JPS63151607A - Production of fine aluminum nitride powder - Google Patents
Production of fine aluminum nitride powderInfo
- Publication number
- JPS63151607A JPS63151607A JP29958786A JP29958786A JPS63151607A JP S63151607 A JPS63151607 A JP S63151607A JP 29958786 A JP29958786 A JP 29958786A JP 29958786 A JP29958786 A JP 29958786A JP S63151607 A JPS63151607 A JP S63151607A
- Authority
- JP
- Japan
- Prior art keywords
- aluminum nitride
- nitride powder
- fine
- powder
- aln powder
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000000843 powder Substances 0.000 title claims abstract description 46
- PMHQVHHXPFUNSP-UHFFFAOYSA-M copper(1+);methylsulfanylmethane;bromide Chemical compound Br[Cu].CSC PMHQVHHXPFUNSP-UHFFFAOYSA-M 0.000 title claims description 43
- LFQSCWFLJHTTHZ-UHFFFAOYSA-N Ethanol Chemical compound CCO LFQSCWFLJHTTHZ-UHFFFAOYSA-N 0.000 claims abstract description 14
- KFZMGEQAYNKOFK-UHFFFAOYSA-N Isopropanol Chemical compound CC(C)O KFZMGEQAYNKOFK-UHFFFAOYSA-N 0.000 abstract description 11
- 238000005245 sintering Methods 0.000 abstract description 6
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 abstract description 4
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 abstract description 4
- 229910052799 carbon Inorganic materials 0.000 abstract description 4
- 239000001301 oxygen Substances 0.000 abstract description 4
- 229910052760 oxygen Inorganic materials 0.000 abstract description 4
- 239000012535 impurity Substances 0.000 abstract description 3
- 239000000463 material Substances 0.000 abstract description 3
- 239000002270 dispersing agent Substances 0.000 abstract description 2
- -1 isopropyl alcohol Chemical compound 0.000 abstract 1
- 239000002245 particle Substances 0.000 description 14
- 239000012756 surface treatment agent Substances 0.000 description 9
- 238000002156 mixing Methods 0.000 description 5
- LRHPLDYGYMQRHN-UHFFFAOYSA-N N-Butanol Chemical compound CCCCO LRHPLDYGYMQRHN-UHFFFAOYSA-N 0.000 description 4
- 230000000052 comparative effect Effects 0.000 description 4
- 238000000034 method Methods 0.000 description 4
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 3
- OKKJLVBELUTLKV-UHFFFAOYSA-N Methanol Chemical compound OC OKKJLVBELUTLKV-UHFFFAOYSA-N 0.000 description 3
- 150000001298 alcohols Chemical class 0.000 description 3
- 239000011230 binding agent Substances 0.000 description 3
- 230000006835 compression Effects 0.000 description 3
- 238000007906 compression Methods 0.000 description 3
- 239000002994 raw material Substances 0.000 description 3
- 239000000126 substance Substances 0.000 description 3
- AMQJEAYHLZJPGS-UHFFFAOYSA-N N-Pentanol Chemical compound CCCCCO AMQJEAYHLZJPGS-UHFFFAOYSA-N 0.000 description 2
- 239000000919 ceramic Substances 0.000 description 2
- MWKFXSUHUHTGQN-UHFFFAOYSA-N decan-1-ol Chemical compound CCCCCCCCCCO MWKFXSUHUHTGQN-UHFFFAOYSA-N 0.000 description 2
- 238000009837 dry grinding Methods 0.000 description 2
- 238000007580 dry-mixing Methods 0.000 description 2
- 230000005484 gravity Effects 0.000 description 2
- BXWNKGSJHAJOGX-UHFFFAOYSA-N hexadecan-1-ol Chemical compound CCCCCCCCCCCCCCCCO BXWNKGSJHAJOGX-UHFFFAOYSA-N 0.000 description 2
- ZSIAUFGUXNUGDI-UHFFFAOYSA-N hexan-1-ol Chemical compound CCCCCCO ZSIAUFGUXNUGDI-UHFFFAOYSA-N 0.000 description 2
- ZXEKIIBDNHEJCQ-UHFFFAOYSA-N isobutanol Chemical compound CC(C)CO ZXEKIIBDNHEJCQ-UHFFFAOYSA-N 0.000 description 2
- 238000005259 measurement Methods 0.000 description 2
- GLDOVTGHNKAZLK-UHFFFAOYSA-N octadecan-1-ol Chemical compound CCCCCCCCCCCCCCCCCCO GLDOVTGHNKAZLK-UHFFFAOYSA-N 0.000 description 2
- BDERNNFJNOPAEC-UHFFFAOYSA-N propan-1-ol Chemical compound CCCO BDERNNFJNOPAEC-UHFFFAOYSA-N 0.000 description 2
- 238000001179 sorption measurement Methods 0.000 description 2
