JPS631699B2 - - Google Patents
Info
- Publication number
- JPS631699B2 JPS631699B2 JP55176626A JP17662680A JPS631699B2 JP S631699 B2 JPS631699 B2 JP S631699B2 JP 55176626 A JP55176626 A JP 55176626A JP 17662680 A JP17662680 A JP 17662680A JP S631699 B2 JPS631699 B2 JP S631699B2
- Authority
- JP
- Japan
- Prior art keywords
- anode
- cathode
- cavity
- axis
- hole
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 238000000605 extraction Methods 0.000 claims description 20
- 230000005855 radiation Effects 0.000 claims description 12
- 230000002401 inhibitory effect Effects 0.000 claims 1
- 230000000694 effects Effects 0.000 description 3
- 239000002245 particle Substances 0.000 description 3
- 230000015572 biosynthetic process Effects 0.000 description 1
- 239000004020 conductor Substances 0.000 description 1
- 230000005684 electric field Effects 0.000 description 1
- 238000010894 electron beam technology Methods 0.000 description 1
- 239000000284 extract Substances 0.000 description 1
- 230000004907 flux Effects 0.000 description 1
- 239000011810 insulating material Substances 0.000 description 1
- 238000010884 ion-beam technique Methods 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 230000036470 plasma concentration Effects 0.000 description 1
- 238000005070 sampling Methods 0.000 description 1
- 238000003466 welding Methods 0.000 description 1
Landscapes
- Electron Sources, Ion Sources (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP55176626A JPS57113547A (en) | 1980-12-16 | 1980-12-16 | Electron ion source |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP55176626A JPS57113547A (en) | 1980-12-16 | 1980-12-16 | Electron ion source |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS57113547A JPS57113547A (en) | 1982-07-15 |
JPS631699B2 true JPS631699B2 (enrdf_load_stackoverflow) | 1988-01-13 |
Family
ID=16016862
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP55176626A Granted JPS57113547A (en) | 1980-12-16 | 1980-12-16 | Electron ion source |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS57113547A (enrdf_load_stackoverflow) |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS60182640A (ja) * | 1984-02-29 | 1985-09-18 | Toshiba Corp | イオン源装置 |
-
1980
- 1980-12-16 JP JP55176626A patent/JPS57113547A/ja active Granted
Also Published As
Publication number | Publication date |
---|---|
JPS57113547A (en) | 1982-07-15 |
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