JPS63159289A - 液相エピタキシヤル成長方法及び成長装置 - Google Patents

液相エピタキシヤル成長方法及び成長装置

Info

Publication number
JPS63159289A
JPS63159289A JP30711486A JP30711486A JPS63159289A JP S63159289 A JPS63159289 A JP S63159289A JP 30711486 A JP30711486 A JP 30711486A JP 30711486 A JP30711486 A JP 30711486A JP S63159289 A JPS63159289 A JP S63159289A
Authority
JP
Japan
Prior art keywords
solution
epitaxial growth
liquid phase
phase epitaxial
substrate holder
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP30711486A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0580439B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html
Inventor
Tsunehiro Unno
恒弘 海野
Mineo Wajima
峰生 和島
Hisafumi Tate
尚史 楯
Taiichiro Konno
泰一郎 今野
Hiroshi Sugimoto
洋 杉本
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Cable Ltd
Original Assignee
Hitachi Cable Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Cable Ltd filed Critical Hitachi Cable Ltd
Priority to JP30711486A priority Critical patent/JPS63159289A/ja
Publication of JPS63159289A publication Critical patent/JPS63159289A/ja
Publication of JPH0580439B2 publication Critical patent/JPH0580439B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Crystals, And After-Treatments Of Crystals (AREA)
  • Liquid Deposition Of Substances Of Which Semiconductor Devices Are Composed (AREA)
JP30711486A 1986-12-23 1986-12-23 液相エピタキシヤル成長方法及び成長装置 Granted JPS63159289A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP30711486A JPS63159289A (ja) 1986-12-23 1986-12-23 液相エピタキシヤル成長方法及び成長装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP30711486A JPS63159289A (ja) 1986-12-23 1986-12-23 液相エピタキシヤル成長方法及び成長装置

Publications (2)

Publication Number Publication Date
JPS63159289A true JPS63159289A (ja) 1988-07-02
JPH0580439B2 JPH0580439B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1993-11-09

Family

ID=17965198

Family Applications (1)

Application Number Title Priority Date Filing Date
JP30711486A Granted JPS63159289A (ja) 1986-12-23 1986-12-23 液相エピタキシヤル成長方法及び成長装置

Country Status (1)

Country Link
JP (1) JPS63159289A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5922126A (en) * 1996-05-31 1999-07-13 Kabushiki Kaisha Toshiba Semiconductor liquid phase epitaxial growth method and apparatus, and its wafer holder
JP2010180085A (ja) * 2009-02-04 2010-08-19 Ihi Corp 基板ホルダ

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS53139970A (en) * 1977-05-13 1978-12-06 Sanyo Electric Co Ltd Liquid phase epitaxial growth method of gaas crystal
JPS59189621A (ja) * 1983-04-12 1984-10-27 Sharp Corp 液相エピタキシヤル成長装置

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS53139970A (en) * 1977-05-13 1978-12-06 Sanyo Electric Co Ltd Liquid phase epitaxial growth method of gaas crystal
JPS59189621A (ja) * 1983-04-12 1984-10-27 Sharp Corp 液相エピタキシヤル成長装置

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5922126A (en) * 1996-05-31 1999-07-13 Kabushiki Kaisha Toshiba Semiconductor liquid phase epitaxial growth method and apparatus, and its wafer holder
JP2010180085A (ja) * 2009-02-04 2010-08-19 Ihi Corp 基板ホルダ

Also Published As

Publication number Publication date
JPH0580439B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1993-11-09

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Legal Events

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LAPS Cancellation because of no payment of annual fees