- HLZKNKRTKFSKGZ-UHFFFAOYSA-N tetradecan-1-ol Chemical compound CCCCCCCCCCCCCCO HLZKNKRTKFSKGZ-UHFFFAOYSA-N 0.000 description 2
- 238000005303 weighing Methods 0.000 description 2
- 239000006087 Silane Coupling Agent Substances 0.000 description 1
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 description 1
- 238000009835 boiling Methods 0.000 description 1
- 239000001273 butane Substances 0.000 description 1
- 229940043430 calcium compound Drugs 0.000 description 1
- 150000001674 calcium compounds Chemical class 0.000 description 1
- 125000004432 carbon atom Chemical group C* 0.000 description 1
- 229960000541 cetyl alcohol Drugs 0.000 description 1
- 239000011248 coating agent Substances 0.000 description 1
- 238000000576 coating method Methods 0.000 description 1
- 238000011109 contamination Methods 0.000 description 1
- 238000001816 cooling Methods 0.000 description 1
- 239000007822 coupling agent Substances 0.000 description 1
- 238000005520 cutting process Methods 0.000 description 1
- 229910001873 dinitrogen Inorganic materials 0.000 description 1
- 239000002612 dispersion medium Substances 0.000 description 1
- 238000009826 distribution Methods 0.000 description 1
- LQZZUXJYWNFBMV-UHFFFAOYSA-N dodecan-1-ol Chemical compound CCCCCCCCCCCCO LQZZUXJYWNFBMV-UHFFFAOYSA-N 0.000 description 1
- 238000001035 drying Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 239000011261 inert gas Substances 0.000 description 1
- 229910052751 metal Inorganic materials 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 150000002736 metal compounds Chemical class 0.000 description 1
- 238000000465 moulding Methods 0.000 description 1
- 229940043348 myristyl alcohol Drugs 0.000 description 1
- IJDNQMDRQITEOD-UHFFFAOYSA-N n-butane Chemical compound CCCC IJDNQMDRQITEOD-UHFFFAOYSA-N 0.000 description 1
- GOQYKNQRPGWPLP-UHFFFAOYSA-N n-heptadecyl alcohol Natural products CCCCCCCCCCCCCCCCCO GOQYKNQRPGWPLP-UHFFFAOYSA-N 0.000 description 1
- OFBQJSOFQDEBGM-UHFFFAOYSA-N n-pentane Natural products CCCCC OFBQJSOFQDEBGM-UHFFFAOYSA-N 0.000 description 1
- 229910052757 nitrogen Inorganic materials 0.000 description 1
- 230000000704 physical effect Effects 0.000 description 1
- 238000001272 pressureless sintering Methods 0.000 description 1
- 238000010298 pulverizing process Methods 0.000 description 1
- 238000010079 rubber tapping Methods 0.000 description 1
- 238000007790 scraping Methods 0.000 description 1
- 238000004062 sedimentation Methods 0.000 description 1
- 238000005204 segregation Methods 0.000 description 1
- 238000007711 solidification Methods 0.000 description 1
- 230000008023 solidification Effects 0.000 description 1
- 238000003860 storage Methods 0.000 description 1
- 239000000758 substrate Substances 0.000 description 1
- 238000010998 test method Methods 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
- 150000003748 yttrium compounds Chemical class 0.000 description 1
Classifications
-
- C—CHEMISTRY; METALLURGY
- C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
- C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
- C04B35/00—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products
- C04B35/515—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on non-oxide ceramics
- C04B35/58—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on non-oxide ceramics based on borides, nitrides, i.e. nitrides, oxynitrides, carbonitrides or oxycarbonitrides or silicides
- C04B35/581—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on non-oxide ceramics based on borides, nitrides, i.e. nitrides, oxynitrides, carbonitrides or oxycarbonitrides or silicides based on aluminium nitride
Abstract
Description
【発明の詳細な説明】 産業上の利用分野 本発明は、窒化アルミニウム微粉末に関する。[Detailed description of the invention] Industrial applications The present invention relates to fine aluminum nitride powder.
