JPS63168900U

JPS63168900U -

Info

Publication number: JPS63168900U
Application number: JP6291087U
Authority: JP
Priority date: 1987-04-24
Filing date: 1987-04-24
Publication date: 1988-11-02

Description

[Brief explanation of the drawing]

第１図はこの考案の第１の実施例の断面図、第
２図はその部分拡大断面図、第３図は同じくその
二次窓箔押え枠の平面図、第４図はこの考案の第
２の実施例の要部断面図、第５図はこの考案の第
３の実施例の要部断面図、第６図はその斜視図、
第７図は従来例の断面図、第８図はその部分断面
図である。１……真空容器、２……照射窓、３……窓箔、
４……窓箔押え枠、６……照射雰囲気、７……隔
壁、８……二次窓、９……二次窓箔押え枠、１０
……二次窓箔、２０……弾性箔押え、２０ａ，２
０ａ′……押え部材、２０ｂ……板ばね。 Fig. 1 is a sectional view of the first embodiment of this invention, Fig. 2 is a partially enlarged sectional view thereof, Fig. 3 is a plan view of the secondary window foil press frame, and Fig. 4 is a sectional view of the first embodiment of this invention. FIG. 5 is a cross-sectional view of the main part of the third embodiment of this invention; FIG. 6 is a perspective view thereof;
FIG. 7 is a sectional view of a conventional example, and FIG. 8 is a partial sectional view thereof. 1... Vacuum container, 2... Irradiation window, 3... Window foil,
4...Window foil press frame, 6...Irradiation atmosphere, 7...Partition wall, 8...Secondary window, 9...Secondary window foil press frame, 10
...Secondary window foil, 20...Elastic foil presser, 20a, 2
0a'...pressing member, 20b...plate spring.

Claims

[Scope of utility model registration request]

A partition wall is provided to shield the outside of the window foil of the irradiation window of the vacuum container containing the electron beam generation source from the electron beam irradiation atmosphere, and a secondary window facing the irradiation window is provided in the partition wall, and the secondary window In a secondary window foil fixing device for an electron beam irradiation device, in which a secondary window foil covering the partition wall is clamped and fixed between a peripheral edge of the secondary window of the partition wall and a secondary window foil presser frame, the secondary window foil presser A secondary window for an electron beam irradiation device, characterized in that an elastic foil presser is attached to the inner peripheral edge of either the frame or the secondary window, protruding toward the other side and pressing the secondary window foil into a taut state. Foil fixing device.