JPH07187609A - Ozonizer - Google Patents
OzonizerInfo
- Publication number
- JPH07187609A JPH07187609A JP33047393A JP33047393A JPH07187609A JP H07187609 A JPH07187609 A JP H07187609A JP 33047393 A JP33047393 A JP 33047393A JP 33047393 A JP33047393 A JP 33047393A JP H07187609 A JPH07187609 A JP H07187609A
- Authority
- JP
- Japan
- Prior art keywords
- electrode tube
- voltage
- ground electrode
- voltage electrode
- high voltage
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Classifications
-
- C—CHEMISTRY; METALLURGY
- C01—INORGANIC CHEMISTRY
- C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
- C01B13/00—Oxygen; Ozone; Oxides or hydroxides in general
- C01B13/10—Preparation of ozone
- C01B13/11—Preparation of ozone by electric discharge
-
- C—CHEMISTRY; METALLURGY
- C01—INORGANIC CHEMISTRY
- C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
- C01B2201/00—Preparation of ozone by electrical discharge
- C01B2201/10—Dischargers used for production of ozone
- C01B2201/14—Concentric/tubular dischargers
-
- C—CHEMISTRY; METALLURGY
- C01—INORGANIC CHEMISTRY
- C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
- C01B2201/00—Preparation of ozone by electrical discharge
- C01B2201/70—Cooling of the discharger; Means for making cooling unnecessary
Abstract
Description
【０００１】[0001]
【産業上の利用分野】本発明は、水処理等に利用される
無声放電式のオゾン発生装置に係り、特にオゾン発生電
極の構造に関する。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a silent discharge type ozone generator used for water treatment or the like, and more particularly to a structure of an ozone generating electrode.
【０００２】[0002]
【従来の技術】従来、水処理等に一般的に用いられてい
る無声放電式のオゾン発生装置は図２のように構成され
ている。図２において、１は容器内に収納され、高電圧
が印加される高圧電極管であり、この高圧電極管１の外
周面にはガラス等の誘電体２がコーティングされてい
る。前記高圧電極管１の同軸外周部には空気等の原料ガ
スが通流する空隙部３を介して接地電極管４が配設され
ている。接地電極管４の両端部の容器には冷却媒体
（水）の入口、出口が形成され、接地電極管４の外周壁
に冷却水が供給されるように構成されている。高圧電極
管１に高周波の高電圧を印加すると無声放電が起こり、
空隙部３内に流した空気中にオゾンが発生する。2. Description of the Related Art Conventionally, a silent discharge type ozone generator which is generally used for water treatment is constructed as shown in FIG. In FIG. 2, reference numeral 1 denotes a high-voltage electrode tube which is housed in a container and to which a high voltage is applied. The outer peripheral surface of the high-voltage electrode tube 1 is coated with a dielectric 2 such as glass. A ground electrode tube 4 is disposed on the coaxial outer peripheral portion of the high-voltage electrode tube 1 with a gap 3 through which a raw material gas such as air flows. An inlet and an outlet for a cooling medium (water) are formed in the containers at both ends of the ground electrode tube 4, and the cooling water is supplied to the outer peripheral wall of the ground electrode tube 4. When high frequency high voltage is applied to the high voltage electrode tube 1, silent discharge occurs,
Ozone is generated in the air that has flowed into the void 3.
【０００３】一般に無声放電式のオゾン発生装置におい
ては、飛び交う電子の衝突等による発熱のため、空隙部
中の原料ガス及び誘電体の温度が上昇する。ところが原
料ガスの温度が上昇するとオゾン生成反応の逆反応が活
発になりオゾン収率が減少する。また一方では、誘電体
（ガラス）に熱歪みが生じ、これの破壊の原因ともなる
ので、これらを冷却する必要がある。Generally, in a silent discharge type ozone generator, the temperatures of the raw material gas and the dielectric material in the voids rise due to heat generation due to collision of flying electrons. However, when the temperature of the raw material gas rises, the reverse reaction of the ozone generation reaction becomes active and the ozone yield decreases. On the other hand, thermal distortion occurs in the dielectric material (glass), which causes destruction of the dielectric material, so that it is necessary to cool them.
