JPS61202869U - - Google Patents

Info

Publication number
JPS61202869U
JPS61202869U JP8816785U JP8816785U JPS61202869U JP S61202869 U JPS61202869 U JP S61202869U JP 8816785 U JP8816785 U JP 8816785U JP 8816785 U JP8816785 U JP 8816785U JP S61202869 U JPS61202869 U JP S61202869U
Authority
JP
Japan
Prior art keywords
ion beam
beam evaporation
focal point
lens
evaporation apparatus
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP8816785U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP8816785U priority Critical patent/JPS61202869U/ja
Publication of JPS61202869U publication Critical patent/JPS61202869U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Physical Vapour Deposition (AREA)
JP8816785U 1985-06-11 1985-06-11 Pending JPS61202869U (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP8816785U JPS61202869U (enrdf_load_stackoverflow) 1985-06-11 1985-06-11

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP8816785U JPS61202869U (enrdf_load_stackoverflow) 1985-06-11 1985-06-11

Publications (1)

Publication Number Publication Date
JPS61202869U true JPS61202869U (enrdf_load_stackoverflow) 1986-12-19

Family

ID=30641052

Family Applications (1)

Application Number Title Priority Date Filing Date
JP8816785U Pending JPS61202869U (enrdf_load_stackoverflow) 1985-06-11 1985-06-11

Country Status (1)

Country Link
JP (1) JPS61202869U (enrdf_load_stackoverflow)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0297664A (ja) * 1988-09-30 1990-04-10 Res Dev Corp Of Japan 超高純度成膜装置

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0297664A (ja) * 1988-09-30 1990-04-10 Res Dev Corp Of Japan 超高純度成膜装置

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