JPS6231973U - - Google Patents
Info
- Publication number
- JPS6231973U JPS6231973U JP12096185U JP12096185U JPS6231973U JP S6231973 U JPS6231973 U JP S6231973U JP 12096185 U JP12096185 U JP 12096185U JP 12096185 U JP12096185 U JP 12096185U JP S6231973 U JPS6231973 U JP S6231973U
- Authority
- JP
- Japan
- Prior art keywords
- spin
- coating device
- spin chuck
- cup
- cleaning ring
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000004140 cleaning Methods 0.000 claims description 4
- 239000011248 coating agent Substances 0.000 claims description 4
- 238000000576 coating method Methods 0.000 claims description 4
- 238000010586 diagram Methods 0.000 description 2
- 239000004065 semiconductor Substances 0.000 description 1
Landscapes
- Coating Apparatus (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12096185U JPS6231973U (de) | 1985-08-07 | 1985-08-07 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12096185U JPS6231973U (de) | 1985-08-07 | 1985-08-07 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6231973U true JPS6231973U (de) | 1987-02-25 |
Family
ID=31009774
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP12096185U Pending JPS6231973U (de) | 1985-08-07 | 1985-08-07 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6231973U (de) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH01282819A (ja) * | 1988-05-09 | 1989-11-14 | Nec Corp | 回転塗布装置 |
| JPH06106126A (ja) * | 1992-09-29 | 1994-04-19 | Dainippon Screen Mfg Co Ltd | 回転塗布装置 |
-
1985
- 1985-08-07 JP JP12096185U patent/JPS6231973U/ja active Pending
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH01282819A (ja) * | 1988-05-09 | 1989-11-14 | Nec Corp | 回転塗布装置 |
| JPH06106126A (ja) * | 1992-09-29 | 1994-04-19 | Dainippon Screen Mfg Co Ltd | 回転塗布装置 |