JPS63162510A - Method for removing carbon from metal nitride - Google Patents
Method for removing carbon from metal nitrideInfo
- Publication number
- JPS63162510A JPS63162510A JP30819686A JP30819686A JPS63162510A JP S63162510 A JPS63162510 A JP S63162510A JP 30819686 A JP30819686 A JP 30819686A JP 30819686 A JP30819686 A JP 30819686A JP S63162510 A JPS63162510 A JP S63162510A
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- JP
- Japan
- Prior art keywords
- metal nitride
- carbon
- powder
- contg
- heated
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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Links
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 title claims abstract description 41
- 229910052799 carbon Inorganic materials 0.000 title claims abstract description 41
- 239000002184 metal Substances 0.000 title claims abstract description 40
- 229910052751 metal Inorganic materials 0.000 title claims abstract description 40
- 150000004767 nitrides Chemical class 0.000 title claims abstract description 40
- 238000000034 method Methods 0.000 title claims description 18
- 239000000843 powder Substances 0.000 claims abstract description 35
- 238000010438 heat treatment Methods 0.000 claims abstract description 10
- 238000002156 mixing Methods 0.000 claims description 4
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 abstract description 10
- 229910052760 oxygen Inorganic materials 0.000 abstract description 10
- 239000001301 oxygen Substances 0.000 abstract description 10
- 239000000203 mixture Substances 0.000 abstract description 9
- 229910044991 metal oxide Inorganic materials 0.000 abstract description 6
- 150000004706 metal oxides Chemical class 0.000 abstract description 6
- 239000012298 atmosphere Substances 0.000 abstract description 5
- 239000012299 nitrogen atmosphere Substances 0.000 abstract description 3
- 239000007789 gas Substances 0.000 description 10
- 230000000052 comparative effect Effects 0.000 description 7
- 239000002245 particle Substances 0.000 description 7
- 238000005261 decarburization Methods 0.000 description 6
- VNWKTOKETHGBQD-UHFFFAOYSA-N methane Chemical compound C VNWKTOKETHGBQD-UHFFFAOYSA-N 0.000 description 5
- 238000005121 nitriding Methods 0.000 description 5
- 238000006722 reduction reaction Methods 0.000 description 5
- 230000015572 biosynthetic process Effects 0.000 description 4
- 229930195733 hydrocarbon Natural products 0.000 description 4
- 150000002430 hydrocarbons Chemical class 0.000 description 4
- 238000003786 synthesis reaction Methods 0.000 description 4
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Chemical compound O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 4
- 238000006243 chemical reaction Methods 0.000 description 3
- 238000007796 conventional method Methods 0.000 description 3
- 230000003647 oxidation Effects 0.000 description 3
- 238000007254 oxidation reaction Methods 0.000 description 3
- XEEYBQQBJWHFJM-UHFFFAOYSA-N Iron Chemical compound [Fe] XEEYBQQBJWHFJM-UHFFFAOYSA-N 0.000 description 2
- ATUOYWHBWRKTHZ-UHFFFAOYSA-N Propane Chemical compound CCC ATUOYWHBWRKTHZ-UHFFFAOYSA-N 0.000 description 2
- MCMNRKCIXSYSNV-UHFFFAOYSA-N Zirconium dioxide Chemical compound O=[Zr]=O MCMNRKCIXSYSNV-UHFFFAOYSA-N 0.000 description 2
- 238000013003 hot bending Methods 0.000 description 2
- 239000012535 impurity Substances 0.000 description 2
- 239000000463 material Substances 0.000 description 2
- -1 methane series hydrocarbons Chemical class 0.000 description 2
- 239000002994 raw material Substances 0.000 description 2
- 238000005245 sintering Methods 0.000 description 2
- 239000004215 Carbon black (E152) Substances 0.000 description 1
- VGGSQFUCUMXWEO-UHFFFAOYSA-N Ethene Chemical class C=C VGGSQFUCUMXWEO-UHFFFAOYSA-N 0.000 description 1
- 238000010521 absorption reaction Methods 0.000 description 1
- 239000006229 carbon black Substances 0.000 description 1
- 125000000753 cycloalkyl group Chemical group 0.000 description 1
- 238000000354 decomposition reaction Methods 0.000 description 1
- 229910052742 iron Inorganic materials 0.000 description 1
- 230000001590 oxidative effect Effects 0.000 description 1
- 230000002829 reductive effect Effects 0.000 description 1
- 238000000357 thermal conductivity detection Methods 0.000 description 1
Landscapes
- Ceramic Products (AREA)
Abstract
Description
【発明の詳細な説明】
産、十の１
本発明は炭素を含む金属窒化物粉末から炭素を除去する
方法に関する。DETAILED DESCRIPTION OF THE INVENTION The present invention relates to a method for removing carbon from carbon-containing metal nitride powder.
