JPS63162059A - Organic thin film forming device - Google Patents

Abstract

PURPOSE:To obtain hetero-structured film of good quality, by providing a partition part partitioning a 1st area where an ampliphilic organic monomolecular film is developed in a water tank from a 2nd area where a different monomolecular film is developed, moving a base plate up and down, and transferring the base plate between both areas. CONSTITUTION:The 1st area A where a monomolecular film is developed and the 2nd area where a monomolecular film different from said monomolecular film or no monomolecular film is developed are provided in the water tank 1 for developing amphiphilic monomolecular films. And the area A and the area B are partitioned by the partition part 60 consisting of a revolving boss 61, a revolving holder 62, a partition plate 63, fixing metals 64, a pressurizing plate 65 and a sealing spring 66, etc. And, a base plate vertical drive means moving a base plate 20 up and down inoder to stick the monomolecular film to the base plate 20 and a base plate transfer means transferring the base plate 20 between the areas A and B are provided. As a result, a hetero-structure film of good quality is formed.

Description

DETAILED DESCRIPTION OF THE INVENTION [Object of the Invention] (Industrial Application Field) The present invention relates to an organic thin film forming apparatus, and more particularly to an organic thin film forming apparatus for obtaining a betastructure film in which a plurality of types of organic thin films are accumulated. .

(Prior Art) In recent years, with the remarkable progress in material technology using organic molecules, there is a growing momentum to realize new functional elements using organic molecules. In particular, the development of devices using ultra-thin films made of organic molecules is being actively studied.

Conventional methods for forming organic thin films include the spin code method, vacuum evaporation method, and Langmuir-Prodgett method.
The ir-Brodgett method and the like are known. Among these, the Langmuir-Prodgett method in particular has attracted a great deal of attention in recent years as the only thin film forming method that can align and stack organic molecules in units of λ. In the following description, the Langmuir-Prodgett method will be abbreviated as the LB method, and the film formed by this LB method will be referred to as an LB film. Devices for which LB films are being considered include MIS type light emitting devices and M/S transistors using LB films as insulating films, photoelectric conversion devices using dye molecules, optical recording media, various sensors, and polar film structures. There are piezoelectric elements etc. used.

Further, the use of the LB film as a resist for ultra-fine processing is also being considered.

By the way, examples of conventional LB film forming apparatuses include the following. FIG. 10 is a schematic perspective view, and FIG. 11 is a schematic sectional view. In FIGS. 1O and 11, a rotating drum 101 and a support stand 102 for the rotating drum 101 are provided in the center of a single water tank 100. These rotating drum 101 and support stand 102 divide the liquid surface of the water tank 100 into two (
It is divided into C and D in the figure, and different monomolecular films can be developed at a predetermined film pressure by a film-like barrier 103.

Then, a substrate holding member 104 is provided protruding from the rotating drum 101, and the substrate 105 is held and fixed at the tip of the substrate holding member 104, and the rotating drum lot is rotated so that the substrate 105 moves up and down across the monomolecular film. ing.

In the conventional organic thin film forming apparatus configured as described above, in order to move the substrate 105 up and down by rotating the rotating drum 101, it is not possible to move the substrate 105 vertically downward, and the substrate 105 cannot be moved vertically. This is disadvantageous for film formation, and vibrations are transmitted to the monomolecular film in water tank 100 due to the rotation of drum 101, which is also disadvantageous for formation of a high-quality film.

(Problems to be Solved by the Invention) As described above, in the conventional organic a film forming apparatus, since the rotation of the drum is used to move the substrate up and down, it is not possible to move the substrate up and down vertically. It has been difficult to obtain a high-quality heterostructure film because the vibrations generated when the drum rotates are transmitted to the developed molecular film.

The present invention has been made in view of the above circumstances, and an object thereof is to provide an organic thin film forming apparatus that can obtain a high quality heterostructure film.

[Structure of the invention]

(Means for Solving the Problems) The organic film forming apparatus of the first invention has a water tank in which a monomolecular film of amphiphilic organic molecules is developed, and the monomolecular film is developed in this water tank. A partition section separates a first region where a monomolecular film different from this monomolecular film is developed or a second region where a monomolecular film is not developed, and the monomolecular film developed in the water tank is placed on the substrate. A substrate vertical drive means for driving the substrate up and down for adhesion, and a substrate moving means for moving the substrate between a first region and a second region are provided.

The organic thin film forming apparatus of the second invention has a plurality of mutually independent water tanks in which a monomolecular film of amphiphilic organic molecules is developed, and a first tank in which a monomolecular film is developed in these tanks. In order to separate the area and a second area where a monomolecular film different from this monomolecular film is spread or where no monomolecular film is spread by a partition part, and to attach the monomolecular film spread in the water tank onto the substrate. a substrate vertical driving means for driving the substrate up and down, a substrate moving means for moving the substrate between a first region and a second region, and a substrate transporting means for transporting the substrate between each water tank outside each water tank. It is set up.

