JPS63146478A - Electrode for carbon dioxide gas laser - Google Patents
Electrode for carbon dioxide gas laserInfo
- Publication number
- JPS63146478A JPS63146478A JP29228186A JP29228186A JPS63146478A JP S63146478 A JPS63146478 A JP S63146478A JP 29228186 A JP29228186 A JP 29228186A JP 29228186 A JP29228186 A JP 29228186A JP S63146478 A JPS63146478 A JP S63146478A
- Authority
- JP
- Japan
- Prior art keywords
- carbon dioxide
- dioxide gas
- laser
- electrode
- laser tube
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- CURLTUGMZLYLDI-UHFFFAOYSA-N Carbon dioxide Chemical compound O=C=O CURLTUGMZLYLDI-UHFFFAOYSA-N 0.000 title claims abstract description 39
- 229910002092 carbon dioxide Inorganic materials 0.000 title claims abstract description 19
- 239000001569 carbon dioxide Substances 0.000 title claims abstract description 19
- BASFCYQUMIYNBI-UHFFFAOYSA-N platinum Chemical group [Pt] BASFCYQUMIYNBI-UHFFFAOYSA-N 0.000 claims abstract description 8
- 239000002131 composite material Substances 0.000 claims description 13
- 229910052684 Cerium Inorganic materials 0.000 claims description 2
- GWXLDORMOJMVQZ-UHFFFAOYSA-N cerium Chemical compound [Ce] GWXLDORMOJMVQZ-UHFFFAOYSA-N 0.000 claims description 2
- 229910000314 transition metal oxide Inorganic materials 0.000 claims description 2
- 230000003647 oxidation Effects 0.000 abstract description 10
- 238000007254 oxidation reaction Methods 0.000 abstract description 10
- 230000003197 catalytic effect Effects 0.000 abstract description 8
- 230000000694 effects Effects 0.000 abstract description 4
- 239000000203 mixture Substances 0.000 abstract description 4
- 238000010494 dissociation reaction Methods 0.000 abstract description 3
- 230000005593 dissociations Effects 0.000 abstract description 3
- 150000001875 compounds Chemical class 0.000 abstract 4
- 238000007789 sealing Methods 0.000 abstract 2
- ZJRWDIJRKKXMNW-UHFFFAOYSA-N carbonic acid;cobalt Chemical compound [Co].OC(O)=O ZJRWDIJRKKXMNW-UHFFFAOYSA-N 0.000 abstract 1
- CETPSERCERDGAM-UHFFFAOYSA-N ceric oxide Chemical compound O=[Ce]=O CETPSERCERDGAM-UHFFFAOYSA-N 0.000 abstract 1
- 229910000422 cerium(IV) oxide Inorganic materials 0.000 abstract 1
- 229910000001 cobalt(II) carbonate Inorganic materials 0.000 abstract 1
- UBEWDCMIDFGDOO-UHFFFAOYSA-N cobalt(II,III) oxide Inorganic materials [O-2].[O-2].[O-2].[O-2].[Co+2].[Co+3].[Co+3] UBEWDCMIDFGDOO-UHFFFAOYSA-N 0.000 abstract 1
- 239000007789 gas Substances 0.000 description 8
- UGFAIRIUMAVXCW-UHFFFAOYSA-N Carbon monoxide Chemical compound [O+]#[C-] UGFAIRIUMAVXCW-UHFFFAOYSA-N 0.000 description 5
- 229910002091 carbon monoxide Inorganic materials 0.000 description 5
- 238000001816 cooling Methods 0.000 description 3
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 3
- 239000007864 aqueous solution Substances 0.000 description 2
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 2
- 239000003054 catalyst Substances 0.000 description 2
- 238000005470 impregnation Methods 0.000 description 2
- 238000000034 method Methods 0.000 description 2
- BVKZGUZCCUSVTD-UHFFFAOYSA-L Carbonate Chemical compound [O-]C([O-])=O BVKZGUZCCUSVTD-UHFFFAOYSA-L 0.000 description 1
- -1 PdCQ Chemical class 0.000 description 1
- 229910001361 White metal Inorganic materials 0.000 description 1
- 230000003247 decreasing effect Effects 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 150000002603 lanthanum Chemical class 0.000 description 1
