JPH08166497A - Radiation window device of electron beam radiating equipment - Google Patents

Abstract

PURPOSE: To effectively cool primary and secondary window foils of electron beam radiating equipment, simplify its structure and facilitate the dismantlement and assem bly. CONSTITUTION: A radiation window device is composed by assembling the first flange 62, a primary window foil 60, the first frame 70, the second frame 90, a secondary window foil 80 and the second flange 86, and a cooling space 53 is provided between the primary window foil 60 and the secondary window foil 80. The first frame 70 is equipped with a slit 72 for blowing a gas to cool the primary window foil which extends mutually parallel and opposite to the primary window foil 60 in the longitudinal direction and a slit 76 for exhausting the gas cooling the primary window foil. The second frame 90 is equipped with a slit 92 for blowing a gas to cool the secondary window foil which extends mutually parallel and opposite to the secondary window foil 80 in the longitudinal direction and a slit 98 for exhausting the gas to cool the secondary window foil. While the slit 72 for blowing a gas to cool the primary window foil and the slit 98 for exhausting the gas to cool the secondary window foil are placed on one side of the cooling space 53, the slit 76 for exhausting the gas to cool the primary window foil and the slit 92 for blowing a gas to cool the secondary window foil on the other side of it.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an irradiation window device for electron beam irradiation equipment for purifying exhaust gas containing a relatively high concentration of harmful components such as boiler combustion exhaust gas.
More specifically, the electron beam accelerated in the accelerating tube of the electron beam generator is scanned in the scanning tube, passes through the primary window foil at the end of the scanning tube, the cooling space and the secondary window foil, and the exhaust gas in the reaction vessel The present invention relates to an irradiation window device of an electron beam irradiation facility for irradiating a beam.

[0002]

2. Description of the Related Art An electron beam irradiation facility for removing harmful substances by irradiating an exhaust gas containing the harmful substances with an electron beam is known, for example, from Japanese Patent Laid-Open No. 52-140499. The publication discloses that N2 is used for exhaust gas containing SOx or NOx.
Add H ₃ and irradiate with radiation such as electron beam
Alternatively, NOx is (NH ₄ ) ₂ SO ₄ (ammonium sulfate) or NH ₄ NO ₃
Disclosed is equipment for changing to (San-An).

The electron beam is supplied from an electron beam generator consisting of an accelerating tube and a scanning tube in communication with the accelerating tube. In the electron beam generator, a thermoelectron is generated by electrically heating a filament provided in the vacuum space of the accelerating tube, and the thermoelectron is accelerated by a high voltage to become an electron beam. The electron beam is scanned by the changing magnetic field in the vacuum space of the scanning tube communicating with the accelerating tube, passes through the irradiation window foil arranged at the end of the scanning tube, and enters the reaction chamber adjacent to the irradiation window foil. Supplied.

The irradiation window foil is made of a metal thin film through which an electron beam can pass, and airtightly partitions between the vacuum space of the scanning tube and the internal space of the reactor at about atmospheric pressure. Since the irradiation window foil is heated by the electron beam that passes through it, it is cooled by a cooling gas to prevent burnout. The cooling gas is supplied so as to flow in the reactor along the surface of the irradiation window foil from a supply port arranged near the edge of the irradiation window foil.

The electron beam irradiation equipment is used in many fields such as promotion of chemical reaction of polymers, sterilization of medical equipment, research and development, and also for purification of combustion exhaust gas of fossil fuels such as coal and petroleum. It is possible. The advantage of using the electron beam as compared to the use of X-rays and gamma rays is that the electron beam generator can have a large capacity and the exhaust gas treatment amount can be increased. It is necessary to detect scattered electrons from the irradiation object, for example, to move the irradiation object in and out of the vacuum space that generates the electron beam, which makes the irradiation equipment complicated and expensive and increases the number of steps, for example, an electron microscope. Only when.
Except such a case, do not put the irradiated object in or out of the vacuum space, supply the electron beam from the electron beam generator through the irradiation window foil to the reaction chamber at almost atmospheric pressure, and hit the irradiated object in the reaction chamber. The electron beam irradiation equipment is suitable for practical use.

