JPS6316127Y2 - - Google Patents

Description

[Detailed Description of the Invention] The present invention relates to an electron microscope sample device equipped with a mechanism for vertically moving a sample.

A conventional device equipped with a mechanism for moving the sample up and down is shown in FIG. 1, for example.
That is, 2 is a holding tube that holds the sample tube 1, and the holding tube 2 can be moved in the direction of the optical axis 4 by means of a guide member 3. A lever body 6 is attached to this guide member 3 with the shaft 5 as a fulcrum, and the point of action of the lever body is connected to a member 9 by a pin 7, and the other end of the member 9 is connected to the holding cylinder 2 by a pin 8. By connecting the drive shaft 10 to one end and moving the drive shaft 10 in the direction of arrow K from outside the lens barrel, the lever body 6 is tilted and the holding tube 2 is moved up and down.

Therefore, in such conventional devices, the force for vertically moving the holding cylinder 2 is applied only from one side to the axis of the holding cylinder, which not only impairs the smooth vertical movement of the holding cylinder, but also This was an obstacle to performing accurate vertical movements.

The present invention solves these conventional drawbacks and provides a specimen device for an electron microscope that enables smooth and accurate vertical movement of the holding cylinder. First and second pulleys 1 installed symmetrically with respect to the axis
9, 20, a guide member 3 for moving the holding cylinder along the optical axis 4, and a guide member 3 above the first and second pulleys for receiving the wires placed on the first and second pulleys, respectively. third and fourth pulleys 21, 2 attached to the guide member;
2, members 26 and 28 movable in a plane equidistant from the first and second pulleys in order to move the holding cylinder up and down, and one end fixed to the guide member above the first pulley. The first pulley 19, the third pulley 21, the moving member 2
6, 28, the fourth pulley 22, and the second pulley 20, the other end of which is the second pulley 2.
and a wire 30 fixed to the guide member above 0,
An embodiment of the present invention will be described in detail below based on the drawings.

In FIG. 2, which shows a cross section of an apparatus according to an embodiment of the present invention, and FIG. 3, which shows its top surface, the same components as in FIG. 1 are designated by the same numbers. 11
1 is a sample attached to the sample cylinder 1, and 12 is a sample moving table on which the guide member 3 is placed. The holding cylinder 2 is provided with V grooves A, B, and C. Balls 15 and 16 pushed in the direction of the grooves by springs 13 and 14 are inserted into the groove A, and grooves B and C are inserted into the groove A. Balls 17 and 18 are inserted into each of the retaining cylinders 2, so that the holding cylinder 2 can move only in the optical axis direction along the guide member 3. First and second pulleys 19 and 20 are attached to the holding cylinder 2 symmetrically with respect to the axis, and the guide member 3 has a first A third pulley 21 is attached above the pulley 19. Similarly, the guide member 3 has a fourth pulley for receiving the wire suspended from the second pulley.
A pulley 22 is arranged above the second pulley 20. 23 and 24 are fifth and sixth pulleys attached to the upper surface of the guide member 3.
Reference numeral 25 denotes a shaft that is arranged substantially horizontally in a plane equidistant from the first and second pulleys 19 and 20 and is rotatable only, and a threaded portion is provided at the tip of the shaft 25. A moving member 26 having a female threaded portion is screwed into the threaded portion. The moving member 26 can move along a guide 27 as the shaft 25 rotates. Moving member 26
A seventh pulley is fixed to. 29 is a notch provided in the guide to allow movement of the seventh pulley 28. 30 is a wire, one end of which is fixed to a metal piece 31 attached to the upper surface of the guide member 3. The wire 3
As shown in FIG. The wire is hung on the pulley 28 of
As in the case of 9 and 21, it is hung on the second pulley 20, and the other end is fixed to a metal piece 32 attached to the upper surface of the guide member 3.

In a device having such a configuration, if the moving member 26 is moved, for example, to the right in the drawing by rotating the shaft 25, the seventh pulley 28 will also move to the right accordingly, and the holding cylinder 2 will be pulled up. Conversely, if the shaft 25 is rotated and the seventh pulley 28 is moved to the left together with the moving member 26, the holding tube 2 is pulled down and the sample 11 can be moved up and down.

In the device of the present invention described above, the first,
A force for raising the holding cylinder 2 (or suspending the holding cylinder 2) from both sides with respect to the axis of the holding cylinder 2 is applied via the second pulleys 21 and 22,
Moreover, the forces from both sides are equal because the moving member 26 moves within a plane that is equidistant from the first and second pulleys 21 and 22. Therefore, since no force is applied to the holding tube 2 to rotate the holding tube 2 around the axis perpendicular to the optical axis 4, the holding tube 2 can be moved up and down along the guide member 3 smoothly and accurately. be able to.

[Brief explanation of the drawing]

FIG. 1 is a diagram for explaining a conventional device, FIG. 2 is a longitudinal sectional view of an embodiment of the device, and FIG. 3 is a plan view. 1: Sample cylinder, 2: Holding cylinder, 3: Guide member, 1
2: Sample moving table, 19, 20, 21, 22, 2
3, 24, 28: pulley, 25: shaft, 26: moving member, 30: wire.

Claims (1)

[Scope of utility model registration request] A first, which is attached to the holding cylinder 2 for holding the sample cylinder 1 so as to be symmetrical with respect to its axis;
a second pulley 19, 20, a guide member 3 for moving the holding tube along the optical axis 4, and a second pulley for receiving the wires placed on the first and second pulleys, respectively. The third and fourth pulleys 21 and 22 attached to the guide member above the pulleys are movable within a plane equidistant from the first and second pulleys in order to move the holding cylinder up and down. members 26, 28, one end of which is a first
The first pulley 19 and the third pulley 2 are fixed to the guide member above the pulley.
1, moving members 26, 28, fourth pulley 22,
A sample device for an electron microscope, comprising a wire 30 which is connected in order of the second pulley 20 and whose other end is fixed to the guide member above the second pulley 20.