13a and 13b as shown in FIG. 2 (al) were disposed before and after the base body was supported by the can 5.
その結果本装置で士卒した磁気記録媒体はフレークによ
る品質の劣化が少く、かつ磁気記録媒体の製造装置の長
時間操業が可能であった。As a result, the quality of the magnetic recording medium produced using this apparatus was less likely to deteriorate due to flakes, and the magnetic recording medium manufacturing apparatus could be operated for a long time.
本発明の基体上に付着した粉塵およびフレークを取除く
装置が、基体に対向して突起を有する磁石を配設したこ
とにより、基体表面に付着した粉塵及びフレークが強力
かつ確実に取除かれ、磁性膜の表面品質が向上し、さら
に磁気記録媒体の製造装面の長時間操業が可能となり生
産性が向上した。Since the device for removing dust and flakes adhering to the substrate of the present invention has a magnet having protrusions facing the substrate, the dust and flakes adhering to the surface of the substrate can be strongly and reliably removed. The surface quality of the magnetic film has been improved, and the manufacturing equipment for magnetic recording media can now be operated for long periods of time, improving productivity.
対向して配設した関係を説明するための側面図。
第３図は本発明に係る対向配設磁石の一実施例の側面図
、第４図は本発明の磁石の諸元の関係を説明するための
断面図（ａ）、とグラフ（ｂｌである。
１・・・真空成膜室
２・・・送り出しロール
３・・・巻取りロール
４ａ、４ｂ、４ｃ、 ４ｄ ・・−ガイドロール５
・・・キャン ６・・・防着板７．７ａ、、７ｂ
・・・ターゲット８ａ、８ｂ・・・受皿 ９・・
・基体１０ａ、１０ｂ・−・磁石
１１ａ、ｌｌｂ １２・・・磁石本体１３・・
・突起 ２１・・・基体２２・・・磁石
２４・・・磁性粉塵フレーク
２５・・・磁力線
（ほか ３名）
第 ２ 図
（ａ）
（ｂ）
第 ３ 図FIG. 3 is a side view for explaining the relationship in which they are arranged facing each other. FIG. 3 is a side view of one embodiment of the oppositely arranged magnet according to the present invention, and FIG. 4 is a sectional view (a) and a graph (bl) for explaining the relationship between the specifications of the magnet of the present invention. 1... Vacuum film forming chamber 2... Delivery roll 3... Winding rolls 4a, 4b, 4c, 4d...-Guide roll 5
... Can 6 ... Anti-adhesion plates 7.7a, 7b
...Targets 8a, 8b...Saucer 9...
・Base 10a, 10b... Magnet 11a, llb 12... Magnet body 13...
・Protrusion 21...Base 22...Magnet 24...Magnetic dust flakes 25...Magnetic field lines (3 others) Figure 2 (a) (b) Figure 3
Claims (1)
媒体を製造する装置において、該装置中に基体に対向し
て突起を有する磁石を配設したことを特徴とする磁気記
録媒体の製造装置。An apparatus for manufacturing a magnetic recording medium by forming a magnetic thin film on a substrate conveyed in a vacuum, characterized in that a magnet having a protrusion facing the substrate is disposed in the apparatus. Device.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP99487A JPS63171425A (en) | 1987-01-08 | 1987-01-08 | Manufacture of magnetic recording medium |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP99487A JPS63171425A (en) | 1987-01-08 | 1987-01-08 | Manufacture of magnetic recording medium |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS63171425A true JPS63171425A (en) | 1988-07-15 |
Family
ID=11489148
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP99487A Pending JPS63171425A (en) | 1987-01-08 | 1987-01-08 | Manufacture of magnetic recording medium |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS63171425A (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN114574814A (en) * | 2020-11-30 | 2022-06-03 | 佳能特机株式会社 | Conveying device, film forming method, method for manufacturing electronic device, and film forming device |
| JP2022086586A (en) * | 2020-11-30 | 2022-06-09 | キヤノントッキ株式会社 | Transport device, deposition apparatus, deposition method, and production method of electronic device |
-
1987
- 1987-01-08 JP JP99487A patent/JPS63171425A/en active Pending
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN114574814A (en) * | 2020-11-30 | 2022-06-03 | 佳能特机株式会社 | Conveying device, film forming method, method for manufacturing electronic device, and film forming device |
| JP2022086587A (en) * | 2020-11-30 | 2022-06-09 | キヤノントッキ株式会社 | Transportation device, film deposition apparatus, method for depositing film and method for manufacturing electronic device |
| JP2022086586A (en) * | 2020-11-30 | 2022-06-09 | キヤノントッキ株式会社 | Transport device, deposition apparatus, deposition method, and production method of electronic device |
| CN114574814B (en) * | 2020-11-30 | 2023-12-22 | 佳能特机株式会社 | Conveying device, film forming method, method for manufacturing electronic device, and film forming device |
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