従」Ｌプ退」Ｌ
金属酸化物と炭素との混合物をＮ２雰囲気中で加熱して
金属窒化物を得る方法は、広く行なわれている。A widely used method is to heat a mixture of a metal oxide and carbon in an N2 atmosphere to obtain a metal nitride.
この場合、還元反応を促進させ、高い窒化率の金属窒化
物を得るために、原料中の炭素の配合量を金属酸化物を
還元するのに必要な量より過剰に配合するのが通例であ
る。したがって還元窒化反応が終った段階では、目的と
する金属窒化物は残留炭素との混合物となっている。In this case, in order to accelerate the reduction reaction and obtain a metal nitride with a high nitriding rate, it is customary to add carbon in the raw material in excess of the amount necessary to reduce the metal oxide. . Therefore, at the stage where the reductive nitriding reaction is completed, the target metal nitride is a mixture with residual carbon.
そこで、高純度の金属窒化物を得るには、残留炭素を含
んだ金属窒化物から炭素を除去づる必要がある。Therefore, in order to obtain a highly pure metal nitride, it is necessary to remove carbon from the metal nitride containing residual carbon.
従来、炭素を除去する方法としては、残留炭素を含んだ
金属窒化物を大気中５５０〜８００℃で加熱して残留炭
素を酸化除去していた。あるいは、特開昭６０−１５ｏ
９ｏ６＠で開示しているように、残留炭素を含んだ金属
窒化物をＣＯ２を含むガス中７００〜１１００℃で加熱
して残留炭素を酸化除去していた。また、空気中での脱
炭を特開昭５１−２８５９８号では５５０〜７００℃、
特開昭５４−２３９１７号では６００〜８００℃で行っ
ていた。また、特公昭５７−８０４６号で開示している
ように、残留炭素を含んだ３ｉ３Ｎ４を酸化性雰囲気に
おいて６００〜８００℃で加熱して脱炭処理をしていた
。Conventionally, as a method for removing carbon, a metal nitride containing residual carbon was heated in the atmosphere at 550 to 800° C. to oxidize and remove the residual carbon. Or, JP-A-60-15o
As disclosed in 9o6@, a metal nitride containing residual carbon was heated at 700 to 1100° C. in a gas containing CO2 to oxidize and remove residual carbon. In addition, in JP-A No. 51-28598, decarburization in air was carried out at 550 to 700°C.
In JP-A No. 54-23917, the temperature was 600 to 800°C. Further, as disclosed in Japanese Patent Publication No. 57-8046, 3i3N4 containing residual carbon was decarburized by heating at 600 to 800°C in an oxidizing atmosphere.
が ゛しようとするＵＪＬｆＸ
しかし、上述した従来の方法では、炭素を酸化して除去
する方法のため、金属窒化物自身も酸化され、高純度の
金属窒化物が得られない。However, in the conventional method described above, since carbon is removed by oxidation, the metal nitride itself is also oxidized, making it impossible to obtain a highly pure metal nitride.
そこで、本出願人は、炭素を含む金属窒化物粉末を、Ｎ
Ｈｓを含むガス中６００〜１８００℃の温度で加熱して
金属窒化物から炭素を除去する方法を提案した。Therefore, the applicant has developed a method for converting carbon-containing metal nitride powder into N
We proposed a method for removing carbon from metal nitrides by heating them at temperatures of 600 to 1800°C in a gas containing Hs.
ところが、この方法において系内には必ず０２成分が存
在する。この０２成分は、ガス中の不純物酸素、水蒸気
、炉材からの混入酸化物、混合物（合成粉）の表面の酸
化物などである。However, in this method, the 02 component always exists in the system. The 02 components include impurity oxygen in the gas, water vapor, mixed oxides from furnace materials, and oxides on the surface of the mixture (synthetic powder).
このため、次式により水が生じてしまう。Therefore, water is generated according to the following equation.
