JPS63160008A - Substrate for magnetic disk - Google Patents
Substrate for magnetic diskInfo
- Publication number
- JPS63160008A JPS63160008A JP30598686A JP30598686A JPS63160008A JP S63160008 A JPS63160008 A JP S63160008A JP 30598686 A JP30598686 A JP 30598686A JP 30598686 A JP30598686 A JP 30598686A JP S63160008 A JPS63160008 A JP S63160008A
- Authority
- JP
- Japan
- Prior art keywords
- aluminum alloy
- magnetic disk
- magnetic
- substrate
- aluminum nitride
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000000758 substrate Substances 0.000 title claims abstract description 19
- 229910000838 Al alloy Inorganic materials 0.000 claims abstract description 19
- PMHQVHHXPFUNSP-UHFFFAOYSA-M copper(1+);methylsulfanylmethane;bromide Chemical compound Br[Cu].CSC PMHQVHHXPFUNSP-UHFFFAOYSA-M 0.000 claims abstract description 16
- 238000005498 polishing Methods 0.000 abstract description 4
- 230000005415 magnetization Effects 0.000 abstract description 3
- 238000010438 heat treatment Methods 0.000 abstract description 2
- 238000000034 method Methods 0.000 description 10
- 239000010409 thin film Substances 0.000 description 8
- 238000004544 sputter deposition Methods 0.000 description 6
- 238000007747 plating Methods 0.000 description 5
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 4
- 238000001035 drying Methods 0.000 description 3
- 239000010408 film Substances 0.000 description 3
- 238000011282 treatment Methods 0.000 description 3
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 description 2
- 230000015572 biosynthetic process Effects 0.000 description 2
- 229910001873 dinitrogen Inorganic materials 0.000 description 2
- 230000001681 protective effect Effects 0.000 description 2
- QGZKDVFQNNGYKY-UHFFFAOYSA-N Ammonia Chemical compound N QGZKDVFQNNGYKY-UHFFFAOYSA-N 0.000 description 1
- 229910018104 Ni-P Inorganic materials 0.000 description 1
- 229910018487 Ni—Cr Inorganic materials 0.000 description 1
- 229910018536 Ni—P Inorganic materials 0.000 description 1
- 229910045601 alloy Inorganic materials 0.000 description 1
- 239000000956 alloy Substances 0.000 description 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
- 229910052782 aluminium Inorganic materials 0.000 description 1
- 229910052786 argon Inorganic materials 0.000 description 1
- 230000000052 comparative effect Effects 0.000 description 1
- 238000007796 conventional method Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 239000007789 gas Substances 0.000 description 1
- 238000009499 grossing Methods 0.000 description 1
- 239000011261 inert gas Substances 0.000 description 1
- 238000007689 inspection Methods 0.000 description 1
- 238000001755 magnetron sputter deposition Methods 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 229910052757 nitrogen Inorganic materials 0.000 description 1
- 230000003746 surface roughness Effects 0.000 description 1
- 238000007738 vacuum evaporation Methods 0.000 description 1
Landscapes
- Magnetic Record Carriers (AREA)
Abstract
Description
【発明の詳細な説明】
「産業上の利用分野」
この発明は磁気記録媒体の基板に関するものであり、特
に基板表面の硬度を高めた磁気ディスク用基板に関する
ものである。DETAILED DESCRIPTION OF THE INVENTION "Field of Industrial Application" The present invention relates to a substrate for a magnetic recording medium, and more particularly to a substrate for a magnetic disk in which the hardness of the substrate surface is increased.
「従来の技術」
周知のように、磁気ディスク装置は、コンピュータシス
テムでの記憶装置として、その重要性が年々高まってき
ており、使用磁気記録媒体の高記録密度化が要望されて
いる。このような点から、磁気記録媒体形成にメッキお
よびスパッタリング技術を用いて磁気記録媒体を形成し
た薄膜媒体（磁気ディスク）か注目を浴びている。"Prior Art" As is well known, the importance of magnetic disk devices as storage devices in computer systems is increasing year by year, and there is a demand for higher recording densities in the magnetic recording media used. From this point of view, thin film media (magnetic disks) in which magnetic recording media are formed using plating and sputtering techniques are attracting attention.
