JPS63171346A - 欠陥検査装置 - Google Patents

欠陥検査装置

Info

Publication number
JPS63171346A
JPS63171346A JP62249879A JP24987987A JPS63171346A JP S63171346 A JPS63171346 A JP S63171346A JP 62249879 A JP62249879 A JP 62249879A JP 24987987 A JP24987987 A JP 24987987A JP S63171346 A JPS63171346 A JP S63171346A
Authority
JP
Japan
Prior art keywords
foreign matter
photoelectric
inspected
scanning
laser beam
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP62249879A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0341786B2 (enrdf_load_stackoverflow
Inventor
Shoichi Tanimoto
昭一 谷元
Kazunori Imamura
今村　和則
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Nikon Corp
Original Assignee
Nikon Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nikon Corp filed Critical Nikon Corp
Priority to JP62249879A priority Critical patent/JPS63171346A/ja
Publication of JPS63171346A publication Critical patent/JPS63171346A/ja
Publication of JPH0341786B2 publication Critical patent/JPH0341786B2/ja
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/94—Investigating contamination, e.g. dust

Landscapes

  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
  • Preparing Plates And Mask In Photomechanical Process (AREA)
JP62249879A 1987-10-05 1987-10-05 欠陥検査装置 Granted JPS63171346A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP62249879A JPS63171346A (ja) 1987-10-05 1987-10-05 欠陥検査装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP62249879A JPS63171346A (ja) 1987-10-05 1987-10-05 欠陥検査装置

Related Parent Applications (1)

Application Number Title Priority Date Filing Date
JP1438781A Division JPS57128834A (en) 1981-02-04 1981-02-04 Inspecting apparatus of foreign substance

Publications (2)

Publication Number Publication Date
JPS63171346A true JPS63171346A (ja) 1988-07-15
JPH0341786B2 JPH0341786B2 (enrdf_load_stackoverflow) 1991-06-25

Family

ID=17199557

Family Applications (1)

Application Number Title Priority Date Filing Date
JP62249879A Granted JPS63171346A (ja) 1987-10-05 1987-10-05 欠陥検査装置

Country Status (1)

Country Link
JP (1) JPS63171346A (enrdf_load_stackoverflow)

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS51104884A (ja) * 1975-03-13 1976-09-17 Tokyo Shibaura Electric Co Ketsukankensasochi

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS51104884A (ja) * 1975-03-13 1976-09-17 Tokyo Shibaura Electric Co Ketsukankensasochi

Also Published As

Publication number Publication date
JPH0341786B2 (enrdf_load_stackoverflow) 1991-06-25

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