- 229910052746 lanthanum Inorganic materials 0.000 description 1
- FZLIPJUXYLNCLC-UHFFFAOYSA-N lanthanum atom Chemical compound [La] FZLIPJUXYLNCLC-UHFFFAOYSA-N 0.000 description 1
- 229910000510 noble metal Inorganic materials 0.000 description 1
- 230000001590 oxidative effect Effects 0.000 description 1
- 229910052760 oxygen Inorganic materials 0.000 description 1
- 239000001301 oxygen Substances 0.000 description 1
- 229910052697 platinum Inorganic materials 0.000 description 1
- 150000003839 salts Chemical class 0.000 description 1
- 238000001179 sorption measurement Methods 0.000 description 1
- 238000004544 sputter deposition Methods 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 239000010969 white metal Substances 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
- H01S3/02—Constructional details
- H01S3/03—Constructional details of gas laser discharge tubes
- H01S3/038—Electrodes, e.g. special shape, configuration or composition
Abstract
Description
【発明の詳細な説明】 （産業上の利用分野） 本発明は、炭酸ガスレーザの電極に関するものである。[Detailed description of the invention] (Industrial application field) The present invention relates to an electrode for a carbon dioxide laser.
（従来技術及びその問題点）
レーザ媒質として炭酸ガスをレーザ管内に封入した封止
型炭酸ガスレーザ装置においては、炭酸ガス（Ｃｏ２）
が経時的に一酸化炭素（ＣＯ）と酸素（０）に解離し、
それに伴って出力も低下するという問題があった。そこ
でこれを防ぐために、レーザ管内にＣＯ酸化触媒作用の
ある物質を入れることが行なわれるようになってきた。(Prior art and its problems) In a sealed carbon dioxide laser device in which carbon dioxide is sealed in a laser tube as a laser medium, carbon dioxide (Co2)
dissociates into carbon monoxide (CO) and oxygen (0) over time,
There was a problem in that the output also decreased accordingly. In order to prevent this, it has become common practice to introduce a substance that has a CO oxidation catalytic effect into the laser tube.
ＣＯ酸化触媒として、白金（Ｐｔ）などの貴金属が触媒
能において高い活性を示すことが以前より知られている
。しかしこれらをレーザ電極として使用すると、放電に
よるスパッタリングが生じ、レーザ管内部のガスの吸着
や酸素の消費を引き起こし、ガス組成の変化を来すこと
になる。It has long been known that noble metals such as platinum (Pt) exhibit high catalytic activity as CO oxidation catalysts. However, when these are used as laser electrodes, sputtering occurs due to discharge, which causes adsorption of gas and consumption of oxygen inside the laser tube, resulting in changes in gas composition.
最近、上記問題点を解決するために、ランタン（Ｌａ）
系ペロブスカイト形複合酸化物を電極に使用した封止型
炭酸ガスレーザが開発されている。Recently, in order to solve the above problems, lantern (La)
Sealed carbon dioxide lasers using perovskite-type composite oxides as electrodes have been developed.
しかしＬａ系列の元素の中では、Ｌａは触媒活性が必ず
しも高いものではないことが判明した。However, it has been found that among the La series elements, La does not necessarily have high catalytic activity.
（発明の目的）
本発明は、ｃｏ酸化触媒活性の高い元素を含む電極を用
い、封止型炭酸ガスレーザの高効率化、長寿命化を目的
とするものである。(Objective of the Invention) The present invention aims at increasing the efficiency and extending the life of a sealed carbon dioxide laser by using an electrode containing an element with high co oxidation catalyst activity.
（発明の構成）
本発明の電極は、複合酸化物からなり、その複合酸化物
は少なくともセリウム（Ｃａ）酸化物と遷移金属酸化物
からなることを特徴とし、さらにその複合酸化物にＰｔ
、Ｐｄ等の白金族元素を含浸することを特徴としている
。(Structure of the Invention) The electrode of the present invention is made of a composite oxide, and the composite oxide is characterized in that the composite oxide is composed of at least a cerium (Ca) oxide and a transition metal oxide, and the composite oxide further includes Pt.
