JPH0426920A - Production of magnetic disk - Google Patents
Production of magnetic diskInfo
- Publication number
- JPH0426920A JPH0426920A JP13057990A JP13057990A JPH0426920A JP H0426920 A JPH0426920 A JP H0426920A JP 13057990 A JP13057990 A JP 13057990A JP 13057990 A JP13057990 A JP 13057990A JP H0426920 A JPH0426920 A JP H0426920A
- Authority
- JP
- Japan
- Prior art keywords
- substrate
- magnetic layer
- magnetic
- annealing treatment
- magnetic disk
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 230000005291 magnetic effect Effects 0.000 title claims abstract description 30
- 238000004519 manufacturing process Methods 0.000 title claims description 5
- 239000000758 substrate Substances 0.000 claims abstract description 39
- 238000000137 annealing Methods 0.000 claims abstract description 13
- 238000000034 method Methods 0.000 claims description 8
- 238000006243 chemical reaction Methods 0.000 abstract description 8
- 229910052782 aluminium Inorganic materials 0.000 abstract description 5
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 abstract description 5
- 229910018104 Ni-P Inorganic materials 0.000 abstract description 4
- 229910018536 Ni—P Inorganic materials 0.000 abstract description 4
- 239000011521 glass Substances 0.000 abstract description 3
- 238000007747 plating Methods 0.000 abstract description 3
- 238000007743 anodising Methods 0.000 abstract 1
- 239000010408 film Substances 0.000 description 8
- 239000000463 material Substances 0.000 description 5
- 230000000694 effects Effects 0.000 description 4
- 239000011248 coating agent Substances 0.000 description 3
- 238000000576 coating method Methods 0.000 description 3
- 230000005294 ferromagnetic effect Effects 0.000 description 3
- 238000010438 heat treatment Methods 0.000 description 2
- 239000000696 magnetic material Substances 0.000 description 2
- 229910052751 metal Inorganic materials 0.000 description 2
- 239000002184 metal Substances 0.000 description 2
- 238000004544 sputter deposition Methods 0.000 description 2
- 238000003860 storage Methods 0.000 description 2
- 239000010409 thin film Substances 0.000 description 2
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 1
- 229910020630 Co Ni Inorganic materials 0.000 description 1
- 229910002440 Co–Ni Inorganic materials 0.000 description 1
- 229910018106 Ni—C Inorganic materials 0.000 description 1
- 239000011230 binding agent Substances 0.000 description 1
- 239000000919 ceramic Substances 0.000 description 1
- 239000002131 composite material Substances 0.000 description 1
- 238000011161 development Methods 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 229910001873 dinitrogen Inorganic materials 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 238000002474 experimental method Methods 0.000 description 1
- 239000011261 inert gas Substances 0.000 description 1
- 238000004898 kneading Methods 0.000 description 1
- 239000006247 magnetic powder Substances 0.000 description 1
- 238000005259 measurement Methods 0.000 description 1
- 239000007769 metal material Substances 0.000 description 1
- 238000005457 optimization Methods 0.000 description 1
- 239000003973 paint Substances 0.000 description 1
- 238000012545 processing Methods 0.000 description 1
- 230000004043 responsiveness Effects 0.000 description 1
- 238000007740 vapor deposition Methods 0.000 description 1
Landscapes
- Manufacturing Of Magnetic Record Carriers (AREA)
Abstract
Description
【発明の詳細な説明】
(産業上の利用分野)
本発明は、いわゆるハードディスクの如き磁気ディスク
の製造方法に関するものである。DETAILED DESCRIPTION OF THE INVENTION (Field of Industrial Application) The present invention relates to a method of manufacturing a magnetic disk such as a so-called hard disk.
