JPS63153527U - - Google Patents

Info

Publication number
JPS63153527U
JPS63153527U JP4556287U JP4556287U JPS63153527U JP S63153527 U JPS63153527 U JP S63153527U JP 4556287 U JP4556287 U JP 4556287U JP 4556287 U JP4556287 U JP 4556287U JP S63153527 U JPS63153527 U JP S63153527U
Authority
JP
Japan
Prior art keywords
plasma generation
generation chamber
grounded
chamber
plasma
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP4556287U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP4556287U priority Critical patent/JPS63153527U/ja
Publication of JPS63153527U publication Critical patent/JPS63153527U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Drying Of Semiconductors (AREA)
JP4556287U 1987-03-30 1987-03-30 Pending JPS63153527U (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP4556287U JPS63153527U (enrdf_load_stackoverflow) 1987-03-30 1987-03-30

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP4556287U JPS63153527U (enrdf_load_stackoverflow) 1987-03-30 1987-03-30

Publications (1)

Publication Number Publication Date
JPS63153527U true JPS63153527U (enrdf_load_stackoverflow) 1988-10-07

Family

ID=30864409

Family Applications (1)

Application Number Title Priority Date Filing Date
JP4556287U Pending JPS63153527U (enrdf_load_stackoverflow) 1987-03-30 1987-03-30

Country Status (1)

Country Link
JP (1) JPS63153527U (enrdf_load_stackoverflow)

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