(Function) In the configuration of the first invention, the substrate can be vertically driven up and down, and a high-quality petrostructure film can be formed without transmitting vibrations to the monomolecular film when the substrate is immersed.

In the configuration of the second invention, since there are a plurality of independent water tanks, a desired water phase composition can be set in each tank, and each developed molecular film can be made into a desired condensed film. can. Further, since the substrate is transported outside the water tank, mixing of different types of deployable molecules is prevented. Therefore, a high quality heterostructure film can be obtained.

Further, the substrate is movable between the first area and the second area,
By combining this with vertical vertical movement of the substrate, it is possible to form a monomolecular film with only one step of dipping the substrate or pulling up the substrate, and by applying these steps over multiple water tanks, it is possible to form various structures. A heterostructure film is obtained.

(Example) The present invention will be explained in detail below.

FIG. 1 shows an embodiment of a heterostructure film forming apparatus using three completely independent water tanks 1, 2.3 in which three types of amphipathic organic molecules are developed. Each water tank 1°2.3 has a vibration-proof stand 5
is fixed by legs 4.

Each of the water tanks 1, 2.3 has a deep groove portion 6 in which the substrate is immersed.
has. These water tanks 1, 2.3 each independently have a surface pressure detector and a compression drive system for condensing molecules developed on the water surface into a film at a desired surface pressure. Although the figure shows the surface pressure detector 7 on the water tank 1, there is actually a similar surface pressure detector on the water tank 2.3. This surface pressure detector 7 is, for example, a so-called WilheLmy type using an electronic balance, which measures the surface tension of a molecular film developed by hanging a filter paper. Regarding the water tank 3, the basic component of the compression drive system is a movable barrier 8 made of Teflon for expanding and compressing organic molecules on the water surface. This movable barrier 8 is held by a parallel spring 9 on a support stand 10, and this support stand 10 is slidably held by a guide 11 fixed to the stand and connected to a screw 12. This screw 12 is held at both ends by supports 14.15, and power from the motor 13 is transmitted via gears 16.17. That is, by driving the motor 13, the movable barrier 8
can be moved along the screw 12, thereby forming a condensed film with a predetermined surface pressure. The configuration of the compression drive system is the same for the other water tanks 1 and 2 as well.

In the figure, the drive units including the motors are provided on the left side of the aquariums 1 and 2, and on the right side of the aquarium 3, but this is a result of taking storage space into consideration.

A substrate driving device 18 is used to vertically drive a substrate for film formation by immersing it in a water tank or pulling it up.
There is.

The transport mechanism between the respective water tanks of the substrate driving device 18 is constructed on pillars 36a and 36b fixed on the vibration isolating pedestal 5. The configuration of this transport mechanism is as follows.

The power of the motor 39 serving as the drive source is transmitted to the screw 38 via the gear 40, and the substrate driving device 18 can freely move in the air between the water tanks under the guidance of the guide rail 37.

FIG. 2 is an enlarged view of one water tank, for example, water tank 1, in the organic thin film forming coating of the present invention in FIG. 1. The present invention is effective even when only one water tank is used as described above. It is. The water tank 1 is divided into two regions by a partition 60, and is divided into a region A in which the molecules 41 are developed and a region B in which the molecules 41 are not developed. Note that a monomolecular film different from that in area A may be developed in area B. The configuration of the partition portion 60 is as follows.

A rotary boss 61 for dividing the aquarium 1 so that the molecules 41 do not move from region A to region B when the substrate 20 is rotationally driven, a rotary boss holder 62 for storing the rotary boss 61, and a rotary boss holder 62 for separating the regions A and B. A force sufficient to provide sealing properties including a partition plate for separation, a fixing fitting 64 for fixing the partition plate 63 to the water tank 1, and a pressure plate 65 to provide sealing property between the rotating boss 61 and the rotating boss holder 62. It is made up of a seal spring 66 that generates.