The thickness of the irradiation window foil is required to have a size that can withstand the pressure difference between the pressure inside the electron beam generator, which is close to vacuum, and the pressure inside the reaction chamber, which is almost atmospheric pressure. Since the energy loss of the electron beam due to transmission through the irradiation window foil is reduced, the thickness cannot be increased. Since the electron beam used for purification of exhaust gas, etc. needs to have a high output, even if the irradiation window foil of any material is passed through such a high output electron beam, it takes an extremely short time. To burn out. The irradiation window foil has an elongated rectangular shape and a central portion thereof has a curved surface protruding toward the vacuum space side so as to withstand the pressure difference. Further, in order to avoid burning of the irradiation window foil, the electron beam is scanned in the longitudinal direction of the irradiation window foil by the magnetic field to reduce the energy absorption amount per unit area and unit time of the irradiation window foil to a certain level or less. Is cooled by blowing cooling air onto the surface of the. Japanese Examined Patent Publication (Kokoku) No. 60-10600 discloses a cooling method for enhancing cooling capacity by causing cooling air flowing along the irradiation window foil to form a quasi-steady vortex.

The exhaust gas introduced into the reaction chamber and treated is S
In the case of combustion exhaust gas containing a large amount of harmful substances such as Ox components and NOx components, a secondary window foil (reaction chamber entrance window foil) is provided outside the space through which the cooling gas passes. This is to prevent the inside of the electron beam generator from only coming into contact with the relatively clean cooling gas and directly coming into contact with the exhaust gas when the irradiation window foil is damaged. The secondary window foil is also cooled by a cooling gas in order to avoid burning by the electron beam. FIG. 2 of Japanese Patent Application Laid-Open No. 52-37553 discloses an irradiation window foil and a secondary window foil in which cooling air in the same direction flows along the respective window foils. The pressure of the exhaust gas passing through the exhaust gas treatment equipment is usually made slightly lower than atmospheric pressure by a suction fan arranged near the outlet of the equipment to prevent leakage to the surroundings. The secondary window foil cooling gas is usually supplied by a blower at a pressure equal to or higher than the atmospheric pressure, so that the cross section perpendicular to the longitudinal direction of each window foil in the space through which the cooling gas of the primary window foil and the secondary window foil passes. , A biconvex lens shape protruding toward both the scanning tube side and the reaction chamber side.

[0008]

When treating exhaust gas containing a large amount of harmful components, the primary window foil and the secondary window foil are appropriately cooled by the cooling gas passing through the space of the biconvex lens shape formed by them. Must be removed. If the cooling is insufficient, the window foil will burn out. Further, excessive cooling of the secondary window foil promotes corrosion of the secondary window foil due to exhaust gas. In order to properly cool the primary window foil and the secondary window foil, it is necessary to blow cooling air to each window foil individually, but as shown in FIG. 2 of JP-A-52-37553. When two cooling air streams are blown out from one of the biconvex lens-shaped spaces, the two cooling air streams may affect each other, resulting in partial cooling failure. Therefore, an object of the present invention is to improve the irradiation window device of the electron beam irradiation equipment of the type in which a secondary window foil is provided, and with a relatively simple structure,
An object of the present invention is to provide an irradiation window device capable of appropriately cooling the primary window foil and the secondary window foil. Another object of the present invention is to provide an irradiation window device in which a structural portion for supplying and discharging a cooling gas is integrated and easily detached. Other objects of the present invention will be clarified in the description of the embodiments.