このような磁気ディスク用の基板としては、量産可能、
安価、軽舟であること、さらに、表面硬度、精度の高い
ことが要求され、本体材料にはアルミニウム合金を使用
し、これに下地層としてＮ１−Ｐをメッキしたものが多
ぐ用いられてきている。Substrates for such magnetic disks can be mass-produced.
They are required to be cheap, light, and have high surface hardness and precision, so aluminum alloy is used as the main body material, and N1-P is plated on this as the base layer. There is.
しかし、このＮ ｉ −Ｐメッキを施したアルミニウム
合金板は、表面性状は良いが、スバツタ工程（１５０〜
２５０℃に昇温）の加熱により磁性を帯びてしまう性質
（約１００°Ｃにて磁歪除去）があり、高記録密度化に
当たって問題になる。However, although this Ni-P plated aluminum alloy plate has good surface quality, it is difficult to process the sputtering process (150 to
It has the property of becoming magnetic (magnetostriction is removed at about 100°C) when heated to a temperature of 250°C, which poses a problem when increasing recording density.
さらに、このメッキ法により磁気記録媒体層を形成する
磁気ディスクの場合には、その基板処理にも同一技術の
Ｎ１−Ｐメッキを用いることが適していると言えるが、
スパッタ法により磁気記録媒体を形成する磁気ディスク
の場合には、その基板を湿式であるメッキ法により処理
することは、工程的には好ましいことではなく、できれ
ばスパッタ法等の乾式にて処理して、基板処理から記録
媒体処理の工程を乾式プロセスで一貫化することが望ま
れる。Furthermore, in the case of magnetic disks in which the magnetic recording medium layer is formed using this plating method, it can be said that it is suitable to use the same technology, N1-P plating, for the substrate treatment.
In the case of a magnetic disk whose magnetic recording medium is formed using a sputtering method, it is not preferable from a process standpoint to process the substrate using a wet plating method, and if possible, it is preferable to process it using a dry method such as a sputtering method. It is desirable to integrate the steps from substrate processing to recording medium processing using a dry process.
本発明は上記事情に鑑みてなされたしので、その目的は
、乾式プロセスにより形成され、加熱により磁性を帯び
ることがなく、表面硬度、精度の良好な磁気ディスク用
基板を提供することにある。The present invention has been made in view of the above circumstances, and its object is to provide a magnetic disk substrate that is formed by a dry process, does not become magnetic when heated, and has good surface hardness and precision.
「問題点を解決するための手段」
本発明者らは、上記の従来の問題点を解決すべく鋭意研
究した結果、アルミニウム合金板上に下地層として窒化
アルミニウムの層を形成することで問題点を解決できる
ことを見出だした。アルミニウム合金板上への窒化アル
ミニウム層形成は、スパッタリング、イオンブレーティ
ングおよび真空蒸着等を窒素ガス、アンモニアガスある
いは他の不活性ガスと窒素ガスとの混合ガスの雰囲気下
で実施することにより行なうことができる。"Means for Solving the Problems" As a result of intensive research to solve the above-mentioned conventional problems, the inventors of the present invention solved the problems by forming an aluminum nitride layer as a base layer on an aluminum alloy plate. We have found that we can solve the problem. Formation of an aluminum nitride layer on an aluminum alloy plate is performed by sputtering, ion blating, vacuum evaporation, etc. in an atmosphere of nitrogen gas, ammonia gas, or a mixed gas of other inert gas and nitrogen gas. I can do it.
以下、さらに詳細に説明する。This will be explained in more detail below.