３ ［０］ ＋２ＮＨ３−＋３８ｚ Ｏ＋Ｎ２・・・・
・・（１）
この＋２０は合成粉を酸化させてしまうため、合成粉中
の総酸素含有の割合が高くなってしまう。3 [0] +2NH3-+38z O+N2...
(1) Since this +20 oxidizes the synthetic powder, the total oxygen content in the synthetic powder increases.
ユ」し久１」１
本発明は上記問題点を解消するためになされたものであ
り、金属窒化物の酸素含有量が極めて少なく金属窒化物
自身が酸化されず高純度の金属窒化物が得られる金属窒
化物から炭素を除去する方法を提供することを目的とし
ている。The present invention has been made to solve the above problems, and it is possible to obtain a highly pure metal nitride because the metal nitride has an extremely low oxygen content and the metal nitride itself is not oxidized. The purpose of the present invention is to provide a method for removing carbon from metal nitrides.
１１九り頴
この目的を達成するために本発明は炭素を含む金属窒化
物粉末を、ＮＨ３とＣｒａＨｎを含むガス中６００〜１
８００℃の温度で加熱することを特徴とする金属窒化物
から炭素を除去する方法を要旨としている。In order to achieve this object, the present invention prepares a carbon-containing metal nitride powder in a gas containing NH3 and CraHn at a concentration of 600 to 1
The gist of this paper is a method for removing carbon from metal nitrides, which is characterized by heating at a temperature of 800°C.
。 を ′するた の
本発明における炭素を含む金属窒化物は、次のようにし
て得られる。. The carbon-containing metal nitride according to the present invention can be obtained as follows.
金属酸化物と炭素を混合し、この混合物をＮ２雰囲気中
で加熱して金属窒化物を得る。A metal oxide and carbon are mixed and the mixture is heated in a N2 atmosphere to obtain a metal nitride.
この際、原料中の炭素の配合８は、金属酸化物を還元す
るのに必要な吊より過剰に配合する。これは、金属酸化
物の還元反応を促進させ、かつ高い窒化率を得る１＝め
に行われる。At this time, the carbon content 8 in the raw material is added in excess of the amount necessary to reduce the metal oxide. This is carried out in step 1 to promote the reduction reaction of the metal oxide and obtain a high nitridation rate.
このようにして得られた金属窒化物は残留炭素との混合
物となっている。The metal nitride thus obtained is a mixture with residual carbon.
この混合物には、０２成分が存在する。この０２成分と
は、上述したようにガス中の不純物酸素、水蒸気、炉材
からの混入酸化物、混合物（合成粉）の表面の酸化物な
どである。In this mixture, component 02 is present. As mentioned above, the 02 components include impurity oxygen in the gas, water vapor, mixed oxides from furnace materials, and oxides on the surface of the mixture (synthetic powder).
そこで、本発明ではこの混合物をＮＨ３と炭化水素化合
物（Ｃｍ Ｈｎ ）を含むガス中で加熱し、
３ Ｃ＋４ Ｎ Ｈ３→３ＣＨ４↑＋２Ｎ２ ↑ □６
Ｃ＋２ＮＨ３→３Ｃ２Ｈ２↑＋Ｎ２↑等の反応を利用し
て炭素を除去するものである。Therefore, in the present invention, this mixture is heated in a gas containing NH3 and a hydrocarbon compound (Cm Hn), and 3 C+4 NH3→3CH4↑+2N2 ↑ □6
Carbon is removed using reactions such as C+2NH3→3C2H2↑+N2↑.
この脱炭の時に前記０２成分の存在により前述の（１）
式から＋２０を生ずる。During this decarburization, due to the presence of the 02 component, the above (1)
yields +20 from the equation.
３ ［０］ ＋２ＮＨ３→３Ｈ２０＋Ｎ２しかし、前記
ガスがＣｍ ）−Ｉｎをも含んでいるので、この＋２０
は次式により無害化されることになる。3 [0] +2NH3→3H20+N2 However, since the gas also contains Cm)-In, this +20
will be made harmless by the following equation.
ｍ ＋２ Ｑ＋Ｃｍ Ｈｎ
−＋ｍ ＣＯ＋ （ｍ ＋９）Ｈ２ＮＨ３とＣｍ
Ｈｎの混合比は、Ｃｍ ）−１ｎを炭素基準のＣＨ４
に換算して好ましくはＮＨ３／ＣＨ４が０．５〜３００
０ （容積比）である。m +2 Q+Cm Hn −+m CO+ (m +9)H2NH3 and Cm
The mixing ratio of Hn is Cm)-1n to CH4 based on carbon.