[0009]

In the electron beam irradiation window device of the present invention, the electron beam accelerated in the accelerating tube of the electron beam generator is scanned in the scanning tube and the primary window foil at the end of the scanning tube is scanned. , Through the cooling space and the secondary window foil to irradiate the exhaust gas in the reaction vessel. The primary window foil airtightly partitions between the vacuum inner space of the scanning tube and the cooling space at about atmospheric pressure, and the secondary window foil airtightly partitions the cooling space and the inner space of the reaction vessel. The secondary window foil is cooled by the cooling gas in the cooling space. The irradiation window device comprises a first frame having parallel primary window foil cooling gas blowing slits and primary window foil cooling gas exhaust slits which face each other in the longitudinal direction of the primary window foil, and mutually in the longitudinal direction of the secondary window foil. It has a second frame with facing parallel secondary window foil cooling gas outlet slits and secondary window foil cooling gas exhaust slits. The primary window foil, the first frame, the second frame and the secondary window foil are sequentially arranged. The primary window foil cooling gas blowing slit and the secondary window foil cooling gas exhaust slit are arranged on one side of the cooling space, and the primary window foil cooling gas exhaust slit and the secondary window foil cooling gas blowing slit are of the cooling space. Located on the other side.

Preferably, in the irradiation window device of the present invention, the secondary window foil is fixed to the outer surface of the second frame by a flange forming a part of the reaction vessel. Moreover, the first frame and the second frame may be integrally configured. The primary window foil cooling gas and the secondary window foil cooling gas are circulated through a common heat exchanger and blower. The primary window foil may be of the double window type which is supported inside the scanning tube by a central bar extending in the longitudinal direction of the primary window foil.

[0011]

1 is an overall schematic view of an electron beam irradiation equipment in which an irradiation window device of the present invention can be used. In the equipment shown in FIG. 1, the exhaust gas discharged from the boiler 2 and containing SOx and NOx components passes through a cooling tower 7 equipped with an electrostatic precipitator 4, a heat recovery device 6, and a cooling water adder 8 and then introduced into a reaction chamber through an introduction pipe 11. You will be guided to 16. An ammonia adder 12 is located near the inlet of the reactor to add ammonia (NH ₃ ) to the stream of exhaust gas 10 entering the reactor 16. An electron beam generator 30 is arranged above the reactor 16, and the generated electron beam passes through the irradiation window device and enters the reactor 16.
In the reactor 16, NOx components and SO in exhaust gas
The x component becomes nitric acid and sulfuric acid upon irradiation with an electron beam, reacts with ammonia added to the exhaust gas, and is converted into powders of ammonium nitrate (ammonium nitrate) and ammonium sulfate (ammonium sulfate).

Exhaust gas containing ammonium nitrate and ammonium sulfate powder in the reactor 16 is introduced from the reactor 16 to the electrostatic precipitator 18,
Electric dust collector 18 and bag filter 2 provided downstream thereof
At 0, solid particles such as ammonium nitrate and ammonium sulfate powder and dust are separated and removed. The solid particles separated in the electrostatic precipitator 18 and the bag filter 20 are processed by the by-product processor 1
9 is introduced, and ammonium nitrate and ammonium sulfate as by-products are refined. The exhaust gas that has passed through the bag filter 20 is heated by the reheater 22 via the induction fan 21 and is discharged from the chimney 24 to the atmosphere. In the equipment of FIG. 1, the exhaust gas is
Since it is sucked and discharged from the facility by the reheater 22, the induction fan 21, and the chimney 24, the reactor 16, the electrostatic precipitator 1
8. Inside the bag filter 20, the pressure of the exhaust gas is
Below atmospheric pressure, exhaust gases do not leak from them and pollute the environment.

The electron beam generator 30 is powered by a power source 38. The electron beam output value corresponds to the product of the acceleration voltage and the electron beam output current value. Since the accelerating voltage corresponds to the penetration distance of the electron beam in the exhaust gas, the reactor 1
Limited by 6 dimensions. For example, the transmission distance is 2.6.
In the case of a m reactor, the accelerating voltage may be about 800 kV, above which a part of the electron beam exceeds 2.6 m,
It collides with the wall surface of the reactor and is useless for the reaction and is wasted. Since the accelerating voltage is fixed due to the size of the reactor 16, the current value is changed to change the electron beam output value.