従来の技術
窒化アルミニウム焼結体はアルミナの５〜１０倍に達す
る高い熱伝導率を有する絶縁性セラミックスであり、Ｉ
Ｃ基板用材や高温構造材用として利用されつつある。Conventional technology Aluminum nitride sintered bodies are insulating ceramics with high thermal conductivity reaching 5 to 10 times that of alumina.
It is being used as a material for C substrates and high-temperature structural materials.
窒化アルミニウム焼結体は、原料窒化アルミニウム粉末
を焼結助剤と混合後ホットプレス法によって焼結するか
または原料窒化アルミニウム粉末に焼結助剤、右別バイ
ンダー等を添加混合後成型し、脱バインダーを行い、次
いで不活性ガス中で常圧焼結又は加圧焼結してｌｙｊ造
される。Aluminum nitride sintered bodies are produced by mixing raw aluminum nitride powder with a sintering aid and then sintering it using a hot press method, or by adding and mixing a sintering aid, a separate binder, etc. to the raw aluminum nitride powder, and then molding it. A binder is applied, and then pressureless sintering or pressure sintering is performed in an inert gas to produce LYJ.
窒化アルミニウム焼結体の物性が原料窒化アルミニウム
粉末の特性に大きく依存することは周知である。原料窒
化アルミニウム粉末の粒度が粗い場合には十分な密度を
有する焼結体が得られず、強度、熱伝導率等多くの面で
窒化アルミニウムの優れた特性を引き出づことができな
い。このため、窒化アルミニウム粉末の粒度はより細い
ことが望ましい。しかしながら、平均粒子径が２．０μ
以下程度の微粒子になると粒子同志が万しく凝集、付着
する結果、流動性が極めて低下し、粉末の貯蔵。It is well known that the physical properties of aluminum nitride sintered bodies largely depend on the characteristics of the raw material aluminum nitride powder. If the particle size of the raw material aluminum nitride powder is coarse, a sintered body with sufficient density cannot be obtained, and the excellent properties of aluminum nitride cannot be brought out in many aspects such as strength and thermal conductivity. For this reason, it is desirable that the particle size of the aluminum nitride powder be finer. However, the average particle size is 2.0μ
When the particles become as fine as below, the particles tend to aggregate and adhere to each other, resulting in extremely low fluidity and storage of the powder.
計８．混合９ｗ！送などの工程において排出不能。Total 8. Mixed 9w! It cannot be discharged during processes such as transportation.
器壁への固着、偏析などの各種問題が生じる。Various problems such as sticking to the vessel wall and segregation occur.
窒化アルミニウム微粉末の流動性を改善すべく、種々の
有機物質からなる表面処理剤を粒子表面にコーティング
して粉末の表面物性を改善する方法が提案されている。In order to improve the fluidity of fine aluminum nitride powder, methods have been proposed in which the surface properties of the powder are improved by coating the surface of the particles with surface treatment agents made of various organic substances.
