JPS63162861U - - Google Patents

Info

Publication number
JPS63162861U
JPS63162861U JP5445187U JP5445187U JPS63162861U JP S63162861 U JPS63162861 U JP S63162861U JP 5445187 U JP5445187 U JP 5445187U JP 5445187 U JP5445187 U JP 5445187U JP S63162861 U JPS63162861 U JP S63162861U
Authority
JP
Japan
Prior art keywords
processed
substrate
concave mirror
heater
facing
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP5445187U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP5445187U priority Critical patent/JPS63162861U/ja
Publication of JPS63162861U publication Critical patent/JPS63162861U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Chemical Vapour Deposition (AREA)
JP5445187U 1987-04-10 1987-04-10 Pending JPS63162861U (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP5445187U JPS63162861U (enrdf_load_stackoverflow) 1987-04-10 1987-04-10

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP5445187U JPS63162861U (enrdf_load_stackoverflow) 1987-04-10 1987-04-10

Publications (1)

Publication Number Publication Date
JPS63162861U true JPS63162861U (enrdf_load_stackoverflow) 1988-10-24

Family

ID=30881458

Family Applications (1)

Application Number Title Priority Date Filing Date
JP5445187U Pending JPS63162861U (enrdf_load_stackoverflow) 1987-04-10 1987-04-10

Country Status (1)

Country Link
JP (1) JPS63162861U (enrdf_load_stackoverflow)

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61247021A (ja) * 1985-04-24 1986-11-04 Nec Corp 光ｃｖｄ装置

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61247021A (ja) * 1985-04-24 1986-11-04 Nec Corp 光ｃｖｄ装置

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