【０００４】図２のように構成された装置は１重管構造
であり、しかもオゾン生成時に発生する損失（熱）を空
気側電極面（接地電極管４）の冷却媒体（一般に水）よ
り吸収していた。このため大型器になると高圧電極内を
循環して冷却する装置を付加しなければならない場合が
ある。The device constructed as shown in FIG. 2 has a single tube structure, and moreover, the loss (heat) generated during ozone generation is absorbed by the cooling medium (generally water) on the air side electrode surface (ground electrode tube 4). Was. For this reason, in the case of a large-sized device, it may be necessary to add a device for circulating the inside of the high-voltage electrode for cooling.
【０００５】[0005]
【発明が解決しようとする課題】図２のように構成され
た装置は、次のような問題点があった。 （１）冷却を空隙部３を隔てた電極面で行っているため
オゾン発生効率が低い。 （２）１重管構造であるためオゾン発生量が少ない。 （３）オゾン発生器の冷却媒体（水）側の容積が大きい
ため重量が大きい。 （４）前記（２）、（３）項のため装置全体が大形化し
てしまう。The device constructed as shown in FIG. 2 has the following problems. (1) Ozone generation efficiency is low because cooling is performed on the electrode surface that separates the gap 3. (2) Ozone generation is small due to the single tube structure. (3) Since the ozone generator has a large volume on the cooling medium (water) side, the ozone generator has a large weight. (4) Due to the items (2) and (3), the size of the entire device is increased.
【０００６】本発明は上記の点に鑑みてなされたもので
その目的は、装置の大形化を抑制するとともにオゾン発
生効率を高めたオゾン発生装置を提供することにある。The present invention has been made in view of the above points, and an object thereof is to provide an ozone generator which suppresses the enlargement of the device and enhances the ozone generation efficiency.
【０００７】[0007]
【課題を解決するための手段】本発明は、空隙部および
誘電体を介して互いに対向配設された高圧電極および接
地電極を有し、前記高圧電極と接地電極間に電圧を印加
して前記空隙部内に流通させた原料ガス中にオゾンを発
生させる無声放電式のオゾン発生装置において、（１）
高電圧が印加される内側高圧電極管と、冷却媒体を通流
させる導管および該導管の内、外周面に各々設けられた
誘電体とから成り、前記内側高圧電極管の同軸外周部に
空隙部を介して配設された接地電極管と、前記接地電極
管の同軸外周部に空隙部を介して配設され、高電圧が印
加される外側高圧電極管とを備えたことをを特徴とし、
（２）高電圧が印加される第１の高圧電極管を中心と
し、該第１の高圧電極管の同軸外周部に、冷却媒体を通
流させる導管および該導管の内、外周面に各々設けられ
た誘電体とから成る接地電極管と、高電圧が印加される
第２の高圧電極管とを各々空隙部を介して交互に複数個
配設したことをを特徴としている。According to the present invention, there is provided a high voltage electrode and a ground electrode which are arranged to face each other with a gap and a dielectric therebetween, and a voltage is applied between the high voltage electrode and the ground electrode. A silent discharge type ozone generator for generating ozone in a raw material gas circulated in a void,
An inner high voltage electrode tube to which a high voltage is applied, a conduit for allowing a cooling medium to flow therethrough, and a dielectric provided on each of the inner and outer peripheral surfaces of the conduit, and a void portion in the coaxial outer peripheral portion of the inner high voltage electrode tube. And a ground electrode tube disposed via the outer electrode, which is disposed on the coaxial outer peripheral portion of the ground electrode tube via a void portion and to which a high voltage is applied.
(2) Centering on the first high-voltage electrode tube to which a high voltage is applied, a conduit that allows a cooling medium to flow through the coaxial outer peripheral portion of the first high-voltage electrode tube, and the conduit are provided on the outer peripheral surface of the conduit, respectively. It is characterized in that a plurality of ground electrode tubes made of the dielectric material and second high-voltage electrode tubes to which a high voltage is applied are alternately arranged with a gap therebetween.
【０００８】[0008]
（１）請求項１に記載の発明において、誘電体は導管を
通流する冷却媒体によって直接冷却されるので、冷却効
率が非常に良くなる。このためオゾン発生効率が良くな
る。また冷却水量が少なくて済むので装置が軽量化され
る。(1) In the invention described in claim 1, since the dielectric is directly cooled by the cooling medium flowing through the conduit, the cooling efficiency becomes very good. Therefore, ozone generation efficiency is improved. In addition, the amount of cooling water is small, so the weight of the device is reduced.