本発明に係る磁気ディスク用基板は、アルミニウム合金
板上に上記の手法により窒化アルミニウムが１〜２０μ
肩程度に一様な厚みで付着させていることに特徴がある
。この形成された窒化アルミニウム届は硬度が高く、こ
れによりアルミニウム合金基板の表面硬度増加が過電さ
れる。この窒化アルミニウムの付着したアルミニウム合
金板の表面は研摩し、粗度を良化することができ、この
ような研摩による表面平滑化処理をすることが好ましい
。この窒化アルミニウム層の表面は硬度が高いため、研
摩することにより表面精度を向上させることができる。In the magnetic disk substrate according to the present invention, 1 to 20 μm of aluminum nitride is coated on an aluminum alloy plate by the above-described method.
It is distinctive in that it is attached with a uniform thickness around the shoulder area. The formed aluminum nitride layer has high hardness, which increases the surface hardness of the aluminum alloy substrate. The surface of the aluminum alloy plate to which aluminum nitride is attached can be polished to improve its roughness, and it is preferable to perform surface smoothing treatment by such polishing. Since the surface of this aluminum nitride layer has high hardness, the surface precision can be improved by polishing.
表面精度は平均粗度ｎａで０．００１〜０．００３μ肩
程度にすることが好ましい。上記各処理を施した窒化ア
ルミニウムを表面に有するアルミニウム合金板は、加熱
しても帯磁仕す、また、さらに、この処理板を基板とし
、その上に磁気記録媒体層を形成し、磁気ディスクとし
、磁気ヘッドと組み合わせて用いれば、磁気ディスク上
の磁気ヘッドの浮上性が良好となる。なお、この処理板
（磁気ディスク用基板）への磁性膜の形成は従来の方法
を利用すれば良い。また、保護膜の形成も従来例がすべ
て適用できる。The surface accuracy is preferably about 0.001 to 0.003μ in terms of average roughness na. An aluminum alloy plate having aluminum nitride on its surface that has been subjected to each of the above treatments becomes magnetized even when heated, and furthermore, this treated plate can be used as a substrate, a magnetic recording medium layer is formed on it, and a magnetic disk can be used. When used in combination with a magnetic head, the flying properties of the magnetic head on the magnetic disk are improved. Note that a conventional method may be used to form the magnetic film on this processing plate (magnetic disk substrate). Moreover, all conventional examples can be applied to the formation of the protective film.
以下、この発明を実施例に基づいて詳しく説明する。Hereinafter, this invention will be explained in detail based on examples.
「実施例 Ｉ」
順次、旋盤、研削、研摩により加工したアルミニウム合
金製ドーナッツ状円板（外径９５ｘｔｔ、内径２５ａｍ
、厚み１．２７ｘｘ）にアルミニウムターゲットの下で
マグネトロンスパッタによりアルゴン分圧５ Ｘ １０
’Ｔｏｒｒ、窒素分圧５ Ｘ １０−’Ｔｏｒｒの雰
囲気下で５μπの窒化アルミニウム薄膜を形成した。"Example I" An aluminum alloy donut-shaped disc (outer diameter 95 x tt, inner diameter 25 am) sequentially processed by lathe, grinding, and polishing.
, thickness 1.27xx) by magnetron sputtering under an aluminum target under an argon partial pressure of 5 x 10
An aluminum nitride thin film having a thickness of 5 μπ was formed in an atmosphere with a nitrogen partial pressure of 5×10−’ Torr.
このようにしてアルミニウム合金板上に形成した窒化ア
ルミニウム層の表面を約１μｇ化学研摩し、表面粗度を
Ｒａ＝ ０．００２５μｍに仕上げた。そして、この処
理基板を３２０℃に熱処理した後、磁気特性を測定した
ところ、帯磁せず、外部磁界５００００ｅの条件下での
飽和磁化Ｂｓは０．５Ｇ以下であった。The surface of the aluminum nitride layer thus formed on the aluminum alloy plate was chemically polished by approximately 1 μg to give a surface roughness of Ra=0.0025 μm. After heat treating this treated substrate at 320° C., its magnetic properties were measured, and it was found that it was not magnetized and the saturation magnetization Bs under the condition of an external magnetic field of 50,000 e was 0.5 G or less.
