JPS63157925U - - Google Patents
Info
- Publication number
- JPS63157925U JPS63157925U JP5033387U JP5033387U JPS63157925U JP S63157925 U JPS63157925 U JP S63157925U JP 5033387 U JP5033387 U JP 5033387U JP 5033387 U JP5033387 U JP 5033387U JP S63157925 U JPS63157925 U JP S63157925U
- Authority
- JP
- Japan
- Prior art keywords
- reference circle
- susceptor
- wafer
- radius
- vapor phase
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000001947 vapour-phase growth Methods 0.000 claims 2
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5033387U JPS63157925U (me) | 1987-04-02 | 1987-04-02 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5033387U JPS63157925U (me) | 1987-04-02 | 1987-04-02 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS63157925U true JPS63157925U (me) | 1988-10-17 |
Family
ID=30873601
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP5033387U Pending JPS63157925U (me) | 1987-04-02 | 1987-04-02 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS63157925U (me) |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5681951A (en) * | 1980-11-10 | 1981-07-04 | Toshiba Corp | Holder of semiconductor substrate |
-
1987
- 1987-04-02 JP JP5033387U patent/JPS63157925U/ja active Pending
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5681951A (en) * | 1980-11-10 | 1981-07-04 | Toshiba Corp | Holder of semiconductor substrate |