FIG. 2 is a layout diagram schematically showing a main part of the electron beam irradiation equipment for carrying out the present invention. In FIG. 2, the reactor 16 and the electron beam generator 30 are shown by a cross section taken substantially along the line AA in FIG. The electron beam accelerated in the acceleration tube 34 of the electron beam generator 30 is scanned in the scanning tube 35 including the ion pump 32, and the primary window foil 60, the cooling space 53, and the secondary window foil of the irradiation window device 50 are scanned. After passing through 80, the exhaust gas in the reactor 16 is irradiated. In the reactor 16, the electron beam 31 reacts NOx and SOx in the exhaust gas with the added ammonia to generate ammonium nitrate and ammonium sulfate particles. The irradiation window device 50 is cooled by a cooling gas such as air, helium, or nitrogen gas. The cooling gas flows from the blower 42 in the supply pipe 44 in the direction of the arrow R, and is supplied to the cooling space 53 via the cooling gas inlets 46 and 47. In the cooling space 53, the cooling gas flows along the primary window foil 60 and the secondary window foil 8 as shown by the arrow.
Forming a flow along 0, the directions of which are opposite to each other. Thereafter, the cooling gas flows from the cooling space 53 through the cooling gas outlets 48 and 49 in the discharge pipe 51 in the direction of the arrow S and is introduced into the heat exchanger 52. The cooling gas is cooled by exchanging heat with the cooling water C in the heat exchanger 52, then sucked by the blower 42, pressurized, and circulated to the irradiation window device 50 via the supply pipe 44.

FIG. 3 is a cross-sectional view of each member obtained by disassembling the irradiation window device in a cross section perpendicular to the longitudinal direction of the primary window foil 60 of the irradiation window device. The irradiation window device includes a first flange 62 for fixing the primary window foil, a primary window foil 60, a first frame 70 having a primary window foil cooling gas blowing slit 72 and an exhaust slit 76, and a secondary window foil cooling gas blowing. Slit 9
2 and a second frame 90 having the same exhaust slit 98,
It is composed of a secondary window foil 80 and a second flange 82 for fixing the secondary window foil, which are assembled in this order. That is, the primary window foil 60
An edge portion of the first frame 62 is airtightly held between the first flange 62 and the outer surface 64 of the first frame 70, and the inner wall 68 of the first frame is
The inner wall 88 of the second frame and the inner wall 88 of the second frame are closely attached to each other so that no gap is generated, and the edge portion of the secondary window foil 80 is airtightly held between the second flange 82 and the outer surface 84 of the second frame 90. The irradiation window device is configured by the above.

The primary window foil cooling gas blowing slit 72 is
The cooling gas is supplied from the supply duct 71 communicating with the cooling gas inlet 46 of FIG. 2 through the flow path 73, and is blown out so as to flow along the concave curved surface of the primary window foil 60 on the cooling space side. The primary window foil cooling gas exhaust slit 76 sandwiches the longitudinal axis of the primary window foil and the primary window foil cooling gas blowing slit 7 is formed.
2 are arranged in parallel to face each other, receive the cooling gas, and discharge the cooling gas from the flow passage 77 through the exhaust duct 78 to the cooling gas outlet 48 of FIG. Similarly, the secondary window foil cooling gas blowing slit 92 is supplied with the cooling gas from the supply duct 91 communicating with the cooling gas inlet 47 of FIG. Blow out so that it flows along the concave curved surface on the side. The secondary window foil cooling gas exhaust slit 98 is arranged in parallel so as to face the secondary window foil cooling gas blowing slit 92 with the longitudinal axis of the secondary window foil interposed therebetween, receives the cooling gas, and exhausts it from the flow path 99. Duct 10
2 to the cooling gas outlet 49 of FIG.

