JPS63166349U - - Google Patents
Info
- Publication number
- JPS63166349U JPS63166349U JP5843687U JP5843687U JPS63166349U JP S63166349 U JPS63166349 U JP S63166349U JP 5843687 U JP5843687 U JP 5843687U JP 5843687 U JP5843687 U JP 5843687U JP S63166349 U JPS63166349 U JP S63166349U
- Authority
- JP
- Japan
- Prior art keywords
- tape
- processing head
- polishing device
- disk
- guide roller
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000005498 polishing Methods 0.000 claims description 7
- 239000000758 substrate Substances 0.000 claims description 5
- 239000003082 abrasive agent Substances 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5843687U JPS63166349U (enExample) | 1987-04-17 | 1987-04-17 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5843687U JPS63166349U (enExample) | 1987-04-17 | 1987-04-17 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS63166349U true JPS63166349U (enExample) | 1988-10-28 |
Family
ID=30889007
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP5843687U Pending JPS63166349U (enExample) | 1987-04-17 | 1987-04-17 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS63166349U (enExample) |
-
1987
- 1987-04-17 JP JP5843687U patent/JPS63166349U/ja active Pending
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