JPS63111750U - - Google Patents

Info

Publication number
JPS63111750U
JPS63111750U JP215387U JP215387U JPS63111750U JP S63111750 U JPS63111750 U JP S63111750U JP 215387 U JP215387 U JP 215387U JP 215387 U JP215387 U JP 215387U JP S63111750 U JPS63111750 U JP S63111750U
Authority
JP
Japan
Prior art keywords
voltage
emitter
accelerating
power source
electrode
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP215387U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0514452Y2 (enExample
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP215387U priority Critical patent/JPH0514452Y2/ja
Publication of JPS63111750U publication Critical patent/JPS63111750U/ja
Application granted granted Critical
Publication of JPH0514452Y2 publication Critical patent/JPH0514452Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Electron Sources, Ion Sources (AREA)
JP215387U 1987-01-10 1987-01-10 Expired - Lifetime JPH0514452Y2 (enExample)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP215387U JPH0514452Y2 (enExample) 1987-01-10 1987-01-10

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP215387U JPH0514452Y2 (enExample) 1987-01-10 1987-01-10

Publications (2)

Publication Number Publication Date
JPS63111750U true JPS63111750U (enExample) 1988-07-18
JPH0514452Y2 JPH0514452Y2 (enExample) 1993-04-16

Family

ID=30780724

Family Applications (1)

Application Number Title Priority Date Filing Date
JP215387U Expired - Lifetime JPH0514452Y2 (enExample) 1987-01-10 1987-01-10

Country Status (1)

Country Link
JP (1) JPH0514452Y2 (enExample)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2008034371A (ja) * 2006-07-06 2008-02-14 Hitachi High-Technologies Corp 集束イオンビーム装置
JP2008140557A (ja) * 2006-11-30 2008-06-19 Hitachi High-Technologies Corp ガス電界電離イオン源、及び走査荷電粒子顕微鏡
JP2012138360A (ja) * 2005-12-02 2012-07-19 Arisu Corporation:Kk イオン源、システム及び方法

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2012138360A (ja) * 2005-12-02 2012-07-19 Arisu Corporation:Kk イオン源、システム及び方法
JP2008034371A (ja) * 2006-07-06 2008-02-14 Hitachi High-Technologies Corp 集束イオンビーム装置
JP2008140557A (ja) * 2006-11-30 2008-06-19 Hitachi High-Technologies Corp ガス電界電離イオン源、及び走査荷電粒子顕微鏡

Also Published As

Publication number Publication date
JPH0514452Y2 (enExample) 1993-04-16

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