JPS63153466U - - Google Patents

Info

Publication number
JPS63153466U
JPS63153466U JP4604787U JP4604787U JPS63153466U JP S63153466 U JPS63153466 U JP S63153466U JP 4604787 U JP4604787 U JP 4604787U JP 4604787 U JP4604787 U JP 4604787U JP S63153466 U JPS63153466 U JP S63153466U
Authority
JP
Japan
Prior art keywords
slit
holder
sample
ion source
utility
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP4604787U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP4604787U priority Critical patent/JPS63153466U/ja
Publication of JPS63153466U publication Critical patent/JPS63153466U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Electron Tubes For Measurement (AREA)
JP4604787U 1987-03-27 1987-03-27 Pending JPS63153466U (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP4604787U JPS63153466U (enrdf_load_stackoverflow) 1987-03-27 1987-03-27

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP4604787U JPS63153466U (enrdf_load_stackoverflow) 1987-03-27 1987-03-27

Publications (1)

Publication Number Publication Date
JPS63153466U true JPS63153466U (enrdf_load_stackoverflow) 1988-10-07

Family

ID=30865346

Family Applications (1)

Application Number Title Priority Date Filing Date
JP4604787U Pending JPS63153466U (enrdf_load_stackoverflow) 1987-03-27 1987-03-27

Country Status (1)

Country Link
JP (1) JPS63153466U (enrdf_load_stackoverflow)

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