The primary window foil 60 is made of a metal thin film which can transmit an electron beam, and airtightly separates a vacuum inner space of the scanning tube and a cooling space of approximately atmospheric pressure. The metal thin film is
For example, it is a thin film of pure titanium or titanium alloy having a thickness of several tens of μm. The primary window foil 60, to withstand the pressure differential,
It is a long and narrow rectangle and its central part projects toward the scanning tube,
The cooling space side has a concave curved surface. The secondary window foil 80 is also made of a metal thin film that is permeable to electron beams, and is used in the reactor 1
An airtight partition is provided between 6 and the cooling space 53. Secondary window foil 80
Can be made larger than the primary window foil 60 when the difference in pressure applied to the front and back surfaces thereof is smaller than that of the primary window foil 60, and thus when the thickness is the same.

The electron beam is scanned by a magnetic field that changes parallel to the longitudinal direction of the irradiation window foil. That is, in FIG. 2, the electron beam 31 is swung (scanned) so as to form a fan shape perpendicularly to the paper surface, and the acceleration tube 34 forms the corner of the fan shape of the swing. By scanning the transmitted electron beam, the energy absorption amount per unit area and unit time of the primary and secondary window foils is kept below a certain level, and the amount of heat is removed by the flow of the cooling gas through the cooling space, Burnout of the primary and secondary window foils is avoided.

FIG. 4 is a plan view of the irradiation window device in which the parts shown in FIG. 3 are assembled, as seen from the direction of arrow B in FIG.
The cross section shown in FIG. 3 is taken along line EE of the irradiation window device of FIG. 4, parts corresponding to those in the embodiment of FIG. 3 are designated by the same reference numerals as those in FIG. 3, and description thereof will be omitted. As is clear from FIG. 4, the first flange 62
Has a shape corresponding to the edge surrounding the rectangular primary window foil 60, and is arranged so as to press the edge of the primary window foil against the first frame 70. The first flange 62 is fixed to the first frame 70 by a number of screws 61. Primary window foil 6
For example, the width 0 is 100 mm in FIG.
The length d is determined by the electron beam current value.

FIG. 5 shows an irradiation window device 50 according to another embodiment of the invention in a sectional view perpendicular to the longitudinal direction of the primary window foil as in FIG. 5, parts corresponding to those in the embodiment of FIG. 3 are designated by the same reference numerals as those in FIG. 3, and description thereof will be omitted. The central portion of the primary window foil 60 on the scanning tube side of FIG. 5 is supported by a central beam 63 along the longitudinal axis of the primary window foil. Therefore, in FIG. 5, the width of the primary window foil 60 (the primary window foil 6 between the flanges 62 drawn on the left and right of FIG.
The dimension 0 parallel to the paper surface) can be set to 100 mm × 2, for example, and a large amount of electron beams can be transmitted. Since the difference in pressure applied to the front and back surfaces of the secondary window foil 80 is smaller than that in the case of the primary window foil 60, the secondary window foil 80 has a width dimension larger than that of the primary window foil, but is centered when it has the same thickness as the primary window foil. No need to support by beams. In the irradiation window device 50 of FIG. 5, the inner wall 6 of the first frame of FIG.
8 and the inner wall portion corresponding to the inner wall 88 of the second frame are integrally formed, and the first frame 70 and the second frame 90 are integrated.

The primary window foil cooling gas blowing slit 72 is
The cooling gas supplied from the supply duct 71 communicating with the cooling gas inlet 46 of FIG. 2 through the flow path 73 is blown out so as to flow along the concave curved surface of the primary window foil 60 on the cooling space side. The primary window foil cooling gas exhaust slit 76 is arranged so as to face the primary window foil cooling gas blowing slit 72 with the longitudinal axis of the primary window foil interposed therebetween, and the cooling gas is discharged from the flow passage 77 through the exhaust duct 78, as shown in FIG. To the cooling gas outlet 48. Similarly, the secondary window foil cooling gas blowing slit 92 is connected to the cooling gas inlet 47 of FIG.
The cooling gas supplied through the blower is blown out so as to flow along the concave curved surface of the secondary window foil 80 on the cooling space side. The secondary window foil cooling gas exhaust slit 98 is arranged so as to face the secondary window foil cooling gas blowing slit 92 with the longitudinal axis of the secondary window foil interposed therebetween, and the cooling gas is exhausted from the flow path 99 through the exhaust duct 100. , To the cooling gas outlet 49 of FIG.