【０００９】原料ガスを通流させるための空隙部は内側
高圧電極管−接地電極管間と、接地電極管−外側高圧電
極管間の２箇所となるので、オゾン発生面積が従来のも
のよりも２倍となってオゾン発生効率が向上する。この
ため同じ量のオゾンを発生させる場合、従来の装置より
も小型化を図ることができる。Since there are two voids for passing the raw material gas between the inner high-voltage electrode tube and the ground electrode tube and between the ground electrode tube and the outer high-voltage electrode tube, the ozone generation area is larger than that of the conventional one. Doubled to improve ozone generation efficiency. Therefore, when the same amount of ozone is generated, the size can be reduced as compared with the conventional device.
【００１０】（２）請求項２に記載の発明において、誘
電体は導管を通流する冷却媒体によって直接冷却される
ので、冷却効率が非常に良くなる。このためオゾン発生
効率が良くなる。また冷却水量が少なくて済むので装置
が軽量化される。(2) In the invention described in claim 2, since the dielectric is directly cooled by the cooling medium flowing through the conduit, the cooling efficiency becomes very good. Therefore, ozone generation efficiency is improved. In addition, the amount of cooling water is small, so the weight of the device is reduced.
【００１１】原料ガスを通流させるための空隙部は、第
１の高圧電極管−接地電極管間と、複数存在する第２の
高圧電極管−接地電極管間となるので、オゾン発生面積
が従来のものよりも多数倍に増えてオゾン発生効率が著
しく向上する。このため同じ量のオゾンを発生させる場
合、従来の装置よりも小型化を図ることができる。Since the gap for passing the raw material gas is between the first high voltage electrode tube and the ground electrode tube and between the plurality of second high voltage electrode tubes and the ground electrode tube, the ozone generation area is large. The ozone generation efficiency is remarkably improved by multiplying the conventional one by many times. Therefore, when the same amount of ozone is generated, the size can be reduced as compared with the conventional device.
【００１２】[0012]
【実施例】以下、図面を参照しながら本発明の一実施例
を説明する。図１において図２と同一部分は同一符号を
もって示している。１１は容器内に収納され、高電圧が
印加される内側高圧電極管である。この内側高圧電極管
１１の同軸外周部には所定長さの空隙部１２を介して、
外周壁と内周壁の間に冷却媒体通過空間を設けて成る接
地電極管１３が配設されている。この接地電極管１３の
冷却媒体通過空間の一端には冷却媒体導管１４が挿入さ
れ、他端は閉塞されている。接地電極管１３の外周壁と
内周壁には誘電体１５が各々コーティングされている。DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS An embodiment of the present invention will be described below with reference to the drawings. 1, the same parts as those in FIG. 2 are indicated by the same reference numerals. Reference numeral 11 denotes an inner high voltage electrode tube which is housed in a container and to which a high voltage is applied. In the coaxial outer peripheral portion of the inner high-voltage electrode tube 11, via a void portion 12 of a predetermined length,
A ground electrode tube 13 having a cooling medium passage space is provided between the outer peripheral wall and the inner peripheral wall. A cooling medium conduit 14 is inserted into one end of the cooling medium passage space of the ground electrode tube 13, and the other end is closed. The outer peripheral wall and the inner peripheral wall of the ground electrode tube 13 are each coated with a dielectric material 15.
【００１３】前記接地電極管１３の同軸外周部には所定
長さの空隙部１６を介して、高電圧が印加される外側高
圧電極管１７が配設されている。１８はオゾン発生電極
を容器内に支える絶縁性の支持物体である。前記冷却媒
体導管１４には冷却媒体、例えば水を図示矢印のように
通流させる。An outer high-voltage electrode tube 17 to which a high voltage is applied is arranged on the coaxial outer peripheral portion of the ground electrode tube 13 through a gap portion 16 having a predetermined length. Reference numeral 18 is an insulative supporting body that supports the ozone generating electrode in the container. A cooling medium, such as water, is passed through the cooling medium conduit 14 as indicated by an arrow.