(従来の技術〕
アルミニウム基板やガラス基板等の剛性基板上に磁性層
を形成した、いわゆるハードディスクは応答性が優れて
いる、記憶容量が大きい、保存性が良好で信頬性が高い
等の特色を有するが、高密度記録化に伴なってさらに電
磁変換特性を改善することか要望されている。(Prior art) So-called hard disks, in which a magnetic layer is formed on a rigid substrate such as an aluminum substrate or a glass substrate, have characteristics such as excellent responsiveness, large storage capacity, good storage stability, and high reliability. However, with the trend towards higher density recording, there is a need to further improve the electromagnetic conversion characteristics.
そこで従来、ハードディスクの電磁変換特性を向上させ
るために、種々の研究がなされている。Therefore, various studies have been made in the past in order to improve the electromagnetic conversion characteristics of hard disks.
例えば、強磁性金属薄膜を製膜する際のスパッタ条件の
最適化や、磁性材料の選択、さらに基板表面形状の改良
、フライングハイドの微小化等である。For example, optimization of sputtering conditions when forming a ferromagnetic metal thin film, selection of magnetic materials, improvement of substrate surface shape, miniaturization of flying hides, etc.
しかしながら、例えば磁性材料に関しては開発し尽くさ
れた感があり、またフライングハイドの微小化を進める
とヘッドクラッシュの問題が発生する等、いずれの手法
も限界が見えてきた状態にある。また上述の手法では、
技術的に困難なわりには、大幅な効果は望めないのが実
情であり、何らかの新たな技術の開発が望まれている。However, for example, it seems that magnetic materials have been fully developed, and further miniaturization of flying hides causes the problem of head crushing, so the limits of each method are becoming apparent. Also, in the above method,
Although it is technically difficult, the reality is that no significant effects can be expected, and the development of some new technology is desired.
そこで本発明は、かかる従来の実情に鑑みて提塞された
ものであって、簡便な技術により電磁変換特性の改善を
図ることが可能な磁気ディスクの製造方法を提供するこ
とを目的とする。SUMMARY OF THE INVENTION The present invention has been made in view of the conventional situation, and an object of the present invention is to provide a method of manufacturing a magnetic disk that can improve electromagnetic conversion characteristics using a simple technique.
〔問題を解決するための手段]
本発明の磁気ディスクの製造方法は、上述の目的を達成
するために、剛性基板上に磁性層を形成した後、200
’C以上且つ基板に影響を及ぼさない温度でアニール
処理することを特徴とするものである。[Means for Solving the Problems] In order to achieve the above-mentioned object, the method for manufacturing a magnetic disk of the present invention includes forming a magnetic layer on a rigid substrate, and then
The method is characterized in that the annealing treatment is carried out at a temperature of 1.5 C or higher and that does not affect the substrate.
μsり性基板の材料としては、アルミニウム、ガラス、
セラミクス等通常のハードディスクの基板材料として用
いられているものがいずれも使用可能である。特にアル
ミニウム基板の場合には、その表面にN i −Pメツ
キを施したN i −Pメツキ基板や、表面を陽極酸化
して酸化被膜を形成したアルマイト基板等が好適である
。Materials for the μs-resistant substrate include aluminum, glass,
Any material used as a substrate material for ordinary hard disks, such as ceramics, can be used. In particular, in the case of an aluminum substrate, a Ni--P plated substrate whose surface is plated with Ni--P, an alumite substrate whose surface is anodized to form an oxide film, etc. are suitable.
一方、磁性層は、磁性粉を結合剤とともに混練した磁性
塗料を塗布することによって形成される磁性塗膜であっ
てもよいし、Co−Cr、Co−Ni、Co−Ni−C
r、Co−Cr−Ta等の強磁性金属材料を蒸着、スパ
ッタ、メツキ等の手法により直接成膜した強磁性金属薄
膜でもよい。On the other hand, the magnetic layer may be a magnetic coating film formed by applying a magnetic paint made by kneading magnetic powder with a binder, or may be a magnetic coating film formed by applying a magnetic coating material such as Co-Cr, Co-Ni, Co-Ni-C
A ferromagnetic metal thin film formed by directly forming a ferromagnetic metal material such as r, Co-Cr-Ta, etc. by a method such as vapor deposition, sputtering, or plating may be used.