「比較例」
前記実施例１と同じアルミニウム合金製のドーナッツ状
円板上にＮ１−Ｐメッキを施し、下地層として１５μ次
のＮ１−Ｐ薄膜を形成した。さらに形成したＮ１−Ｐ薄
膜の表面を約２μｌ研摩し、表面ｆｆ１度をｎ ａ＝
０．００２５μ肩に仕上げた。"Comparative Example" N1-P plating was applied to a donut-shaped disk made of the same aluminum alloy as in Example 1, and a 15 μm-order N1-P thin film was formed as a base layer. Furthermore, the surface of the formed N1-P thin film was polished by approximately 2 μl, and the surface ff1 degree was n a =
Finished with a shoulder of 0.0025μ.
この処理基板を３２０℃に熱処理した後、磁気特性を測
定したところ、磁性を帯び、外部磁界５００００ｅ条件
下での飽和磁化Ｂｓは５２０Ｇであった。After heat-treating this treated substrate at 320° C., its magnetic properties were measured, and it was found to be magnetic, with a saturation magnetization Bs of 520 G under an external magnetic field of 50,000 e.
「実施例２」
実施例！と同じ方法で５μＩの窒化アルミニウム薄膜（
下地層）を表面に形成したアルミニウム合金製ドーナッ
ツ状円板上に、さらにスパッタリングによりＣｒ薄膜お
よびＧｏ−Ｎｉ−Ｃｒ合金薄膜（磁気記録媒体層）およ
びＣ薄膜（保護膜）を順次形成し、多層措造の磁気ディ
スクとした。“Example 2” Example! A 5μI aluminum nitride thin film (
A Cr thin film, a Go-Ni-Cr alloy thin film (magnetic recording medium layer), and a C thin film (protective film) are sequentially formed by sputtering on the aluminum alloy donut-shaped disk on which a base layer) is formed on the surface to form a multilayer It was made into a magnetic disk by Seizo.
この試作磁気ディスクを周知の磁気ディスク検査機バー
ニラシャーにより評価したところ３６００ｒｐｍの回転
条件でヘッドがディスクに接触することなく完全に浮上
した。When this prototype magnetic disk was evaluated using a well-known magnetic disk inspection machine Vernier Shear, the head completely flew up without contacting the disk under rotation conditions of 3600 rpm.
「発明の効果」
以上説明したように、本発明に係る磁気ディスク用基板
は、アルミニウム合金板上に下地層として乾式プロセス
による窒化アルミニウム厄を形成したことを特徴とする
ものであり、加熱により磁性を帯びることがなく、表面
硬度、精度に優れている。"Effects of the Invention" As explained above, the magnetic disk substrate according to the present invention is characterized by forming an aluminum nitride layer as a base layer on an aluminum alloy plate by a dry process, and it becomes magnetic by heating. It has excellent surface hardness and precision.
Claims (1)
層を形成したことを特徴とする磁気ディスク用基板。A magnetic disk substrate characterized in that an aluminum nitride layer is formed as a base layer on an aluminum alloy plate.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP30598686A JPS63160008A (en) | 1986-12-22 | 1986-12-22 | Substrate for magnetic disk |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP30598686A JPS63160008A (en) | 1986-12-22 | 1986-12-22 | Substrate for magnetic disk |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS63160008A true JPS63160008A (en) | 1988-07-02 |
Family
ID=17951692
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP30598686A Pending JPS63160008A (en) | 1986-12-22 | 1986-12-22 | Substrate for magnetic disk |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS63160008A (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6804822B2 (en) * | 2001-04-27 | 2004-10-12 | Sharp Kabushiki Kaisha | Magnetic recording medium and magnetic recording apparatus using same |
-
1986
- 1986-12-22 JP JP30598686A patent/JPS63160008A/en active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6804822B2 (en) * | 2001-04-27 | 2004-10-12 | Sharp Kabushiki Kaisha | Magnetic recording medium and magnetic recording apparatus using same |
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