これらの有機物質は脱バインダ一工程で炭化せずに揮散
するものでなければならない。なぜならば、有機物質が
炭化して残留している窒化アルミニウム粉末を焼結さゼ
た場合には低い熱伝導率を有する焼結体しか得られない
からである。These organic substances must be able to be volatilized without being carbonized in one step of debinding. This is because if the organic substance is carbonized and the remaining aluminum nitride powder is sintered, only a sintered body with low thermal conductivity can be obtained.
また、脱バインダ一工程で窒化アルミニウムを酸化する
ような表面処理剤の使用は避けなければならないことは
勿論であるが、シランカップリング剤、ブタンカップリ
ング剤のような金属化合物からなる表面処理剤も脱バイ
ンダー”工程後金属成分が残留し、熱伝導率の低下を引
き起すので好ましくない。In addition, it goes without saying that the use of surface treatment agents that oxidize aluminum nitride in one step of debinding must be avoided, but surface treatment agents made of metal compounds such as silane coupling agents and butane coupling agents should be avoided. This is also undesirable because metal components remain after the binder removal process and cause a decrease in thermal conductivity.
発明が解決しようとする問題点
本発明の目的は、流動性に優れた窒化アルミニウム微粉
末を提供することにある。Problems to be Solved by the Invention An object of the present invention is to provide fine aluminum nitride powder with excellent fluidity.
本発明の目的は、窒化アルミニウム粉末の熱伝導性を低
下させることなく窒化アルミニウム粉末の流動性を改善
しうる表面処理剤を提供することにある。An object of the present invention is to provide a surface treatment agent that can improve the fluidity of aluminum nitride powder without reducing its thermal conductivity.
問題ユを解決するための手
本発明の特徴は、表面処理剤として少なくとも１種の１
価アルコールを用いて窒化アルミニウム粉末の表面に少
なくと６１種の１価アルコールを吸着させることにより
、窒化アルミニウム微粉末の流動性を改善することにあ
る。A feature of the present invention is that at least one type of surface treatment agent is used as a surface treatment agent.
The object of the present invention is to improve the fluidity of fine aluminum nitride powder by adsorbing at least 61 types of monohydric alcohols onto the surface of aluminum nitride powder using the alcohol.
１価アルコールとしては、炭素数１〜１８のアルコール
例えばメタノール、エタノール、ｎ−プロパツール、イ
ソプロパツール、ｎ−ブタノール。Examples of monohydric alcohols include alcohols having 1 to 18 carbon atoms, such as methanol, ethanol, n-propanol, isopropanol, and n-butanol.
イソブタノール、ペンタノール、ヘキサノール。Isobutanol, pentanol, hexanol.
オクタツール、デカノール、ラウリルアルコールミリス
チルアルコール、パルミチルアル］−ル。Octatool, decanol, lauryl alcohol, myristyl alcohol, palmityl alcohol.
ステアリルアルコール等を使用しうる。炭素数３〜１２
の１価アルコールを使用することが望ましく、水の混入
がなく沸点の低いアルコールを使用することが特に望ま
しい。Stearyl alcohol and the like can be used. Carbon number 3-12
It is desirable to use a monohydric alcohol, and it is particularly desirable to use an alcohol that is free from water contamination and has a low boiling point.
本発明の窒化アルミニウム微粉末では窒化アルミニウム
粉末の重量に対して０．０５〜３．０ｆｆｌ１１％の１
価アルコールが吸着されている。吸着量が０，０５重量
％未満では所望の流動性が得られず、吸＠最好ましくな
い。In the aluminum nitride fine powder of the present invention, 0.05 to 3.0 ffl11% of 1% of the weight of the aluminum nitride powder is used.
Alcohol is adsorbed. If the amount of adsorption is less than 0.05% by weight, the desired fluidity cannot be obtained and the adsorption is not the most preferable.