It is characterized by being impregnated with platinum group elements such as , Pd, etc.
（実施例）
図は、本発明の一実施例を示したもので、１は炭酸ガス
を封入したレーザ管、２は水冷ジャケット、３は陽極、
４は陰極である。(Example) The figure shows an example of the present invention, in which 1 is a laser tube filled with carbon dioxide gas, 2 is a water cooling jacket, 3 is an anode,
4 is a cathode.
ここで、陰極４が複合酸化物からなり、本実施例では、
ＣｅＯ，とＣｏ ＣＯｚを混合した後、１３００℃で焼
成し、３５０〜９５０℃の温度範囲、酸化雰囲気中で熱
処理することにより、Ｃｅ Ｏ、−Ｃｏ□０４複合酸化
物としたものである。ランタン系列元素酸化物の中でＣ
ｅＯ２は最大の酸化触媒能を持ち、導電率もイオン電導
によるが最高の値を示すので、従来使用されていたラン
タン系ペロジスカイト形酸化物電極よりＣ○酸化には有
利であり、封止型炭酸ガスレーザ用電極としては最適で
あると言える。Here, the cathode 4 is made of a composite oxide, and in this example,
After CeO, and Co COz are mixed, they are calcined at 1300°C and heat treated in an oxidizing atmosphere in a temperature range of 350 to 950°C to obtain a CeO, -Co□04 composite oxide. C in lanthanum series element oxides
Since eO2 has the highest oxidation catalytic ability and the highest electrical conductivity due to ionic conduction, it is more advantageous for C○ oxidation than the conventionally used lanthanum-based perodiskite oxide electrode, and it is a sealed type carbonate electrode. It can be said that it is optimal as an electrode for gas lasers.
さらに、前記複合酸化物中にｃｏ酸化触媒能の高い白金
族元素を含浸させると、より高い活性が期待でき、かつ
複合酸化物の導電率も増加させることが可能となる。こ
の含浸の方法としては、複合酸化物をＨ，ＰｔＣＱ、、
ＰｄＣＱ、等の白金属塩水溶液中に浸漬し、乾燥後、熱
処理するという方法が採用でき、水溶液のｐＨをコント
ロールするなどしてその含浸の状態を調整し、最適な電
極を得ることができる。Further, by impregnating the composite oxide with a platinum group element having a high co oxidation catalytic ability, higher activity can be expected, and it is also possible to increase the electrical conductivity of the composite oxide. This impregnation method involves mixing complex oxides with H, PtCQ,
A method can be adopted in which the electrode is immersed in an aqueous solution of a white metal salt such as PdCQ, dried, and then heat treated, and the impregnation state can be adjusted by controlling the pH of the aqueous solution to obtain an optimal electrode.
以上のように構成された複合酸化物からなる電極は高い
ＣＯ酸化触媒能を有するので、炭酸ガスの解離による出
力低下を防止することができ、また、レーザ管内のガス
組成を変化させることもない。Since the electrode made of the composite oxide configured as described above has a high CO oxidation catalytic ability, it is possible to prevent a decrease in output due to dissociation of carbon dioxide gas, and it does not change the gas composition in the laser tube. .
（発明の効果）
以上説明したように、本発明によれば、炭酸ガスの解離
による出力低下やレーザ管内のガス組成の変化が生じな
いので、封止型炭酸ガスレーザの高効率化、長寿命化を
達成することができる。(Effects of the Invention) As explained above, according to the present invention, there is no reduction in output due to dissociation of carbon dioxide gas and no change in the gas composition inside the laser tube, resulting in higher efficiency and longer life of the sealed carbon dioxide laser. can be achieved.
