JPS62171149U - - Google Patents
Info
- Publication number
- JPS62171149U JPS62171149U JP6065786U JP6065786U JPS62171149U JP S62171149 U JPS62171149 U JP S62171149U JP 6065786 U JP6065786 U JP 6065786U JP 6065786 U JP6065786 U JP 6065786U JP S62171149 U JPS62171149 U JP S62171149U
- Authority
- JP
- Japan
- Prior art keywords
- ion source
- shutter
- bellows
- housing
- attached
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000007789 sealing Methods 0.000 claims description 3
- 238000010884 ion-beam technique Methods 0.000 claims 1
Landscapes
- Electron Sources, Ion Sources (AREA)
Description
第１図は、この考案の一実施例に係るイオン源
本体着脱装置をイオン源に取り付けた状態の一例
を示す概略断面図である。第２図は、第１図の装
置の第１のシヤツタを示す概略断面図である。第
３図は、第１図の装置の密閉装置を示す平面図で
ある。第４図は、第３図の線―に沿う概略断
面図である。第５図は、第１図の装置の他の状態
を示す概略断面図である。第６図は、イオン源の
一例を部分的に示す概略側面図である。
２……イオン源、４……イオン源ハウジング、
１２……イオン源本体、２２……第１のシヤツタ
、３０……密閉装置、３２……第２のシヤツタ、
４０……ベローズ、４２……支持フランジ、４８
……ガイドレール。
FIG. 1 is a schematic sectional view showing an example of a state in which an ion source main body attaching/detaching device according to an embodiment of the present invention is attached to an ion source. 2 is a schematic cross-sectional view of the first shutter of the device of FIG. 1; FIG. FIG. 3 is a plan view showing the sealing device of the device of FIG. 1; FIG. 4 is a schematic sectional view taken along the line - in FIG. 3. FIG. 5 is a schematic sectional view showing another state of the device of FIG. 1. FIG. 6 is a schematic side view partially showing an example of an ion source. 2...Ion source, 4...Ion source housing,
12... Ion source main body, 22... First shutter, 30... Sealing device, 32... Second shutter,
40... Bellows, 42... Support flange, 48
...Guide rail.
Claims (1)
イオン源本体を収納するイオン源ハウジングとを
備えるイオン源のイオン源ハウジングに対するイ
オン源本体の着脱に用いられる装置であつて、イ
オン源ハウジング側に取り付けられるものであつ
てイオン源本体が取り出された後のイオン源ハウ
ジングの開口部を密閉する第１のシヤツタと、第
１のシヤツタに結合されるものであつてイオン源
ハウジングから取り出されるイオン源本体を密閉
状態で支持する密閉装置との組み合わせからなり
、当該密閉装置は、イオン源本体を中に収納する
ことができるベローズと、ベローズの一端側に取
り付けられていて第１のシヤツタと結合可能な第
２のシヤツタと、ベローズの他端側に取り付けら
れていてイオン源本体を支持する支持フランジと
、支持フランジを移動可能に支持する支持体とを
備えることを特徴とするイオン源本体着脱装置。 A device used for attaching and detaching the ion source body to and from the ion source housing of an ion source, which includes an ion source body for extracting an ion beam and an ion source housing that houses the ion source body, and is attached to the ion source housing side. a first shutter that seals the opening of the ion source housing after the ion source body is taken out; and a first shutter that is coupled to the first shutter and seals the ion source body that is taken out from the ion source housing. The sealing device includes a bellows in which the ion source body can be housed, and a second shutter attached to one end of the bellows and connectable to the first shutter. An ion source main body attaching/detaching device comprising: a shutter, a support flange attached to the other end of the bellows and supporting the ion source main body, and a support body movably supporting the support flange.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6065786U JPH0644005Y2 (en) | 1986-04-22 | 1986-04-22 | Ion source main unit attachment / detachment device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6065786U JPH0644005Y2 (en) | 1986-04-22 | 1986-04-22 | Ion source main unit attachment / detachment device |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS62171149U true JPS62171149U (en) | 1987-10-30 |
| JPH0644005Y2 JPH0644005Y2 (en) | 1994-11-14 |
Family
ID=30893259
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP6065786U Expired - Lifetime JPH0644005Y2 (en) | 1986-04-22 | 1986-04-22 | Ion source main unit attachment / detachment device |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0644005Y2 (en) |
-
1986
- 1986-04-22 JP JP6065786U patent/JPH0644005Y2/en not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0644005Y2 (en) | 1994-11-14 |
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