本発明の窒化アルミニウム微粉末は、所要ｍの少なくと
も１種の１価アルコールの共存下で窒化アルミニウム粉
末を乾式混合または乾式粉砕することによって１２され
得る。このとき、焼結助剤例えばイツトリウム化合物や
カルシウム化合物、分散剤等を共存させてもよい。The fine aluminum nitride powder of the present invention can be prepared by dry mixing or dry grinding aluminum nitride powder in the presence of a required amount of at least one monohydric alcohol. At this time, sintering aids such as yttrium compounds, calcium compounds, dispersants, etc. may be present.
宋−鷹一烈 本発明の非限定的実施例を示す。Song Dynasty - Taka Yi-rye 1 illustrates a non-limiting example of the invention.
（実施例 １）
平均粒子径５、５μの窒化アルミニウム粉末と０、５％
のイソプロピルアルコールを磁性ポットに入れ、振動ミ
ルにて１５時間粉砕した（振幅８Ｒ。(Example 1) Aluminum nitride powder with an average particle size of 5.5μ and 0.5%
of isopropyl alcohol was placed in a magnetic pot and ground in a vibrating mill for 15 hours (amplitude 8R).
ｖｐＩ１１１２０Ｏｒｌ）Ｉｌｌ ）。粉砕終了後の窒
化アルミニウム微粉末は非常に流動性に優れていた。vpI11120Orl)Ill). The fine aluminum nitride powder after pulverization had excellent fluidity.
〈実施例 ２）
平均粒子径２．０μの窒化アルミニウム粉末と１、０％
のｎ−ブタノールをＶ型ブレンダーにて５時間混合した
。混合終了後の窒化アルミニウム粉末は処理前の窒化ア
ルミニウム粉末に比べて著しく流動性に優れていた。<Example 2) Aluminum nitride powder with an average particle size of 2.0μ and 1.0%
of n-butanol was mixed in a V-type blender for 5 hours. The aluminum nitride powder after mixing had significantly better fluidity than the aluminum nitride powder before treatment.
（実施例 ３〜５）
平均粒子径５．５μの窒化アルミニウム粉末を用い、表
面処理剤の種類及び濃度を変えて実施例１と同様にして
振動ミルにて粉砕した。(Examples 3 to 5) Aluminum nitride powder having an average particle diameter of 5.5 μm was used and ground in a vibratory mill in the same manner as in Example 1, except that the type and concentration of the surface treatment agent were changed.
得られた窒化アルミニウム微粉末はいずれも非常に流動
性に優れていた。All of the obtained aluminum nitride fine powders had excellent fluidity.
（比較例 １）
実施例１で製造した０、５％のイソプロピルアルコール
を吸着させた窒化アルミニウム微粉末を大気中１０５℃
で３時間加熱乾燥させた。乾燥後の窒化アルミニウム微
粉末の流動性は著しく低下していた。(Comparative Example 1) Fine aluminum nitride powder adsorbed with 0.5% isopropyl alcohol produced in Example 1 was heated at 105°C in the air.
It was heated and dried for 3 hours. The fluidity of the aluminum nitride fine powder after drying was significantly reduced.
（比較例 ２）
実施例２で用いた平均粒子径２．０μの窒化アルミニウ
ム粉末のみを■型ブレングーにて実施例２と同様にして
混合した。混合終了後窒化アルミニウムの多くがブレン
ダー壁面へ付着しており、また流動性も極めて乏しいも
のであった。(Comparative Example 2) Only the aluminum nitride powder having an average particle diameter of 2.0 μm used in Example 2 was mixed in the same manner as in Example 2 using a ■-type blender. After the mixing was completed, most of the aluminum nitride adhered to the wall of the blender, and the fluidity was extremely poor.
（比較例 ３〜５）
平均粒子径５．５μの窒化アルミニウム粉末を用い、表
面処理剤の種類を変えて実施例１と同様にして振動ミル
にて粉砕した。(Comparative Examples 3 to 5) Aluminum nitride powder having an average particle size of 5.5 μm was used and ground in a vibratory mill in the same manner as in Example 1 except that the type of surface treatment agent was changed.
