JPS63149973U - - Google Patents
Info
- Publication number
- JPS63149973U JPS63149973U JP4156187U JP4156187U JPS63149973U JP S63149973 U JPS63149973 U JP S63149973U JP 4156187 U JP4156187 U JP 4156187U JP 4156187 U JP4156187 U JP 4156187U JP S63149973 U JPS63149973 U JP S63149973U
- Authority
- JP
- Japan
- Prior art keywords
- boat
- compound semiconductor
- area
- growth
- carbon
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 claims description 4
- 229910052799 carbon Inorganic materials 0.000 claims description 4
- 150000001875 compounds Chemical class 0.000 claims 2
- 239000004065 semiconductor Substances 0.000 claims 2
- 235000012431 wafers Nutrition 0.000 claims 2
- GYHNNYVSQQEPJS-UHFFFAOYSA-N Gallium Chemical compound [Ga] GYHNNYVSQQEPJS-UHFFFAOYSA-N 0.000 description 1
- 229910052733 gallium Inorganic materials 0.000 description 1
- 229910052710 silicon Inorganic materials 0.000 description 1
- 239000010703 silicon Substances 0.000 description 1
Landscapes
- Liquid Deposition Of Substances Of Which Semiconductor Devices Are Composed (AREA)
- Crystals, And After-Treatments Of Crystals (AREA)
Description
第1図は本考案の一実施例の断面図、第2図は
その平面図である。第3図は本考案の他の実施例
の平面図である。第4図は従来のカーボンボート
の断面図、第5図はその平面図である。
1……カーボンボート、2……スライド板、3
……ウエハー、4……シリコンソース、5……多
結晶ソース、6……ガリウムソース。
FIG. 1 is a sectional view of an embodiment of the present invention, and FIG. 2 is a plan view thereof. FIG. 3 is a plan view of another embodiment of the present invention. FIG. 4 is a sectional view of a conventional carbon boat, and FIG. 5 is a plan view thereof. 1...Carbon boat, 2...Slide plate, 3
...Wafer, 4...Silicon source, 5...Polycrystalline source, 6...Gallium source.
Claims (1)
ピタキシヤル成長に使用するカーボンボートにお
いて、該ボートの形状を底面が前記化合物半導体
ウエハーの面積とほぼ同程度で煙突状の形状とし
たことを特徴とするエピタキシヤル成長用カーボ
ンボート。 A carbon boat used for epitaxial growth of compound semiconductor wafers used in a high-temperature furnace, characterized in that the bottom surface of the boat has a chimney-like shape with an area approximately equal to the area of the compound semiconductor wafer. Carbon boat for growth.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP4156187U JPS63149973U (en) | 1987-03-19 | 1987-03-19 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP4156187U JPS63149973U (en) | 1987-03-19 | 1987-03-19 |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS63149973U true JPS63149973U (en) | 1988-10-03 |
Family
ID=30856676
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP4156187U Pending JPS63149973U (en) | 1987-03-19 | 1987-03-19 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS63149973U (en) |
-
1987
- 1987-03-19 JP JP4156187U patent/JPS63149973U/ja active Pending