図は、本発明の一実施例のレーザ用電極を示す図である
。
１ ・・・ レーザ管、 ２ ・・・水冷ジャケット
、３ ・・・陽極、 ４・・・陰極。
特許出願人 東北リコー株式会社
リコ一応用電子研究所株式会社
１・・・レーデ皆
２・・・水冷佑ゲット
３・・・ 陽 権
４°°°１欠趣The figure is a diagram showing a laser electrode according to an embodiment of the present invention. 1... Laser tube, 2... Water cooling jacket, 3... Anode, 4... Cathode. Patent applicant: Tohoku Ricoh Co., Ltd. Ricoh Applied Electronics Research Institute Co., Ltd. 1...Rede Minna 2...Water Cooling Yuget 3...Yang Gon 4°°°1 Missing
Claims (2)
た封止型炭酸ガスレーザ装置において、前記レーザ管内
に配置された電極のうち、少なくとも一つの電極が複合
酸化物からなり、その複合酸化物は少なくともセリウム
（Ｃｅ）酸化物と遷移金属酸化物からなることを特徴と
する炭酸ガスレーザ用電極。(1) In a sealed carbon dioxide laser device in which carbon dioxide gas is sealed in a laser tube as a laser medium, at least one of the electrodes arranged in the laser tube is made of a composite oxide, and the composite oxide is at least An electrode for a carbon dioxide laser, characterized by comprising cerium (Ce) oxide and a transition metal oxide.
とを特徴とする特許請求の範囲第（１）項記載の炭酸ガ
スレーザ用電極。(2) The electrode for a carbon dioxide laser according to claim (1), wherein the composite oxide is impregnated with a platinum group element.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP29228186A JPS63146478A (en) | 1986-12-10 | 1986-12-10 | Electrode for carbon dioxide gas laser |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP29228186A JPS63146478A (en) | 1986-12-10 | 1986-12-10 | Electrode for carbon dioxide gas laser |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS63146478A true JPS63146478A (en) | 1988-06-18 |
Family
ID=17779719
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP29228186A Pending JPS63146478A (en) | 1986-12-10 | 1986-12-10 | Electrode for carbon dioxide gas laser |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS63146478A (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH02103973A (en) * | 1988-10-13 | 1990-04-17 | Toshiba Corp | Pulsed-laser oscillating apparatus |
Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS58183947A (en) * | 1982-04-20 | 1983-10-27 | Matsushita Electric Ind Co Ltd | Catalyst for purifying exhaust gas |
| JPS5992022A (en) * | 1982-10-18 | 1984-05-28 | ユニバ−サル−マシ−・プロダクツ・リミテイド | Oxidation catalyst |
| JPS60166038A (en) * | 1984-02-06 | 1985-08-29 | Matsushita Electric Ind Co Ltd | Manufacture of oxidizing catalyst for catalytic combustion |
| JPS61119083A (en) * | 1984-11-15 | 1986-06-06 | Matsushita Electric Ind Co Ltd | Sealed type carbon dioxide laser |
| JPS61226984A (en) * | 1985-03-30 | 1986-10-08 | Japan Radio Co Ltd | Sealed-off type carbon dioxide gas laser oscillating tube |
-
1986
- 1986-12-10 JP JP29228186A patent/JPS63146478A/en active Pending
Patent Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS58183947A (en) * | 1982-04-20 | 1983-10-27 | Matsushita Electric Ind Co Ltd | Catalyst for purifying exhaust gas |
| JPS5992022A (en) * | 1982-10-18 | 1984-05-28 | ユニバ−サル−マシ−・プロダクツ・リミテイド | Oxidation catalyst |
| JPS60166038A (en) * | 1984-02-06 | 1985-08-29 | Matsushita Electric Ind Co Ltd | Manufacture of oxidizing catalyst for catalytic combustion |
| JPS61119083A (en) * | 1984-11-15 | 1986-06-06 | Matsushita Electric Ind Co Ltd | Sealed type carbon dioxide laser |
| JPS61226984A (en) * | 1985-03-30 | 1986-10-08 | Japan Radio Co Ltd | Sealed-off type carbon dioxide gas laser oscillating tube |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH02103973A (en) * | 1988-10-13 | 1990-04-17 | Toshiba Corp | Pulsed-laser oscillating apparatus |
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