JPS6214735U - - Google Patents
Info
- Publication number
- JPS6214735U JPS6214735U JP10655585U JP10655585U JPS6214735U JP S6214735 U JPS6214735 U JP S6214735U JP 10655585 U JP10655585 U JP 10655585U JP 10655585 U JP10655585 U JP 10655585U JP S6214735 U JPS6214735 U JP S6214735U
- Authority
- JP
- Japan
- Prior art keywords
- wafer boat
- transporting
- openings
- edge portion
- utility
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Packaging Frangible Articles (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP10655585U JPS6214735U (me) | 1985-07-12 | 1985-07-12 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP10655585U JPS6214735U (me) | 1985-07-12 | 1985-07-12 |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS6214735U true JPS6214735U (me) | 1987-01-29 |
Family
ID=30982024
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP10655585U Pending JPS6214735U (me) | 1985-07-12 | 1985-07-12 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS6214735U (me) |
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1985
- 1985-07-12 JP JP10655585U patent/JPS6214735U/ja active Pending