JPH0470734U - - Google Patents
Info
- Publication number
- JPH0470734U JPH0470734U JP11416790U JP11416790U JPH0470734U JP H0470734 U JPH0470734 U JP H0470734U JP 11416790 U JP11416790 U JP 11416790U JP 11416790 U JP11416790 U JP 11416790U JP H0470734 U JPH0470734 U JP H0470734U
- Authority
- JP
- Japan
- Prior art keywords
- carrier
- processing liquid
- internal space
- liquid
- processing
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000007788 liquid Substances 0.000 claims description 7
- 238000012545 processing Methods 0.000 claims description 5
- 239000004065 semiconductor Substances 0.000 claims 1
- 239000000126 substance Substances 0.000 claims 1
- 235000012431 wafers Nutrition 0.000 claims 1
- 238000012993 chemical processing Methods 0.000 description 4
- 239000012050 conventional carrier Substances 0.000 description 1
Landscapes
- Weting (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11416790U JPH0470734U (is) | 1990-10-30 | 1990-10-30 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11416790U JPH0470734U (is) | 1990-10-30 | 1990-10-30 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0470734U true JPH0470734U (is) | 1992-06-23 |
Family
ID=31861830
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP11416790U Pending JPH0470734U (is) | 1990-10-30 | 1990-10-30 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0470734U (is) |
-
1990
- 1990-10-30 JP JP11416790U patent/JPH0470734U/ja active Pending