【００１４】上記のように構成された装置において内
側、外側高圧電極管１１，１７に高周波の高電圧を印加
すると無声放電が起こり、空隙部１２，１６内に流した
空気中にオゾンが発生する。無声放電が起こる箇所は空
隙部１２と１６の２箇所となるので、オゾン発生面積が
従来のものよりも２倍となってオゾン発生効率が向上す
る。このため同じ量のオゾンを発生させる場合、従来の
装置よりも小型化を図ることができる。When a high frequency high voltage is applied to the inner and outer high voltage electrode tubes 11 and 17 in the apparatus constructed as described above, silent discharge occurs and ozone is generated in the air flowing into the voids 12 and 16. . Since the silent discharge occurs in two places, the voids 12 and 16, the ozone generation area is twice as large as that of the conventional one, and the ozone generation efficiency is improved. Therefore, when the same amount of ozone is generated, the size can be reduced as compared with the conventional device.
【００１５】また誘電体１５は冷却媒体導管１４を通流
する冷却媒体によって直接冷却されるので、冷却効率が
非常に良くなる。このためオゾン発生効率が良くなる。
また冷却水量が少なくて済むので装置が軽量化される。Further, since the dielectric material 15 is directly cooled by the cooling medium flowing through the cooling medium conduit 14, the cooling efficiency becomes very good. Therefore, ozone generation efficiency is improved.
In addition, the amount of cooling water is small, so the weight of the device is reduced.
【００１６】尚本発明では図１の構成に限らず、内側高
圧電極管１１を中心とし、該電極管１１の同軸外周部
に、冷却媒体導管１４および誘電体１５を備えた接地電
極管１３と、外側高圧電極管１７とを各々空隙部を介し
て交互に複数個配設するように構成しても良い。その場
合も前記と同様に良好なオゾン発生効率が得られる。The present invention is not limited to the configuration shown in FIG. 1, and the ground electrode tube 13 is provided with the inner high voltage electrode tube 11 as the center and the cooling medium conduit 14 and the dielectric material 15 at the coaxial outer periphery of the electrode tube 11. Alternatively, a plurality of outer high voltage electrode tubes 17 may be alternately arranged via the voids. Even in that case, good ozone generation efficiency can be obtained as in the above case.
【００１７】[0017]
【発明の効果】以上のように本発明によれば、高電圧が
印加される内側高圧電極管と、冷却媒体を通流させる導
管および該導管の内、外周面に各々設けられた誘電体と
から成り、前記内側高圧電極管の同軸外周部に空隙部を
介して配設された接地電極管と、前記接地電極管の同軸
外周部に空隙部を介して配設され、高電圧が印加される
外側高圧電極管とを備えたので、次のような優れた効果
が得られる。As described above, according to the present invention, an inner high voltage electrode tube to which a high voltage is applied, a conduit for allowing a cooling medium to flow therethrough, and a dielectric provided on each of the conduit and the outer peripheral surface thereof. And a ground electrode tube disposed on the coaxial outer peripheral portion of the inner high-voltage electrode tube through a void portion, and a ground electrode tube disposed on the coaxial outer peripheral portion of the ground electrode electrode portion through a void portion, to which a high voltage is applied. Since the outer high voltage electrode tube is provided, the following excellent effects can be obtained.
【００１８】（１）同一径においてオゾン発生面積が数
倍となり、オゾン発生効率が大幅に向上する。またオゾ
ン発生量が同じ場合は装置を小形化することができる。 （２）オゾン発生器部分の冷却水量が少なくなることか
ら装置を軽量化することができる。 （３）発熱が生じる誘電体と冷却媒体導管が接している
ので、冷却効率が良くなってオゾン発生効率が良くな
る。 （４）高圧電極管を内側と外側で分離しているため、誘
電体破損時は当該破損側高圧電極管をヒューズ等で回路
から切り離すことができる。(1) The ozone generation area is several times larger with the same diameter, and the ozone generation efficiency is greatly improved. If the ozone generation amount is the same, the device can be downsized. (2) Since the amount of cooling water in the ozone generator portion decreases, the weight of the device can be reduced. (3) Since the dielectric that generates heat and the cooling medium conduit are in contact with each other, cooling efficiency is improved and ozone generation efficiency is improved. (4) Since the high voltage electrode tube is separated inside and outside, the damaged high voltage electrode tube can be separated from the circuit by a fuse or the like when the dielectric is damaged.
【図１】本発明の一実施例を示し、（ａ）は全体構成
図、（ｂ）は要部断面図。1A and 1B show an embodiment of the present invention, in which FIG. 1A is an overall configuration diagram, and FIG.