（実施例 ６）
上記実施例及び比較例で（ｑられた窒化アルミニウム微
粉末について、下記試験を行った。(Example 6) The following test was conducted on the aluminum nitride fine powder prepared in the above Examples and Comparative Examples.
試験結果を表に示す。The test results are shown in the table.
（試験項目及び試験方法）
■吸るｍ
■柳本製作所製元素分析装置ＣＨＮコーダーＭＴ−３型
で測定し、粉砕もしくは混合時に添加した表面処理剤の
聞に換惇して示す。(Test items and test methods) ■Suck m ■Measured using an elemental analyzer CHN coder MT-3 model manufactured by Yanagimoto Seisakusho, and is shown in terms of the surface treatment agent added during crushing or mixing.
■ 平均粒子径
窒化アルミニウム微粉末を分散媒中に超音波分散させた
後、■島）上製作所製遠心沈降式粒度分布測定装賀Ｓへ
−〇 Ｐ ２−２０型で測定した。(1) Average particle size After ultrasonically dispersing the aluminum nitride fine powder in a dispersion medium, (2) measuring the particle size using a centrifugal sedimentation type particle size distribution measurement model Soga S-P2-20 manufactured by Shima Kami Seisakusho.
■流動性
流動性の評価に圧縮度を測定した。圧縮度の値が低いほ
ど流動性は優れていることを示す。■Fluidity The degree of compression was measured to evaluate the fluidity. The lower the value of the degree of compression, the better the fluidity.
圧縮度Ｃは■細用粉体工学研究所のパウダーテスターＰ
Ｔ−Ｄ型を用い、ゆるみ見掛比重Ａと固め見掛比ｆｆ１
Ｐを測定し下記式にて算出した。The degree of compression C is ■Powder Tester P from the Fine Powder Engineering Research Institute.
Using T-D type, loose apparent specific gravity A and hardened apparent ratio ff1
P was measured and calculated using the following formula.
Ｃ＝１００（Ｐ−Ａ ） ／Ｐ ［％］ゆるみ
見掛比重は、直径５．０３Ｃｊ＋、高さ５．０３ＣＩＲ
（容積１００ｃｃ）の円筒容器へ２４メツシユの篩を通
して上方から均一に供給し、上面をすり切って秤量する
ことにより求めた。C=100(P-A)/P [%] Loose apparent specific gravity is diameter 5.03Cj+, height 5.03CIR
It was determined by uniformly feeding the sample from above into a cylindrical container (volume: 100 cc) through a 24-mesh sieve, cutting off the top surface, and weighing.
固め見掛比重は、上記容器の上に円筒のキャップをはめ
、この上縁まで粉末を加えて高さ １．８ｃ。The apparent density of solidification is 1.8c by placing a cylindrical cap on top of the container and adding powder up to the upper edge.
からのタッピングを１８０回行い、キャップを外して上
面をすり切って秤量することにより求めた。It was determined by tapping 180 times, removing the cap, scraping off the top surface, and weighing.
■脱脂性
窒化アルミニウム粉末１０ｇを磁性ルツボに入れ、窒素
ガス気流中室温から４００℃まで２０時間で昇温加熱し
た。室温まで約５時間で冷却した試料について残留炭素
Ｓ麿を■堀場製作所製［旧＾−２１１０型を用いて、ま
た酸素不純物濃度を同社製“セラミック中酸素、窒素分
析計Ｅ Ｍ Ｇ Ａ −２８００”を用いて測定した。(10 g of degreasable aluminum nitride powder was placed in a magnetic crucible and heated in a nitrogen gas stream from room temperature to 400° C. over 20 hours. After cooling the sample to room temperature for about 5 hours, residual carbon was measured using Horiba's old Model 2110, and the oxygen impurity concentration was measured using Horiba's Ceramic Oxygen and Nitrogen Analyzer EMG A-2800. ” was used for measurement.