後者の場合、Cr等の下地膜が形成されていてもよい。In the latter case, a base film of Cr or the like may be formed.
また、磁性層の厚さは、通常の範囲とすればよく、特に
限定されるものではない。Further, the thickness of the magnetic layer may be within a normal range and is not particularly limited.
本発明においてアニール処理を行なうには、剛性基板上
に磁性層を形成した後、大気中または窒素ガスなどの不
活性ガス雰囲気中で、0,5〜3時間加熱処理を行う。In the present invention, to perform annealing treatment, after forming a magnetic layer on a rigid substrate, heat treatment is performed for 0.5 to 3 hours in the air or in an inert gas atmosphere such as nitrogen gas.
アニール処理の温度は、ディスクの基板に影響を及ぼさ
ずに、最大の効果が得られる温度であることが望ましく
、基板の種類によってその温度は異なる。以下に、基板
によるアニール処理の最適温度を示すと、
N i −Pメツキ基板 200〜300℃ガラス基板
200〜400 ”Cアルマイト基板
200〜400 ℃である。いずれの場合も200℃
未満では、効果は得られない。また、ここでN i −
Pメツキ基板での処理温度の上限が、他の基板より低い
のは、N1−Pメツキ基板に熱により磁性を帯びる性質
があり、磁性層の特性に影響を及ぼす可能性があること
による。The temperature of the annealing process is preferably a temperature that provides the maximum effect without affecting the substrate of the disk, and the temperature varies depending on the type of substrate. The optimum temperature for annealing treatment depending on the substrate is shown below: Ni-P plated substrate 200~300℃ Glass substrate 200~400''C alumite substrate
The temperature is 200-400°C. 200℃ in both cases
If it is less than that, no effect will be obtained. Also, here N i −
The reason why the upper limit of the processing temperature for the P-plated substrate is lower than for other substrates is that the N1-P-plated substrate has a property of becoming magnetic due to heat, which may affect the characteristics of the magnetic layer.
[作用]
剛性基板上に磁性層を形成した後、200℃以上且つ基
板に影響を及ぼさない温度でアニール処理すると、未処
理のものと比較して電磁変換特性及び記録密度が向上す
る。[Function] After a magnetic layer is formed on a rigid substrate, annealing treatment at a temperature of 200° C. or higher that does not affect the substrate improves electromagnetic conversion characteristics and recording density compared to an untreated layer.
〔実施例] 以下、本発明を具体的な実験結果に基づいて説明する。〔Example] The present invention will be explained below based on specific experimental results.
実験に使用したサンプルディスクは、N1−Pメツキ膜
を下地とするA、 1基板上にさらにCr下地膜を介し
てCo −Cr系磁性膜をスパック成膜した磁気ディス
クで、保磁力Hcは1300(Oe)程度のものである
。The sample disk used in the experiment was a magnetic disk in which a Co-Cr based magnetic film was spun-coated on an A.1 substrate with an N1-P plating film as the base, and a Co-Cr based magnetic film was further deposited via a Cr base film, and the coercive force Hc was 1300. (Oe).
このサンプルディスクを、クリーンオーブン内で、30
0 ’C11時間加熱処理(アニール処理)を行った後
、電磁変換特性及び記録密度の測定を行った。また 比
較のために、アニール未処理のものについても測定を行
った。This sample disk was heated in a clean oven for 30 minutes.
After heat treatment (annealing) for 11 hours at 0'C, electromagnetic conversion characteristics and recording density were measured. For comparison, we also measured the unannealed material.
測定はメタル・イン・ギャップ(MIG)型のコンポジ
ソトヘンドを使用し、磁気ディスク回転数を3600r
pm、書き込み電流を48Amp−pとして行った。The measurement was carried out using a metal-in-gap (MIG) type composite magnet at a magnetic disk rotation speed of 3600 r.
pm, and the write current was set to 48 Amp-p.
