JPH0353834U - - Google Patents
Info
- Publication number
- JPH0353834U JPH0353834U JP11554089U JP11554089U JPH0353834U JP H0353834 U JPH0353834 U JP H0353834U JP 11554089 U JP11554089 U JP 11554089U JP 11554089 U JP11554089 U JP 11554089U JP H0353834 U JPH0353834 U JP H0353834U
- Authority
- JP
- Japan
- Prior art keywords
- stage plate
- view
- showing
- heater
- vapor phase
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000001947 vapour-phase growth Methods 0.000 claims description 3
- ZOKXTWBITQBERF-UHFFFAOYSA-N Molybdenum Chemical compound [Mo] ZOKXTWBITQBERF-UHFFFAOYSA-N 0.000 claims description 2
- 229910052750 molybdenum Inorganic materials 0.000 claims description 2
- 239000011733 molybdenum Substances 0.000 claims description 2
- 239000004065 semiconductor Substances 0.000 claims description 2
- 239000000463 material Substances 0.000 description 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11554089U JPH0353834U (me) | 1989-09-29 | 1989-09-29 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11554089U JPH0353834U (me) | 1989-09-29 | 1989-09-29 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0353834U true JPH0353834U (me) | 1991-05-24 |
Family
ID=31663867
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP11554089U Pending JPH0353834U (me) | 1989-09-29 | 1989-09-29 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0353834U (me) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2007305579A (ja) * | 2006-05-08 | 2007-11-22 | Wet Automotive Syst Ag | 平坦な発熱体 |
-
1989
- 1989-09-29 JP JP11554089U patent/JPH0353834U/ja active Pending
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2007305579A (ja) * | 2006-05-08 | 2007-11-22 | Wet Automotive Syst Ag | 平坦な発熱体 |
| JP4593587B2 (ja) * | 2006-05-08 | 2010-12-08 | ヴィー・エー・テー・オートモーティヴ・システムス・アクチェンゲゼルシャフト | 平坦な発熱体 |