Preferably NH3/CH4 is 0.5 to 300 in terms of
0 (volume ratio).
このＮＨ３／ＣＨ４の値が０．５より小さイト大半のＮ
Ｈ３が炭化水素ガスとの反応に消費され、実質的に脱炭
炉用がなくなり好ましくはない。またＮＨ３／ＣＨ４の
値が３０００より大きいと実質的に８２０の除去が行な
われず合成粉中の酸素含有量が高くなり好ましくない。If this NH3/CH4 value is smaller than 0.5, most of the N
H3 is consumed in the reaction with hydrocarbon gas, which is not preferable because it is essentially not used in the decarburization furnace. Moreover, if the value of NH3/CH4 is larger than 3000, 820 is not substantially removed and the oxygen content in the synthetic powder becomes high, which is not preferable.
本発明の系では酸素成分は含まれておらず、金属窒化物
の酸化が全く生じない。The system of the present invention does not contain any oxygen component, and no oxidation of the metal nitride occurs.
このときの加熱温度は６００〜１８００℃の範囲である
が、８００〜１６００℃の加熱温度が好ましい。The heating temperature at this time is in the range of 600 to 1800°C, but preferably 800 to 1600°C.
このように加熱温度を限定した理由は次のとおりである
。The reason for limiting the heating temperature in this way is as follows.
加熱温度が６００℃未満である場合、実質的に金属窒化
物から残留炭素が除去されず、すなわち脱炭が進まない
。また加熱温度が１８００℃より高いと脱炭には過度の
条件となるし、金属窒化物がたとえばＳｉ ３ Ｈ４で
あると、Ｓｉ ３ Ｈ４の分解が起こる。ところで炭化
水素化合物（Ｃｍ Ｈｎ ）としては、たとえばＣＨ４
やＣ３Ｈ８のメタン系列炭化水素の他、エチレン系列、
アセチレン系列の各炭化水素、環式炭化水素および合成
雰囲気中で炭化水素になるガス等が使用できる。When the heating temperature is less than 600° C., residual carbon is not substantially removed from the metal nitride, that is, decarburization does not proceed. Further, if the heating temperature is higher than 1800° C., this becomes an excessive condition for decarburization, and if the metal nitride is, for example, Si 3 H4, decomposition of Si 3 H4 occurs. By the way, as a hydrocarbon compound (Cm Hn), for example, CH4
In addition to methane series hydrocarbons such as C3H8 and C3H8, ethylene series,
Acetylene series hydrocarbons, cyclic hydrocarbons, and gases that become hydrocarbons in the synthesis atmosphere can be used.
上述の条件のもとに、前記金属窒化物から残留炭素が除
去されるとともに、水が無害化され合成粉の酸化がなく
なる。Under the above conditions, residual carbon is removed from the metal nitride, water is rendered harmless, and the synthetic powder is no longer oxidized.
支１１ 次に、表−１により本発明の実施例Ｎｏ。Support 11 Next, Table 1 shows Example No. of the present invention.
１〜Ｎ０．７を説明する。1 to N0.7 will be explained.
Ｎ０１１〜０３：
３ｉ０２粉末（平均粒径２０μＩＩ）、Ｃ（カーボンブ
ラック）粉末（平均粒径４０μｍ）、Ｓｉ３Ｎ４粉末（
平均粒径０．１μｍ＞を、表−１に示した所定割合に配
合し、表−１に示す合成条件で還元窒化処理を施し、余
剰炭素を含むＳｉ３Ｎ４粉末を得た。N011-03: 3i02 powder (average particle size 20 μm), C (carbon black) powder (average particle size 40 μm), Si3N4 powder (
Si3N4 powder containing excess carbon was obtained by blending Si3N4 powder with an average particle size of 0.1 μm in the predetermined proportions shown in Table 1 and subjecting it to a reduction nitriding treatment under the synthesis conditions shown in Table 1.