各サンプルディスクの出力特性及び分解能を表1に、ま
た、オーバーライド特性(0/W)及びCN比の結果を
表2に示す。Table 1 shows the output characteristics and resolution of each sample disk, and Table 2 shows the results of the override characteristics (0/W) and CN ratio.
なお、表1中、LF及びHFはそれぞれ1.25MHz
、3.33MHzの信号に対する出力、また表2中、I
D及びODはそれぞれトランク半径1B、00mm位置
、30.tOmm位置におけるオーバーライI〜特性を
示している。In addition, in Table 1, LF and HF are each 1.25 MHz.
, the output for a 3.33MHz signal, and in Table 2, I
D and OD are trunk radius 1B, 00mm position, 30. The overlay I characteristic at the tOmm position is shown.
(以下余白)
表1
表2
ディスクをアニール処理することにより出力特性、分解
能、オーバーライド特性、CN比が改善されることがわ
かる。(Margins below) Table 1 Table 2 It can be seen that output characteristics, resolution, override characteristics, and CN ratio are improved by annealing the disk.
一方、第1図は記録密度と出力の関係を示している。一
般に全出力の50%の出力まで使用可能であると考えら
れており、その50%出力を示すD50での記録周波数
を比較すると、アニール処理を行った磁気ディスクは、
未処理のものと比べて高い値を示し、アニール処理によ
って磁気ディスクの記録密度が向上することがiI L
Eされた。On the other hand, FIG. 1 shows the relationship between recording density and output. It is generally considered that it is possible to use up to 50% of the total output, and when comparing the recording frequency at D50, which indicates 50% output, the annealed magnetic disk has
This value is higher than that of the untreated one, indicating that annealing improves the recording density of magnetic disks.
E was given.
以上の説明からも明らかなように、本発明では、磁気デ
ィスクをアニール処理するという簡便な手段で、磁気デ
ィスクの電磁変換特性、記録密度を改善することができ
る。As is clear from the above description, in the present invention, the electromagnetic conversion characteristics and recording density of a magnetic disk can be improved by a simple means of annealing the magnetic disk.
第1図は記録密度と出力の関係を示す特性図である。 FIG. 1 is a characteristic diagram showing the relationship between recording density and output.
Claims (1)
板に影響を及ぼさない温度でアニール処理することを特
徴とする磁気ディスクの製造方法。A method for manufacturing a magnetic disk, which comprises forming a magnetic layer on a rigid substrate and then performing an annealing treatment at a temperature of 200° C. or higher that does not affect the substrate.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP13057990A JPH0426920A (en) | 1990-05-21 | 1990-05-21 | Production of magnetic disk |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP13057990A JPH0426920A (en) | 1990-05-21 | 1990-05-21 | Production of magnetic disk |
Publications (1)
Publication Number | Publication Date |
---|---|
JPH0426920A true JPH0426920A (en) | 1992-01-30 |
Family
ID=15037598
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP13057990A Pending JPH0426920A (en) | 1990-05-21 | 1990-05-21 | Production of magnetic disk |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPH0426920A (en) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5759617A (en) * | 1996-05-20 | 1998-06-02 | Fujitsu Limited | Production process for a hard disk magnetic recording medium |
WO2002049015A1 (en) * | 2000-12-13 | 2002-06-20 | Showa Denko K.K. | Magnetic-disk substrate, and method for manufacturing the same |
-
1990
- 1990-05-21 JP JP13057990A patent/JPH0426920A/en active Pending
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5759617A (en) * | 1996-05-20 | 1998-06-02 | Fujitsu Limited | Production process for a hard disk magnetic recording medium |
WO2002049015A1 (en) * | 2000-12-13 | 2002-06-20 | Showa Denko K.K. | Magnetic-disk substrate, and method for manufacturing the same |
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