JPS61202869U - - Google Patents
Info
- Publication number
- JPS61202869U JPS61202869U JP8816785U JP8816785U JPS61202869U JP S61202869 U JPS61202869 U JP S61202869U JP 8816785 U JP8816785 U JP 8816785U JP 8816785 U JP8816785 U JP 8816785U JP S61202869 U JPS61202869 U JP S61202869U
- Authority
- JP
- Japan
- Prior art keywords
- ion beam
- beam evaporation
- focal point
- lens
- evaporation apparatus
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000010884 ion-beam technique Methods 0.000 claims description 6
- 238000001704 evaporation Methods 0.000 claims description 4
- 230000008020 evaporation Effects 0.000 claims description 4
- 239000000758 substrate Substances 0.000 claims description 2
- 150000001875 compounds Chemical class 0.000 claims 1
- 230000005684 electric field Effects 0.000 claims 1
- 150000002500 ions Chemical class 0.000 claims 1
- 230000001678 irradiating effect Effects 0.000 claims 1
- 239000010409 thin film Substances 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 2
- 238000005452 bending Methods 0.000 description 1
- 238000000926 separation method Methods 0.000 description 1
Landscapes
- Physical Vapour Deposition (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8816785U JPS61202869U (enrdf_load_stackoverflow) | 1985-06-11 | 1985-06-11 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8816785U JPS61202869U (enrdf_load_stackoverflow) | 1985-06-11 | 1985-06-11 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS61202869U true JPS61202869U (enrdf_load_stackoverflow) | 1986-12-19 |
Family
ID=30641052
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP8816785U Pending JPS61202869U (enrdf_load_stackoverflow) | 1985-06-11 | 1985-06-11 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS61202869U (enrdf_load_stackoverflow) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0297664A (ja) * | 1988-09-30 | 1990-04-10 | Res Dev Corp Of Japan | 超高純度成膜装置 |
-
1985
- 1985-06-11 JP JP8816785U patent/JPS61202869U/ja active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0297664A (ja) * | 1988-09-30 | 1990-04-10 | Res Dev Corp Of Japan | 超高純度成膜装置 |
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