JPS6316994Y2 - - Google Patents
Info
- Publication number
- JPS6316994Y2 JPS6316994Y2 JP13400981U JP13400981U JPS6316994Y2 JP S6316994 Y2 JPS6316994 Y2 JP S6316994Y2 JP 13400981 U JP13400981 U JP 13400981U JP 13400981 U JP13400981 U JP 13400981U JP S6316994 Y2 JPS6316994 Y2 JP S6316994Y2
- Authority
- JP
- Japan
- Prior art keywords
- electrode
- fixed
- pressure
- main body
- plate
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 238000005452 bending Methods 0.000 claims 4
- 238000006073 displacement reaction Methods 0.000 description 4
- 238000004519 manufacturing process Methods 0.000 description 4
- 238000010586 diagram Methods 0.000 description 3
- 238000001514 detection method Methods 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 238000013459 approach Methods 0.000 description 1
- 230000007423 decrease Effects 0.000 description 1
- 238000003780 insertion Methods 0.000 description 1
- 230000037431 insertion Effects 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 230000002093 peripheral effect Effects 0.000 description 1
Landscapes
- Measuring Fluid Pressure (AREA)
- Measurement Of Length, Angles, Or The Like Using Electric Or Magnetic Means (AREA)
- Transmission And Conversion Of Sensor Element Output (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13400981U JPS5839542U (ja) | 1981-09-09 | 1981-09-09 | 圧力変換装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13400981U JPS5839542U (ja) | 1981-09-09 | 1981-09-09 | 圧力変換装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5839542U JPS5839542U (ja) | 1983-03-15 |
| JPS6316994Y2 true JPS6316994Y2 (US20100223739A1-20100909-C00005.png) | 1988-05-13 |
Family
ID=29927454
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP13400981U Granted JPS5839542U (ja) | 1981-09-09 | 1981-09-09 | 圧力変換装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5839542U (US20100223739A1-20100909-C00005.png) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP4821487B2 (ja) * | 2006-08-02 | 2011-11-24 | ソニー株式会社 | アクチュエータ装置及びその駆動方法 |
-
1981
- 1981-09-09 JP JP13400981U patent/JPS5839542U/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5839542U (ja) | 1983-03-15 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| US6205861B1 (en) | Transducer having temperature compensation | |
| EP1456599B1 (en) | Position sensor comprising elastomeric material | |
| CN101273256A (zh) | 双音叉型压电振动元件及压力传感器 | |
| JPS6227636A (ja) | 圧力変換器 | |
| JPH02502568A (ja) | 機械的な運動増幅手段を備えたコンパクトな力トランスジューサ | |
| JPS6057528B2 (ja) | ひずみゲ−ジ荷重変換器 | |
| JPH11295176A (ja) | 差圧センサ | |
| JP2004069562A (ja) | 容量式力学量センサ | |
| JPS6316994Y2 (US20100223739A1-20100909-C00005.png) | ||
| JPS5818130A (ja) | 変換器で用いられるたわみ構造 | |
| JPS604118Y2 (ja) | パイプ式圧力センサ | |
| JPS6346833Y2 (US20100223739A1-20100909-C00005.png) | ||
| JPS6110197Y2 (US20100223739A1-20100909-C00005.png) | ||
| JP2865266B2 (ja) | 半導体加速度センサ | |
| JP2939922B2 (ja) | 加速度変換器 | |
| JPS6119928B2 (US20100223739A1-20100909-C00005.png) | ||
| JPS601399Y2 (ja) | パイプ式圧力センサ | |
| JPS62211526A (ja) | 曲げモ−メントが生じないように分割された板ばねを有する、力又は圧力を受容するための機構 | |
| JP2939921B2 (ja) | 加速度変換器 | |
| JPS6140054B2 (US20100223739A1-20100909-C00005.png) | ||
| JPS6330734A (ja) | 機械・電気変換器 | |
| JPH083439B2 (ja) | ロ−ドセル | |
| JPS601402Y2 (ja) | 静電容量式差圧伝送器 | |
| JPS5842943A (ja) | 差動容量式圧力・差圧計 | |
| JP2000292270A (ja) | 静電容量型荷重センサ |
