JPS628636U - - Google Patents
Info
- Publication number
- JPS628636U JPS628636U JP10015585U JP10015585U JPS628636U JP S628636 U JPS628636 U JP S628636U JP 10015585 U JP10015585 U JP 10015585U JP 10015585 U JP10015585 U JP 10015585U JP S628636 U JPS628636 U JP S628636U
- Authority
- JP
- Japan
- Prior art keywords
- diameter
- chuck table
- wafer chuck
- porous portion
- wafer
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Jigs For Machine Tools (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10015585U JPS628636U (me) | 1985-07-02 | 1985-07-02 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10015585U JPS628636U (me) | 1985-07-02 | 1985-07-02 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS628636U true JPS628636U (me) | 1987-01-19 |
Family
ID=30969708
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP10015585U Pending JPS628636U (me) | 1985-07-02 | 1985-07-02 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS628636U (me) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR20150052181A (ko) * | 2012-08-31 | 2015-05-13 | 세미컨덕터 테크놀로지스 앤드 인스트루먼츠 피티이 엘티디 | 웨이퍼 및 필름 프레임 모두를 조작하기 위한 단일의 극평면성 웨이퍼 테이블 구조 |
-
1985
- 1985-07-02 JP JP10015585U patent/JPS628636U/ja active Pending
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR20150052181A (ko) * | 2012-08-31 | 2015-05-13 | 세미컨덕터 테크놀로지스 앤드 인스트루먼츠 피티이 엘티디 | 웨이퍼 및 필름 프레임 모두를 조작하기 위한 단일의 극평면성 웨이퍼 테이블 구조 |
| JP2015528643A (ja) * | 2012-08-31 | 2015-09-28 | セミコンダクター テクノロジーズ アンド インストゥルメンツ ピーティーイー リミテッド | ウェハー及びフィルムフレームの両方のための単一超平坦ウェハーテーブル構造 |
| US10312124B2 (en) | 2012-08-31 | 2019-06-04 | Semiconductor Technologies & Instruments Pte Ltd | Single ultra-planar wafer table structure for both wafers and film frames |