JPS63164216U - - Google Patents
Info
- Publication number
- JPS63164216U JPS63164216U JP5761387U JP5761387U JPS63164216U JP S63164216 U JPS63164216 U JP S63164216U JP 5761387 U JP5761387 U JP 5761387U JP 5761387 U JP5761387 U JP 5761387U JP S63164216 U JPS63164216 U JP S63164216U
- Authority
- JP
- Japan
- Prior art keywords
- container
- housing
- rotating shaft
- chuck
- wafer
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 229920002120 photoresistant polymer Polymers 0.000 claims description 2
- 239000011248 coating agent Substances 0.000 claims 1
- 238000000576 coating method Methods 0.000 claims 1
- 238000001816 cooling Methods 0.000 claims 1
- 239000012809 cooling fluid Substances 0.000 claims 1
- 238000004528 spin coating Methods 0.000 description 2
Landscapes
- Coating Apparatus (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5761387U JPS63164216U (de) | 1987-04-16 | 1987-04-16 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5761387U JPS63164216U (de) | 1987-04-16 | 1987-04-16 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS63164216U true JPS63164216U (de) | 1988-10-26 |
Family
ID=30887483
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP5761387U Pending JPS63164216U (de) | 1987-04-16 | 1987-04-16 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS63164216U (de) |
-
1987
- 1987-04-16 JP JP5761387U patent/JPS63164216U/ja active Pending