When the substrate mounting rod 67 for transmitting the vertical and rotational drive by the substrate driving device 18 to the substrate 20 is inserted into the rotation boss 61, the molecules 41 that had been in the insertion groove 68 are moved to the slope part 69 of the substrate mounting rod 67. As a result, it is pushed to the area A side. When the gradient portion 69 is completely inserted, the movable barrier 8 moves slightly to maintain the surface pressure of the molecules 41 at a predetermined value. By further lowering the substrate 20, a thin film of molecules 41 is formed on the substrate 20. 6 FIGS. 3(a) and 3(b) show the movement of the substrate 20 from area A to area B. After forming a thin film of molecules 41 on the substrate 20, the substrate 20 and the substrate clamp rod 70 for fixing the substrate 20 to the substrate mounting rod 67 are completely submerged in the liquid. When the substrate mounting rod 67 further rotates, the substrate 20 can pass from the region A to the lower side of the partition plate 63 and enter the region B. At this time, since the gap between the seal portion of the rotary boss 61 is made small, the amount of molecules 41 moving from area A to area B can be reduced to a very small amount, and contamination caused by molecules 41 in area B can be almost eliminated. can. When the substrate 20 is pulled upward at the 180° rotated position and taken out from the liquid in the area B, and a series of operations is completed, the thin film forming process on the substrate 20 is completed. By providing multiple water tanks, it is possible to form multiple types of molecular thin films on the substrate 20. By reversibly reversing the rotary boss 61 using another drive system, it is possible to move the substrate 20 from the area B where there are no molecules to the area A where there are molecules, so that various types of thin films can be formed on the substrate 20 in any order. An example of a drive system for the zero-rotation boss 61 that can be used is a drive system that combines gears, screws, motors, etc.

Next, FIGS. 4 and 5 show the steps of forming a heterostructure film.

As shown in FIGS. 4(a) and 4(b), the substrate 20 is vertically immersed from the region A where the molecules 41 are developed to a predetermined film thickness. The descending speed of the substrate 20 at this time is very low, for example, about 0.3 m5Z. Then, as shown in FIG. 4(c), the substrate mounting rod 67 is rotated 180'' to transport the substrate 20 to area B where there are no molecules 41, and then pull up the substrate 20 from area B as shown in FIG. 4(d). In order to accumulate a large amount of the same molecules 41, the substrate 20 is rotated again as shown in FIGS.
Just repeat d).

In FIG. 5, the substrate 20 is inserted from the region B where molecules 41 are not developed, and the substrate 20 is inserted as shown in FIGS. 5(b) and (Q).
is rotated and lifted out of area A as shown in FIG. 5(d).

As well as combining the steps shown in FIGS. 4 and 5.

Various heterostructure films can be formed by developing different molecules in the regions A of a plurality of water tanks and transporting the substrate 20 to each tank using the substrate transport mechanism described above.

Next, examples of forming a heterostructure film are shown in FIGS. 6 to 9.

As shown in the steps from FIG. 6(a) to FIG. 6(b), the substrate 20 is
When the molecules 41 are immersed from region A where molecules 41 are developed, rotated and pulled up from region B, rotated again and immersed from region A, as shown in FIG. 6(d), the substrate, hydrophobic groups,
The same molecules 41 can be accumulated in the order of hydrophilic group, hydrophobic group, and parent wood group.

6(a) to 6(c), the substrate 20 is immersed from 0 into the area of the water tank 1 where the molecules 41 are developed, rotated and pulled up from the area B1, and then transferred to a different water tank 2. After being transported, when it is immersed in the region A2 where different molecules 42 are developed, a structure as shown in FIG. 6(s) is obtained.

In the steps shown in FIGS. 7(a) to (b), the substrate 20 is immersed from the area A where the molecules 41 are developed and then pulled up. As shown in FIG. 7(d), the substrate, hydrophobic groups, They are accumulated in the order of parent wood groups and hydrophobic groups. Figures 7(a) to 7(
In the step c), the area A1 of the water tank 1 in which the molecules 41 are developed is
After immersing the substrate 20 in the water tank 2, rotating it and pulling it up from the area BL, the substrate 20 is transferred to another water tank 2, and the substrate 20 is put in from the area B2 and rotated to remove the substrate 20 from the area A2 where other molecules 42 are developed. A Peter structure film as shown in FIG. 7(e) is obtained.

In the steps shown in FIGS. 8(a) to 8(b), the substrate 20 is introduced from region B, rotated, and then pulled up from region A where molecules 41 are developed and immersed in region A as it is.
As shown in FIG. 7(d), molecules are accumulated in the order of substrate, hydrophilic group, hydrophobic group, hydrophobic group, and hydrophilic group. In the steps shown in FIGS. 8(a) to (c), the substrate 20 is put into the water tank 1 from area B□, and after being rotated, the substrate 20 is placed in the area A1 where the molecules 41 are expanded.
After being pulled up from the substrate 20, the substrate 20 is transported to the water tank 2 and immersed in the region A2 where other molecules 42 are developed, resulting in a structure as shown in FIG. 8(e).

In the steps shown in FIGS. 9(a) to (b), the substrate 20 is inserted from region B, rotated, pulled up from region A where molecules 41 have been developed, rotated again, inserted into region B, and rotated a third time. As shown in FIG. 9(d), the substrate, parent wood group, and hydrophobic group are pulled up from area A.

Can be accumulated in the order of parent wood group and hydrophobic group. From Figure 9(a) (
In the step c), the substrate 20 is placed in the area B of the water tank 1, rotated, and pulled up from the area A1 where the molecules 41 are developed, and then the substrate 20 is transported to the other tank 2 and placed in the area B2.
The structure is shown in FIG. 9(e) when the other molecules 42 are expanded from the area A2.