【図２】従来の無声放電式オゾン発生器の一例を示し、
（ａ）は全体構成図、（ｂ）は要部断面図。FIG. 2 shows an example of a conventional silent discharge ozone generator,
(A) is a whole block diagram, (b) is sectional drawing of the principal part.
１１…内側高圧電極管 １２，１６…空隙部 １３…接地電極管 １４…冷却媒体導管 １５…誘電体 １７…外側高圧電極管 11 ... Inner high voltage electrode tube 12, 16 ... Void portion 13 ... Ground electrode tube 14 ... Cooling medium conduit 15 ... Dielectric 17 ... Outer high voltage electrode tube
Claims (2)
配設された高圧電極および接地電極を有し、前記高圧電
極と接地電極間に電圧を印加して前記空隙部内に流通さ
せた原料ガス中にオゾンを発生させる無声放電式のオゾ
ン発生装置において、 高電圧が印加される内側高圧電極管と、冷却媒体を通流
させる導管および該導管の内、外周面に各々設けられた
誘電体とから成り、前記内側高圧電極管の同軸外周部に
空隙部を介して配設された接地電極管と、前記接地電極
管の同軸外周部に空隙部を介して配設され、高電圧が印
加される外側高圧電極管とを備えたことを特徴とするオ
ゾン発生装置。1. A raw material gas having a high-voltage electrode and a ground electrode, which are arranged to face each other via a void and a dielectric material, and a voltage is applied between the high-voltage electrode and the ground electrode to circulate in the void. In a silent discharge type ozone generator for generating ozone therein, an inner high-voltage electrode tube to which a high voltage is applied, a conduit for flowing a cooling medium, and a dielectric provided on each of the inner and outer peripheral surfaces of the conduit. And a ground electrode tube disposed on the coaxial outer peripheral portion of the inner high-voltage electrode tube through a void portion, and a ground electrode tube disposed on the coaxial outer peripheral portion of the ground electrode electrode portion through a void portion, to which a high voltage is applied. And an outer high-voltage electrode tube.
配設された高圧電極および接地電極を有し、前記高圧電
極と接地電極間に電圧を印加して前記空隙部内に流通さ
せた原料ガス中にオゾンを発生させる無声放電式のオゾ
ン発生装置において、 高電圧が印加される第１の高圧電極管を中心とし、該第
１の高圧電極管の同軸外周部に、冷却媒体を通流させる
導管および該導管の内、外周面に各々設けられた誘電体
とから成る接地電極管と、高電圧が印加される第２の高
圧電極管とを各々空隙部を介して交互に複数個配設した
ことを特徴とするオゾン発生装置。2. A raw material gas having a high-voltage electrode and a ground electrode which are arranged to face each other via a void and a dielectric, and a voltage is applied between the high-voltage electrode and the ground electrode to circulate in the void. In a silent discharge type ozone generator for generating ozone therein, a cooling medium is caused to flow around the first high-voltage electrode tube to which a high voltage is applied, around the coaxial outer periphery of the first high-voltage electrode tube. A plurality of ground electrode tubes each consisting of a conduit and a dielectric material provided on the outer peripheral surface of each of the conduits and a second high voltage electrode tube to which a high voltage is applied are alternately arranged through a gap. An ozone generator characterized in that
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP33047393A JPH07187609A (en) | 1993-12-27 | 1993-12-27 | Ozonizer |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP33047393A JPH07187609A (en) | 1993-12-27 | 1993-12-27 | Ozonizer |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH07187609A true JPH07187609A (en) | 1995-07-25 |
Family
ID=18233022
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP33047393A Pending JPH07187609A (en) | 1993-12-27 | 1993-12-27 | Ozonizer |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH07187609A (en) |
Cited By (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR100359201B1 (en) * | 1999-04-29 | 2002-11-01 | 한국전기연구원 | A discharge-electrode of an ozonizer system |
| US6599486B1 (en) | 2000-09-15 | 2003-07-29 | Ozonator, Ltd. | Modular ozone generator system |
| US6726885B2 (en) | 1999-03-05 | 2004-04-27 | Ozonator Limited | Ozone generator and a method for generation of ozone |
| JP2008169114A (en) * | 2001-05-26 | 2008-07-24 | Wedeco Ges Fuer Umwelttechnologie Mbh | Method and device for generating ozone |
