JPS63168899U - - Google Patents
Info
- Publication number
- JPS63168899U JPS63168899U JP6290987U JP6290987U JPS63168899U JP S63168899 U JPS63168899 U JP S63168899U JP 6290987 U JP6290987 U JP 6290987U JP 6290987 U JP6290987 U JP 6290987U JP S63168899 U JPS63168899 U JP S63168899U
- Authority
- JP
- Japan
- Prior art keywords
- secondary window
- partition wall
- electron beam
- foil
- window
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000011888 foil Substances 0.000 claims description 12
- 238000005192 partition Methods 0.000 claims description 5
- 238000010894 electron beam technology Methods 0.000 claims 4
- 230000002093 peripheral effect Effects 0.000 claims 2
Landscapes
- Particle Accelerators (AREA)
- Physical Or Chemical Processes And Apparatus (AREA)
Description
第１図はこの考案の一実施例の断面図、第２図
はその部分拡大断面図、第３図は同じくその二次
窓箔押え枠の平面図、第４図は従来例の断面図で
ある。
１……真空容器、２……照射窓、３……窓箔、
４……窓箔押え枠、６……照射雰囲気、７……隔
壁、８……二次窓、９……二次窓箔押え枠、９ａ
……突条、１０……二次窓箔。
Fig. 1 is a sectional view of an embodiment of this invention, Fig. 2 is a partially enlarged sectional view thereof, Fig. 3 is a plan view of the secondary window foil press frame, and Fig. 4 is a sectional view of a conventional example. be. 1... Vacuum container, 2... Irradiation window, 3... Window foil,
4...Window foil press frame, 6...Irradiation atmosphere, 7...Partition wall, 8...Secondary window, 9...Secondary window foil press frame, 9a
...Protrusion, 10...Secondary window foil.
Claims (1)
箔の外部と電子線の照射雰囲気とを遮蔽する隔壁
を設け、この隔壁に前記照射窓と対向する二次窓
を設け、この二次窓を覆う二次窓箔を前記隔壁の
前記二次窓の周縁と二次窓箔押え枠とで挾み付け
て固定した電子線照射装置の二次窓箔固定装置に
おいて、前記二次窓箔押え枠と前記二次窓とのい
ずれか一方の内周縁に、他方側へ突出して前記二
次窓箔を緊張状態に押す突条を設けたことを特徴
とする電子線照射装置の二次窓箔固定装置。 A partition wall is provided to shield the outside of the window foil of the irradiation window of the vacuum container containing the electron beam generation source from the electron beam irradiation atmosphere, and a secondary window facing the irradiation window is provided in the partition wall, and the secondary window In a secondary window foil fixing device for an electron beam irradiation device, in which a secondary window foil covering the partition wall is clamped and fixed between a peripheral edge of the secondary window of the partition wall and a secondary window foil presser frame, the secondary window foil presser A secondary window foil for an electron beam irradiation device, characterized in that a protrusion is provided on the inner peripheral edge of either the frame or the secondary window, protruding toward the other side and pressing the secondary window foil into a tensioned state. Fixation device.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1987062909U JPH0648480Y2 (en) | 1987-04-24 | 1987-04-24 | Secondary window foil fixing device for electron beam irradiation device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1987062909U JPH0648480Y2 (en) | 1987-04-24 | 1987-04-24 | Secondary window foil fixing device for electron beam irradiation device |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS63168899U true JPS63168899U (en) | 1988-11-02 |
| JPH0648480Y2 JPH0648480Y2 (en) | 1994-12-12 |
Family
ID=30897642
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1987062909U Expired - Lifetime JPH0648480Y2 (en) | 1987-04-24 | 1987-04-24 | Secondary window foil fixing device for electron beam irradiation device |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0648480Y2 (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2011033396A (en) * | 2009-07-30 | 2011-02-17 | Hamamatsu Photonics Kk | Window structure, electron beam emission device, and x-ray emission device |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5196998A (en) * | 1975-02-24 | 1976-08-25 | ||
| JPS60148999U (en) * | 1984-03-13 | 1985-10-03 | 日新ハイボルテ−ジ株式会社 | Electron beam extraction window structure of electron beam irradiation equipment |
-
1987
- 1987-04-24 JP JP1987062909U patent/JPH0648480Y2/en not_active Expired - Lifetime
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5196998A (en) * | 1975-02-24 | 1976-08-25 | ||
| JPS60148999U (en) * | 1984-03-13 | 1985-10-03 | 日新ハイボルテ−ジ株式会社 | Electron beam extraction window structure of electron beam irradiation equipment |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2011033396A (en) * | 2009-07-30 | 2011-02-17 | Hamamatsu Photonics Kk | Window structure, electron beam emission device, and x-ray emission device |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0648480Y2 (en) | 1994-12-12 |
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