−Ｎｏ、４〜Ｎ０５：
Ａ Ｑ２０３粉末（平均粒径０．７μｍ ＞、Ｃ粉末（
平均粒径４０ｍμｍ）を、表−１に示した所定割合に配
合し、表−１に示す合成条件で還元窒化処理を施し、余
剰炭素を含むＡ９Ｎ粉末を得た。-No, 4 to N05: A Q203 powder (average particle size 0.7 μm >, C powder (
(average particle size: 40 mμm) were blended in the predetermined proportions shown in Table 1, and subjected to reduction nitriding treatment under the synthesis conditions shown in Table 1 to obtain A9N powder containing excess carbon.
Ｆ Ｎｏ、６〜ＮＯ，７：
ＺｒＯ２粉末（平均粒径ｏ、 ８μｍ ＞、ｃ粉末（平
均粒径４０ｍμｍ）を、表−１に示した所定割合に配合
し、表−１に示す合成条件で還元窒化処理を施し、余剰
炭素を含むＺｒＮ粉末を得た。F No. 6 to No. 7: ZrO2 powder (average particle size o, 8 μm > c powder (average particle size 40 mm μm) was blended in the predetermined proportions shown in Table-1, and synthesized under the synthesis conditions shown in Table-1. A reduction nitriding treatment was performed to obtain ZrN powder containing excess carbon.
次に、上記Ｓｉ３Ｎ４、ＡＩＩＮ及びＺｒＮの粉末をＮ
Ｈ３とＣｍ Ｈｎを含むガス中でそれぞれ表−１に示す
本発明の方法で加熱し、脱炭処理を施した。ここで用い
られたＣｍＨｎはＣ３Ｈａである。得られた前記各金属
窒化物粉末の含有酸素量を赤外吸収法ににす、また含有
炭素量を熱伝導度検出法によりそれぞれ測定した。Next, the Si3N4, AIIN and ZrN powders were heated with N
Decarburization treatment was performed by heating in a gas containing H3 and CmHn by the method of the present invention shown in Table 1, respectively. CmHn used here is C3Ha. The amount of oxygen contained in each of the obtained metal nitride powders was measured by an infrared absorption method, and the amount of carbon contained was measured by a thermal conductivity detection method.
比較のために、従来の方法により空気中又はＣＯ２中で
脱炭し゛た前記各金属窒化物粉末の比較例Ｎ０．１〜Ｎ
ｏ、７の特性も表−２に示す。For comparison, comparative examples No. 1 to N of each of the metal nitride powders decarburized in air or CO2 by a conventional method are shown.
The characteristics of o and 7 are also shown in Table 2.
各実施例Ｎｏ、１〜Ｎｏ、７と比較例Ｎｏ。Each Example No. 1 to No. 7 and Comparative Example No.
１〜Ｎ００７の生成粉に見られる全酸素屋は主として粉
末構造内に存在する酸素量である。The total oxygen content found in the powders produced from No. 1 to N007 is primarily the amount of oxygen present within the powder structure.
実施例Ｎｏ 、 １〜Ｎｏ 、 ７と比較例Ｎｏ。Example No. 1 to No. 7 and Comparative Example No.
１〜Ｎｏ、７を比べると判るように、本発明の方法によ
り得られた実施例Ｎｏ、１〜Ｎｏ。As can be seen by comparing Examples Nos. 1 to 7, Examples Nos. 1 to 7 were obtained by the method of the present invention.
７は、従来の比較例Ｎｏ、１〜ＮＯ６７に比べて金属窒
化物の酸化がおこらず高純度の金属窒化物粉末が得られ
る。In Comparative Example No. 7, oxidation of the metal nitride does not occur compared to conventional comparative examples No. 1 to No. 67, and a highly pure metal nitride powder can be obtained.
一例として、本発明の方法により得られた表−１に示す
実施例Ｎｏ、１の粉末を用いて、この粉末にＹ２０３を
５重量部とＡ Ｑ２０３を２重量部を加え、混合後圧粉
成形した。そして、成形体を１７５０℃ノ温度、４５０
Ｋ（＋／ｃｎ＋２の圧力で３時間焼結して焼結体を作成
した。As an example, using the powder of Example No. 1 shown in Table 1 obtained by the method of the present invention, 5 parts by weight of Y203 and 2 parts by weight of A Q203 were added to this powder, and after mixing, the powder was compacted. did. Then, the molded body was heated to a temperature of 1750°C and heated to a temperature of 450°C.
A sintered body was produced by sintering at a pressure of K(+/cn+2) for 3 hours.
