JPS63168955U - - Google Patents
Info
- Publication number
- JPS63168955U JPS63168955U JP6290787U JP6290787U JPS63168955U JP S63168955 U JPS63168955 U JP S63168955U JP 6290787 U JP6290787 U JP 6290787U JP 6290787 U JP6290787 U JP 6290787U JP S63168955 U JPS63168955 U JP S63168955U
- Authority
- JP
- Japan
- Prior art keywords
- window
- ring
- irradiation
- vacuum container
- foil
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000011888 foil Substances 0.000 claims description 7
- 238000010894 electron beam technology Methods 0.000 claims 2
Description
第１図はこの考案の一実施例の断面図、第２図
はその窓箔押え枠の平面図、第３図は第２図の
―線拡大断面図、第４図は同じくその全体の分
解状態の断面図、第５図は従来例の分解状態の断
面図である。
１……真空容器、２……照射窓、３……窓箔、
４……Ｏリング、５……窓箔押え枠、６……Ｏリ
ング固定枠。
Figure 1 is a cross-sectional view of one embodiment of this invention, Figure 2 is a plan view of the window foil press frame, Figure 3 is an enlarged cross-sectional view taken along the line - - in Figure 2, and Figure 4 is an exploded view of the whole. FIG. 5 is a sectional view of the conventional example in an exploded state. 1... Vacuum container, 2... Irradiation window, 3... Window foil,
4... O-ring, 5... Window foil press frame, 6... O-ring fixing frame.
Claims (1)
を設け、前記照射窓の周囲に位置して前記窓箔の
内面または外面に重ねるＯリングを外周に嵌着し
たＯリング固定枠を設け、前記真空容器に締付具
で取付けられて前記窓箔の周縁と前記Ｏリングと
を重なり状態で前記真空容器の前記照射窓の周囲
に押付ける窓箔押え枠を設けた電子線照射装置の
照射窓装置。 A window foil is provided to cover an irradiation window for taking out the electron beam of the vacuum container, an O-ring fixing frame is provided around the irradiation window and an O-ring is fitted on the outer periphery of the O-ring which overlaps the inner or outer surface of the window foil; An irradiation window of an electron beam irradiation device, which is provided with a window foil press frame that is attached to a vacuum container with a fastener and presses the periphery of the window foil and the O-ring around the irradiation window of the vacuum container in an overlapping state. Device.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6290787U JPS63168955U (en) | 1987-04-24 | 1987-04-24 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6290787U JPS63168955U (en) | 1987-04-24 | 1987-04-24 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS63168955U true JPS63168955U (en) | 1988-11-02 |
Family
ID=30897638
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP6290787U Pending JPS63168955U (en) | 1987-04-24 | 1987-04-24 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS63168955U (en) |
-
1987
- 1987-04-24 JP JP6290787U patent/JPS63168955U/ja active Pending