| KR101984437B1 (en) * | 2018-12-26 | 2019-05-30 | 김숙 | Water treating apparatus using plasma |
| EP3517497A1 (en) * | 2018-01-29 | 2019-07-31 | Xylem Europe GmbH | Ozone generator with heat pipe cooling |
| EP3517498A1 (en) * | 2018-01-29 | 2019-07-31 | Xylem Europe GmbH | Compact ozone generator with multi-gap electrode assembly |
-
1993
- 1993-12-27 JP JP33047393A patent/JPH07187609A/en active Pending
Cited By (14)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6726885B2 (en) | 1999-03-05 | 2004-04-27 | Ozonator Limited | Ozone generator and a method for generation of ozone |
| KR100359201B1 (en) * | 1999-04-29 | 2002-11-01 | 한국전기연구원 | A discharge-electrode of an ozonizer system |
| US6599486B1 (en) | 2000-09-15 | 2003-07-29 | Ozonator, Ltd. | Modular ozone generator system |
| JP2008169114A (en) * | 2001-05-26 | 2008-07-24 | Wedeco Ges Fuer Umwelttechnologie Mbh | Method and device for generating ozone |
| EP3517498A1 (en) * | 2018-01-29 | 2019-07-31 | Xylem Europe GmbH | Compact ozone generator with multi-gap electrode assembly |
| EP3517497A1 (en) * | 2018-01-29 | 2019-07-31 | Xylem Europe GmbH | Ozone generator with heat pipe cooling |
| WO2019145478A1 (en) * | 2018-01-29 | 2019-08-01 | Xylem Europe Gmbh | Ozone generator with heat pipe cooling |
| WO2019145479A1 (en) * | 2018-01-29 | 2019-08-01 | Xylem Europe Gmbh . | Compact ozone generator with multi-gap electrode assembly |
| CN111936415A (en) * | 2018-01-29 | 2020-11-13 | 赛莱默欧洲股份有限公司 | Ozone generator with heat pipe cooling function |
| US11639555B2 (en) | 2018-01-29 | 2023-05-02 | Xylem Europe Gmbh | Compact ozone generator with multi-gap electrode assembly |
| CN111936415B (en) * | 2018-01-29 | 2023-09-29 | 赛莱默欧洲股份有限公司 | Ozone generator with heat pipe cooling function |
| AU2019211076B2 (en) * | 2018-01-29 | 2023-11-09 | Xylem Europe Gmbh . | Compact ozone generator with multi-gap electrode assembly |
| US11858810B2 (en) | 2018-01-29 | 2024-01-02 | Xylem Europe Gmbh | Ozone generator with heat pipe cooling |
| KR101984437B1 (en) * | 2018-12-26 | 2019-05-30 | 김숙 | Water treating apparatus using plasma |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| US4614573A (en) | Method for producing an ozone gas and apparatus for producing the same | |
| US4960569A (en) | Corona discharge ozonator with cooled flow path | |
| JPH10223955A (en) | Design of aerodynamic chamber for high pulse repetition rate excimer laser | |
| US5871701A (en) | Ozone generator with small-diameter dielectric tubes | |
| US4264818A (en) | Single-tank X-ray generator | |
| US3671883A (en) | Process and apparatus for effecting high gas flow in discharge tube of gas laser | |
| JPH07187609A (en) | Ozonizer | |
| KR20190046836A (en) | Ozone generator unit and system | |
| JPH02284344A (en) | Water-cooled low voltage gas discharge lamp | |
| JPS6310597B2 (en) | ||
| US5929570A (en) | Micro-wave plasma device with a metal cooling wire wrapped around the insulating tube | |
| JP5180460B2 (en) | Ozone generator | |
| US5501845A (en) | Chilled oxygen for an ionization device | |
| JPH11157808A (en) | Ozone generating device | |
| JPH0867504A (en) | Ozone generator | |
| JP3341333B2 (en) | Ozone generator | |
| JP2002087804A (en) | Ozone generating device | |
| US3363140A (en) | High-power radiation source having a light transmissive gas supply chamber | |
| JPH08183604A (en) | Ozonizer | |
| JP2001097704A (en) | Multi-divided generator for high density ozone | |
| US4922731A (en) | Quartz conductive baffles for heat removal and method | |
| JPS62298193A (en) | Excimer laser characterized by highly repetitive discharge excitation | |
| JPH01273375A (en) | Discharge excitation excimer laser device | |
| US3379908A (en) | Arc-heater apparatus with magnetic yoke | |
| JPH10338503A (en) | Ozonizer |