As shown in FIGS. 6 to 9, monomolecular films can be selectively accumulated, and a plurality of types of monomolecular films can be cumulatively formed in various combinations.

By using the organic f-thin film forming apparatus according to the second aspect of the present invention, since a plurality of water tanks are provided independently, it is possible to prevent contamination by mixing developed molecules with each other. Furthermore, since the aqueous phase composition can be set to any PH1 temperature and ion concentration in each water tank, the range of selection of molecules to be developed is expanded. Moreover, by combining each process, X-type, Y-type, and Z-type film structures can be obtained very easily.

Furthermore, since the substrate can be raised and lowered vertically and its vibrations are not transmitted to the unfolded molecules, a high-quality petrostructure film can be easily obtained.

The present invention is not limited to the above embodiments.

For example, in the examples, two or three water tanks were used, but the present invention is effective as long as there is at least one water tank, and four or more water tanks may be prepared to develop various molecules. It is also possible to form complex Peter structure films. Further, different monomolecular films may be developed in areas A and B separated by the partition portion. Further, the specific configurations of the substrate driving means and the substrate transporting means for moving the substrate down can be modified in various ways without departing from the spirit thereof.

〔Effect of the invention〕

As described in detail above, according to the present invention, an organic thin film forming apparatus capable of cumulatively forming high-quality heterostructure films can be obtained.

[Brief explanation of the drawing]

FIG. 1 is a schematic perspective view showing a Peter structure film forming apparatus according to an embodiment of the present invention, FIG. 2 is a detailed perspective view of a water tank portion thereof, and FIG. 3 is a detailed perspective view of a mechanism for rotating a substrate. figure,
FIGS. 4 and 5 are diagrams for explaining the Peter structure film accumulation according to the present invention, and FIGS. 6 to 9 show the steps of Peter structure film accumulation according to the present invention and these steps. Schematic diagrams showing enlarged Peter structure films, Figures 10 and 1
FIG. 1 is a perspective view and a schematic sectional view showing a conventional device. 1.2.3...Aquarium 6...Deep groove 7...
Surface pressure detector 8...Movable barrier 13...Motor 18...Substrate drive device 20...
Substrate 41.42...Molecular 60...
Recessed portion 61... Rotating boss 62... Rotating boss holder 63... Restricting plate 67... Board mounting +1 68... Insertion groove 69... Inclined portion 7o... Board clamp agent Patent attorney Shi Nori Chika Ken Yudo Takehana Kikuo Figure 3 f (CL) (d-) Figure 4 tb) 2゜ (b) IC
) (6)tb
) tcn rod 7 M (1))
tc+ (111
1') (bn (C)
(e) Figure 9 Figure 11

Claims (6)

[Claims] (1) A water tank for developing a monomolecular film of amphiphilic organic molecules, a first region in which the monomolecular film is developed in the tank, and a monomolecular film different from the monomolecular film in the water tank. a second region where a molecular film is developed or where a monomolecular film is not developed; a partition for separating the first region and the second region; and a substrate for the monomolecular film developed in the water tank. It is characterized by comprising: a substrate vertical driving means for driving the substrate up and down in order to deposit the substrate thereon; and a substrate moving means for moving the substrate between the first region and the second region. An apparatus for forming organic thin films. (2) a plurality of mutually independent water tanks in which a monomolecular film of amphiphilic organic molecules is respectively developed; a first region in which the monomolecular film is spread in the tank; and a first region in which the monomolecular film is spread in the tank; a second region in which a monomolecular film different from the first region is developed or a monomolecular film is not developed; a partition portion for separating the first region and the second region; substrate vertical driving means for driving the substrate up and down to deposit a molecular film on the substrate; substrate moving means for moving the substrate between the first region and the second region; and the substrate. and a substrate transport means for transporting the substrate between the plurality of water tanks. (3) The organic thin film forming apparatus according to claim 1 or 2, wherein the water tank is provided with a compression system for the monomolecular film to be developed and a surface pressure measuring device. . (4) The organic thin film forming apparatus according to claim 1 or 2, wherein the water tank has a deep groove formed therein for immersing the substrate perpendicularly to the water surface. (5) The substrate moving means has a substrate mounting rod for vertically holding the substrate, and the substrate moving means moves the substrate between the first region and the second region with the substrate mounting rod as a rotation center. An organic thin film forming apparatus according to claim 1 or 2, characterized in that the substrate is rotated and moved. (6) The substrate transport means includes a guide rail that is disposed above the plurality of water tanks and slidably suspends the substrate drive means, and a means for driving the substrate drive means along the guide rail. An organic thin film forming apparatus according to claim 2, characterized in that it has the following.