JPS63157239U - - Google Patents
Info
- Publication number
- JPS63157239U JPS63157239U JP4857387U JP4857387U JPS63157239U JP S63157239 U JPS63157239 U JP S63157239U JP 4857387 U JP4857387 U JP 4857387U JP 4857387 U JP4857387 U JP 4857387U JP S63157239 U JPS63157239 U JP S63157239U
- Authority
- JP
- Japan
- Prior art keywords
- plasma
- mounting table
- projection hole
- extraction window
- width
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 230000005284 excitation Effects 0.000 claims description 2
- 238000000605 extraction Methods 0.000 claims 2
- 230000001105 regulatory effect Effects 0.000 claims 1
- 230000015572 biosynthetic process Effects 0.000 description 2
Landscapes
- Chemical Vapour Deposition (AREA)
- Physical Vapour Deposition (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4857387U JPS63157239U (enExample) | 1987-03-30 | 1987-03-30 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4857387U JPS63157239U (enExample) | 1987-03-30 | 1987-03-30 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS63157239U true JPS63157239U (enExample) | 1988-10-14 |
Family
ID=30870229
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP4857387U Pending JPS63157239U (enExample) | 1987-03-30 | 1987-03-30 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS63157239U (enExample) |
-
1987
- 1987-03-30 JP JP4857387U patent/JPS63157239U/ja active Pending
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