＆貝Ｊυ引四
本発明では、０６０５〜３．０重量％の１価アルコール
を表面に吸着させることにより、非常に優れた流動性を
有する窒化アルミニウム微粉末を得ることができる。In the present invention, aluminum nitride fine powder having extremely excellent fluidity can be obtained by adsorbing 0605 to 3.0% by weight of monohydric alcohol on the surface.
加えて、本発明の窒化アルミニウム微粉末には残留炭素
や酸素不純物が殆んど含まれていないので、本発明の窒
化アルミニウム微粉末を原料として高い熱伝導率を有す
る焼結体を製造することができる。In addition, since the fine aluminum nitride powder of the present invention contains almost no residual carbon or oxygen impurities, it is possible to produce a sintered body with high thermal conductivity using the fine aluminum nitride powder of the present invention as a raw material. I can do it.
本発明の窒化アルミニウム微粉末は、１価アルコールの
共存下で窒化アルミニウム粉末を乾式混合または乾式粉
砕することにより穫めて簡単に且つ高い生産性で製造さ
れつる。The fine aluminum nitride powder of the present invention can be easily produced with high productivity by dry mixing or dry grinding aluminum nitride powder in the presence of a monohydric alcohol.
Claims (1)
〜３．０重量％が吸着していることを特徴とする窒化ア
ルミニウム微粉末。(1) At least one monohydric alcohol 0.05 on the surface
A fine aluminum nitride powder characterized in that ~3.0% by weight is adsorbed.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP61299587A JP2521072B2 (en) | 1986-12-16 | 1986-12-16 | Aluminum nitride fine powder |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP61299587A JP2521072B2 (en) | 1986-12-16 | 1986-12-16 | Aluminum nitride fine powder |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS63151607A true JPS63151607A (en) | 1988-06-24 |
| JP2521072B2 JP2521072B2 (en) | 1996-07-31 |
Family
ID=17874561
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP61299587A Expired - Lifetime JP2521072B2 (en) | 1986-12-16 | 1986-12-16 | Aluminum nitride fine powder |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP2521072B2 (en) |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH01164710A (en) * | 1987-12-21 | 1989-06-28 | Inax Corp | Method for stabilizing aluminum nitride powder |
| US5352424A (en) * | 1993-02-16 | 1994-10-04 | The Dow Chemical Company | Aluminum nitride powder having a reduced ammonia odor and a method for preparing the same |
| US5417887A (en) * | 1993-05-18 | 1995-05-23 | The Dow Chemical Company | Reduced viscosity, organic liquid slurries of aluminum nitride powder |
| JP2006326572A (en) * | 2005-04-28 | 2006-12-07 | Fujifilm Holdings Corp | Film forming method |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS616104A (en) * | 1984-06-19 | 1986-01-11 | Tokuyama Soda Co Ltd | Manufacture of aluminum nitride powder |
| JPS61275112A (en) * | 1985-05-30 | 1986-12-05 | Nec Corp | Recovering method for superfine aluminium nitride particle |
-
1986
- 1986-12-16 JP JP61299587A patent/JP2521072B2/en not_active Expired - Lifetime
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS616104A (en) * | 1984-06-19 | 1986-01-11 | Tokuyama Soda Co Ltd | Manufacture of aluminum nitride powder |
| JPS61275112A (en) * | 1985-05-30 | 1986-12-05 | Nec Corp | Recovering method for superfine aluminium nitride particle |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH01164710A (en) * | 1987-12-21 | 1989-06-28 | Inax Corp | Method for stabilizing aluminum nitride powder |
| US5352424A (en) * | 1993-02-16 | 1994-10-04 | The Dow Chemical Company | Aluminum nitride powder having a reduced ammonia odor and a method for preparing the same |
| US5417887A (en) * | 1993-05-18 | 1995-05-23 | The Dow Chemical Company | Reduced viscosity, organic liquid slurries of aluminum nitride powder |
| JP2006326572A (en) * | 2005-04-28 | 2006-12-07 | Fujifilm Holdings Corp | Film forming method |
Also Published As
| Publication number | Publication date |
|---|---|
| JP2521072B2 (en) | 1996-07-31 |
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