JPS6382943U - - Google Patents
Info
- Publication number
- JPS6382943U JPS6382943U JP17661386U JP17661386U JPS6382943U JP S6382943 U JPS6382943 U JP S6382943U JP 17661386 U JP17661386 U JP 17661386U JP 17661386 U JP17661386 U JP 17661386U JP S6382943 U JPS6382943 U JP S6382943U
- Authority
- JP
- Japan
- Prior art keywords
- sample
- vacuum
- sample holder
- atmosphere
- electron beam
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000000609 electron-beam lithography Methods 0.000 claims 2
Landscapes
- Electron Beam Exposure (AREA)
Description
第１図は本案の一実施例を示す試料ホルダの断
面図、第２図は平面図、第３図は本案の別な実施
例を示す試料ホルダの断面図である。
１……外枠、２……内板、３……試料、６……
真空吸着路、８，９……基準面、１４……ばね。
FIG. 1 is a cross-sectional view of a sample holder showing one embodiment of the present invention, FIG. 2 is a plan view, and FIG. 3 is a cross-sectional view of a sample holder showing another embodiment of the present invention. 1...outer frame, 2...inner plate, 3...sample, 6...
Vacuum suction path, 8, 9...Reference surface, 14...Spring.
Claims (1)
る試料ホルダにおいて、該試料ホルダ部材の一部
に、大気中において真空源を接続することにより
試料を真空吸着するよう構成し、かつメカニカル
な試料固定機能を持たせた事を特徴とする電子線
描画装置の試料ホルダ。 ２ 請求の範囲第１項において、試料の真空吸着
面の一部に弾性体からなる試料のメカニカルな固
定機能を備えた事を特徴とする電子線描画装置の
試料ホルダ。[Claims for Utility Model Registration] 1. In a sample holder that moves between a vacuum and the atmosphere to hold a drawn sample, a vacuum source is connected to a part of the sample holder member in the atmosphere so that the sample can be vacuum-adsorbed. A sample holder for an electron beam lithography system, characterized by being configured to do so and having a mechanical sample fixing function. 2. The sample holder for an electron beam lithography apparatus according to claim 1, characterized in that a part of the vacuum suction surface of the sample is provided with a mechanical fixing function for the sample made of an elastic body.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP17661386U JPS6382943U (en) | 1986-11-19 | 1986-11-19 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP17661386U JPS6382943U (en) | 1986-11-19 | 1986-11-19 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6382943U true JPS6382943U (en) | 1988-05-31 |
Family
ID=31117024
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP17661386U Pending JPS6382943U (en) | 1986-11-19 | 1986-11-19 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6382943U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPWO2013039080A1 (en) * | 2011-09-16 | 2015-03-26 | 住友重機械工業株式会社 | Board manufacturing equipment |
-
1986
- 1986-11-19 JP JP17661386U patent/JPS6382943U/ja active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPWO2013039080A1 (en) * | 2011-09-16 | 2015-03-26 | 住友重機械工業株式会社 | Board manufacturing equipment |