JPS63118230U - - Google Patents
Info
- Publication number
- JPS63118230U JPS63118230U JP886187U JP886187U JPS63118230U JP S63118230 U JPS63118230 U JP S63118230U JP 886187 U JP886187 U JP 886187U JP 886187 U JP886187 U JP 886187U JP S63118230 U JPS63118230 U JP S63118230U
- Authority
- JP
- Japan
- Prior art keywords
- partition plate
- tank
- washing
- center
- washing water
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000005406 washing Methods 0.000 claims description 7
- 239000004065 semiconductor Substances 0.000 claims description 5
- 238000005192 partition Methods 0.000 claims description 4
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims 3
Landscapes
- Cleaning By Liquid Or Steam (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP886187U JPS63118230U (is) | 1987-01-23 | 1987-01-23 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP886187U JPS63118230U (is) | 1987-01-23 | 1987-01-23 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS63118230U true JPS63118230U (is) | 1988-07-30 |
Family
ID=30793636
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP886187U Pending JPS63118230U (is) | 1987-01-23 | 1987-01-23 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS63118230U (is) |
-
1987
- 1987-01-23 JP JP886187U patent/JPS63118230U/ja active Pending