また表−２に示す比較例Ｎ０１１の粉末を用いて、この
粉末にＹ２Ｏ３を５重り部と八９２０３を２重量部を加
え、混合後圧粉成形した。そして、成形体を１７５０℃
の温度、４５０Ｋｇ／ｃｎ＋２の圧力で３時間焼結して
焼結体を作成した。Further, using the powder of Comparative Example No. 011 shown in Table 2, 5 parts by weight of Y2O3 and 2 parts by weight of 89203 were added to the powder, mixed, and then compacted. Then, the molded body was heated to 1750°C.
A sintered body was prepared by sintering at a temperature of 450 Kg/cn+2 for 3 hours.
このようにして得られた両焼結体の熱間曲げ強度の比較
を行なった。本発明の実施例Ｎ０１１の焼結体の場合は
、１０００℃で１１１ ＫＯ／ｍｍ２．１２００℃で１
０３Ｋ（１／ｍｆｆ１２であった。一方、比較例Ｎｏ、
１の焼結体の場合は、１０００℃で９８Ｋ（Ｊ ／ｍｍ
２．１２００°Ｃで６８Ｋｇ／ｍｍ２であった。The hot bending strengths of both sintered bodies thus obtained were compared. In the case of the sintered body of Example No. 011 of the present invention, 111 KO/mm2 at 1000°C, 1 KO/mm2 at 1200°C
03K (1/mff12. On the other hand, comparative example No.
In the case of the sintered body of No. 1, 98K (J/mm
2. It was 68Kg/mm2 at 1200°C.
このことから、本発明の方法により１［７られた焼結体
は、従来の方法により得られた焼結体に比べて熱間曲げ
強度が大きい。From this, the sintered body obtained by the method of the present invention has a higher hot bending strength than the sintered body obtained by the conventional method.
免匪悲立１
本発明によれば、金属窒化物中の醗索含有最が極めて少
ない高純度の金属窒化物粉末が得られる。そしてそれを
用いて製造された焼結体の特性が向上する。Ｓｉ３Ｎ４
（−例としてα−８ｉ ３ Ｎ４ ）の場合、熱間強
度の向上が図れる。またｌｉ Ｎの場合、熱伝導率の向
上が図れる。According to the present invention, a high-purity metal nitride powder can be obtained in which the metal nitride contains an extremely small amount of iron. The characteristics of the sintered body manufactured using the same are improved. Si3N4
(-8i 3 N4 as an example), the hot strength can be improved. Furthermore, in the case of liN, the thermal conductivity can be improved.
昭和６２年４月膣日April 1986 Vaginal Day
Claims (2)
ｎを含むガス中６００〜１８００℃の温度で加熱するこ
とを特徴とする金属窒化物から炭素を除去する方法。(1) Metal nitride powder containing carbon is mixed with NH_3 and CmH
A method for removing carbon from a metal nitride, the method comprising heating at a temperature of 600 to 1800°C in a gas containing n.
炭素基準のＣＨ＿４に換算してＮＨ＿３／ＣＨ＿４が０
．５〜３０００の容積比である特許請求の範囲第１項に
記載の金属窒化物から炭素を除去する方法。(2) The mixing ratio of NH_3 and CmHn is NH_3/CH_4 when CmHn is converted to carbon-based CH_4.
．． A method for removing carbon from metal nitrides according to claim 1, wherein the volume ratio is between 5 and 3000.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP30819686A JPS63162510A (en) | 1986-12-26 | 1986-12-26 | Method for removing carbon from metal nitride |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP30819686A JPS63162510A (en) | 1986-12-26 | 1986-12-26 | Method for removing carbon from metal nitride |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS63162510A true JPS63162510A (en) | 1988-07-06 |
Family
ID=17978073
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP30819686A Pending JPS63162510A (en) | 1986-12-26 | 1986-12-26 | Method for removing carbon from metal nitride |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS63162510A (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0434405U (en) * | 1990-07-17 | 1992-03-23 | ||
| WO2023048282A1 (en) * | 2021-09-27 | 2023-03-30 | 三菱マテリアル株式会社 | Coated zirconium nitride particles and uv-curable black organic composition |
-
1986
- 1986-12-26 JP JP30819686A patent/JPS63162510A/en active Pending
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0434405U (en) * | 1990-07-17 | 1992-03-23 | ||
| WO2023048282A1 (en) * | 2021-09-27 | 2023-03-30 | 三菱マテリアル株式会社 | Coated zirconium nitride particles and uv-curable black organic composition |
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