As shown in FIG. 5, a flow 74 of the primary window foil cooling gas flowing from the primary window foil cooling gas blowing slit 72 to the exhaust slit 76 in the cooling space 53 and a secondary window foil cooling gas blowing slit 92 from the same. Exhaust slit 98
The flow 96 of the secondary window foil cooling gas flowing to the cooling space 53
Since they flow in opposite directions around each other, in the central portion of the cooling space 53, a cylindrical vortex flow 102 having an axis line in the direction perpendicular to the paper surface of FIG. 4 is generated. Due to this vortex 102, the flow 74 of the primary window foil cooling gas and the flow 96 of the secondary window foil cooling gas are pushed toward the primary window foil 60 and the secondary window foil 80, respectively, and the flow of the cooling gas is primary and secondary. The continuous collision with the window foil can effectively cool the window foil.

[0023]

According to the irradiation window device of the present invention, the edge portion of the primary window foil is supported by being sandwiched between the first flange and the first frame, and the edge portion of the secondary window foil is connected to the second flange and the second frame. It is sandwiched between two frames and supported, and these are superposed and fixed. The first frame has a primary window foil cooling gas blowing slit and the same exhaust slit, and the second frame has a secondary window foil cooling gas blowing slit and the same exhaust slit. Therefore, the primary window foil and the secondary window foil can be easily removed from the member for supplying and discharging the cooling gas, and the maintenance and replacement of each member are easy.

In the irradiation window device of the present invention, the primary window foil cooling gas blowing slit and the secondary window foil cooling gas exhaust slit are superposed and arranged on one side of the cooling space, and the primary window foil is faced to them. The cooling gas exhaust slit and the secondary window foil cooling gas blowing slit are overlapped and arranged on the other side of the cooling space. Therefore, the flow of the primary window foil cooling gas and the flow of the secondary window foil cooling gas flow in opposite directions to generate a cylindrical vortex in the cooling space, which causes the flow of the cooling gas to flow in the primary window foil and the secondary window foil. It is pushed toward the next window foil and continuously contacts the window foil, effectively cooling the window foil.

Even when the primary window foil is supported at the center in the longitudinal direction by the central crosspiece and the shape of the primary window foil on the cooling space side is two concave curved surfaces, the irradiation window device of the present invention has a cylindrical shape in the cooling space. Since the vortex flow is generated and the flow of the cooling gas is directed toward the window foil, the primary window foil can be effectively cooled only by blowing the cooling gas from one side surface of the primary window foil.

[Brief description of drawings]

FIG. 1 is an overall schematic view of an electron beam irradiation facility in which an irradiation window device of the present invention can be used.

FIG. 2 is a layout diagram schematically showing a main part of an electron beam irradiation facility for carrying out the present invention.

FIG. 3 is a cross-sectional view of the disassembled members of the irradiation window device in a cross section perpendicular to the longitudinal direction of the primary window foil of the irradiation window device.

FIG. 4 is a plan view of an irradiation window device in which the parts shown in FIG. 3 are assembled, as seen from the direction of arrow B in FIG.

FIG. 5 is a cross-sectional view perpendicular to the longitudinal direction of the primary window foil of the irradiation window device according to another embodiment of the present invention.

