JPS63152237U - - Google Patents
Info
- Publication number
- JPS63152237U JPS63152237U JP4551187U JP4551187U JPS63152237U JP S63152237 U JPS63152237 U JP S63152237U JP 4551187 U JP4551187 U JP 4551187U JP 4551187 U JP4551187 U JP 4551187U JP S63152237 U JPS63152237 U JP S63152237U
- Authority
- JP
- Japan
- Prior art keywords
- control plate
- water
- large number
- semiconductor wafers
- carrier
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims description 10
- 235000012431 wafers Nutrition 0.000 claims description 8
- 238000004140 cleaning Methods 0.000 claims description 4
- 239000004065 semiconductor Substances 0.000 claims description 4
- 239000007788 liquid Substances 0.000 claims description 2
- 238000010586 diagram Methods 0.000 description 1
Landscapes
- Cleaning By Liquid Or Steam (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4551187U JPS63152237U (is) | 1987-03-26 | 1987-03-26 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4551187U JPS63152237U (is) | 1987-03-26 | 1987-03-26 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS63152237U true JPS63152237U (is) | 1988-10-06 |
Family
ID=30864309
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP4551187U Pending JPS63152237U (is) | 1987-03-26 | 1987-03-26 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS63152237U (is) |
-
1987
- 1987-03-26 JP JP4551187U patent/JPS63152237U/ja active Pending