[Explanation of symbols]

2: Boiler, 4: Electrostatic precipitator, 6: Heat recovery device, 7: Cooling tower, 10: Exhaust gas, 12: Ammonia adder, 16: Reactor, 18: Electrostatic precipitator, 19: By-product processor , 20:
Bag filter, 21: Induction fan, 22: Reheater,
24: chimney, 30: electron beam generator, 31: electron beam, 34: accelerating tube, 35: scanning tube, 38: power source, 42:
Blower, 44: Supply pipe, 46, 47: Cooling gas inlet, 4
8, 49: cooling gas outlet, 50: irradiation window device, 51: discharge pipe, 52: heat exchanger, 53: cooling space, 60: primary window foil, 62: first flange, 63: central beam, 64: outer surface ,
70: first frame, 71: supply duct, 72: primary window foil cooling gas blowing slit, 73, 77: flow path, 76:
Primary window foil cooling gas exhaust slit, 78: exhaust duct, 8
0: secondary window foil, 84: outer surface, 90: second frame, 9
1: Supply duct, 92: Secondary window foil cooling gas blowing slit, 93, 99: Flow path, 98: Primary window foil cooling gas exhaust slit, 100: Exhaust duct.

─────────────────────────────────────────────────── ─── Continuation of the front page (51) Int.Cl. ⁶ Identification code Internal reference number FI Technical indication location B01D 53/60 53/74 (72) Inventor Hideki Nanba 1233 Watanuki-cho, Takasaki-shi, Gunma Japan Atomic Energy Research Tokoro Takasaki Research Institute (72) Inventor Masa Tanaka, Aichi Prefecture, Midori-ku, Nagoya-shi, Otaka-cho, No. 20 Kitakanyama, Chubu Electric Power Co., Inc. Electric Power Technology Research Institute (72) Inventor Yoshimi Ogura Otaka, Midori-ku, Aichi Prefecture 1 at 20 Kitakanzan, Chubu Electric Power Co., Inc. Electric Power Research Laboratory (72) Inventor Yoshitaka Doi 11-1 Haneda-Asahicho, Ota-ku, Tokyo Ebara Corporation (72) Inventor Masahiro Izutsu Ota-ku, Tokyo 11-1 Haneda Asahi-machi, EBARA CORPORATION (72) Inventor Shinji Aoki 11-11 Haneda-Asahi-cho, Ota-ku, Tokyo EBARA CORPORATION

Claims (5)

[Claims] 1. An electron beam accelerated in an accelerating tube of an electron beam generator is scanned in the scanning tube and transmitted through a primary window foil (60), a cooling space and a secondary window foil (80) at an end of the scanning tube. Then, the exhaust gas in the reaction vessel is irradiated, and the primary window foil hermetically partitions the internal space of the vacuum of the scanning tube and the cooling space of approximately atmospheric pressure, and the secondary window foil reacts with the cooling space. In the irradiation window device of the electron beam irradiation equipment in which the internal space of the container is airtightly divided, and the primary window foil and the secondary window foil are cooled by the cooling gas in the cooling space, the primary window foil (60) extends in the longitudinal direction. A first frame (70) having parallel primary window foil cooling gas outlet slits (72) and primary window foil cooling gas exhaust slits (76) facing each other, and extending in the longitudinal direction of the secondary window foil (80). Parallel secondary window foils facing each other Cooling gas outlets Tsu bets (92) and the secondary window foil cooling gas exhaust slit (98)
Having a second frame (90) having a primary window foil (60), a first frame (70), a second frame (90) and a secondary window foil (80) arranged in that order and a primary window foil. A cooling gas outlet slit (72) and a secondary window foil cooling gas exhaust slit (98) are arranged on one side of the cooling space, and a primary window foil cooling gas exhaust slit (76) is provided.
And a secondary window foil cooling gas blowing slit (92) arranged on the other side of the cooling space. 2. The irradiation window device according to claim 1,
Irradiation window device, characterized in that the secondary window foil is fixed to the outer surface (84) of the second frame by means of a flange (82) forming part of the reaction vessel. 3. The irradiation window device according to claim 1, wherein the first frame and the second frame are integrally formed. 4. The irradiation window device according to claim 1, wherein the primary window foil cooling gas and the secondary window foil cooling gas are circulated through a common heat exchanger and blower. Irradiation window device. 5. The irradiation window device according to claim 1, wherein the primary window foil is supported inside the scanning tube by a central bar extending in the longitudinal direction of the primary window foil. An irradiation window device characterized by being a mold.