JPH02103973A - Pulsed-laser oscillating apparatus - Google Patents
Pulsed-laser oscillating apparatusInfo
- Publication number
- JPH02103973A JPH02103973A JP25578288A JP25578288A JPH02103973A JP H02103973 A JPH02103973 A JP H02103973A JP 25578288 A JP25578288 A JP 25578288A JP 25578288 A JP25578288 A JP 25578288A JP H02103973 A JPH02103973 A JP H02103973A
- Authority
- JP
- Japan
- Prior art keywords
- platinum
- preparatory
- main electrodes
- discharge
- gold
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- BASFCYQUMIYNBI-UHFFFAOYSA-N platinum Chemical compound [Pt] BASFCYQUMIYNBI-UHFFFAOYSA-N 0.000 claims abstract description 32
- 229910052697 platinum Inorganic materials 0.000 claims abstract description 13
- 239000010931 gold Substances 0.000 claims abstract description 12
- 239000000463 material Substances 0.000 claims abstract description 10
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 claims abstract description 8
- 229910052737 gold Inorganic materials 0.000 claims abstract description 8
- 230000010355 oscillation Effects 0.000 claims description 9
- 239000007789 gas Substances 0.000 abstract description 13
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 abstract description 10
- 239000001301 oxygen Substances 0.000 abstract description 10
- 229910052760 oxygen Inorganic materials 0.000 abstract description 10
- 230000001590 oxidative effect Effects 0.000 abstract description 2
- 230000007423 decrease Effects 0.000 description 2
- 238000007254 oxidation reaction Methods 0.000 description 2
- 238000011144 upstream manufacturing Methods 0.000 description 2
- 239000002699 waste material Substances 0.000 description 2
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
- 229910052782 aluminium Inorganic materials 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000010891 electric arc Methods 0.000 description 1
- 230000001404 mediated effect Effects 0.000 description 1
- 239000012528 membrane Substances 0.000 description 1
- 230000003287 optical effect Effects 0.000 description 1
- 230000003647 oxidation Effects 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
- H01S3/02—Constructional details
- H01S3/03—Constructional details of gas laser discharge tubes
- H01S3/038—Electrodes, e.g. special shape, configuration or composition
Abstract
Description
【発明の詳細な説明】
（発明の目的〕
（産業上の利用分野）
本発明は、パルスレーザ発振装置に係り、とくに放電部
の予備電離ピンに関する。DETAILED DESCRIPTION OF THE INVENTION (Objective of the Invention) (Industrial Application Field) The present invention relates to a pulsed laser oscillation device, and particularly to a pre-ionization pin of a discharge section.
（従来の技術）
ガスを媒介としたレーザにおいて、良好なレーザ発振を
得るためには、レーザガス中で空間的に均一な放電を必
要とするが、ＴＥＭＡ−ＣＯ２し一ザやエキシマレーザ
などの短パルスレーデ光を発生させるパルスレーザ発（
膜装置においては、その動作ガス圧力が放気圧もの高圧
力でおるため、上記の放電が集束し、アーク放電になり
やすい。(Prior art) In order to obtain good laser oscillation in a gas-mediated laser, a spatially uniform discharge is required in the laser gas, but short-circuit lasers such as TEMA-CO2 lasers and excimer lasers Pulsed laser emission that generates pulsed laser light (
In a membrane device, since the operating gas pressure is higher than the discharge pressure, the above-mentioned discharge tends to converge and become arc discharge.
これを防止するために、主放電に先立って予備電離を行
うのが普通である。To prevent this, it is common to perform preliminary ionization prior to the main discharge.
従来のパルスレーザ装置は、主電極に対向した位置に主
電極を配置し、その両側に複数個の予備電離ピンが配置
されている。このエルコナイト製の予備電離ピンによっ
て、主電極間に均一なグロー放電を発生させることが可
能となる。In a conventional pulse laser device, a main electrode is arranged at a position facing the main electrode, and a plurality of pre-ionization pins are arranged on both sides of the main electrode. This pre-ionization pin made of Elconite makes it possible to generate a uniform glow discharge between the main electrodes.
（発明が解決しようとする課題）
しかしながら、上記のような構成を有する従来のパルス
レーザ発振装置においては、以下に述べるような解決す
べき課題があった。(Problems to be Solved by the Invention) However, in the conventional pulsed laser oscillation device having the above configuration, there were problems to be solved as described below.
即ち、放電によりレーザガス媒質のＣＯ２が分解して生
じる酸素の存在比が増加するとレーク“出力が低下する
という欠点があった。That is, there has been a drawback that when the abundance ratio of oxygen generated by decomposing CO2 in the laser gas medium due to discharge increases, the rake output decreases.
本発明は以上の欠点を解消するために提案されたもので
、その目的は、放電ピンの材質を改めることにより、放
電によって発生する酸素の存在比の増加を抑え、効率よ
く安定した大出力レーザ光を得ることができるパルスレ
ーザ発振装置を提供することにおる。The present invention was proposed in order to eliminate the above-mentioned drawbacks.The purpose of the present invention is to suppress the increase in the abundance ratio of oxygen generated by discharge by changing the material of the discharge pin, and to achieve an efficient and stable high-output laser. The object of the present invention is to provide a pulsed laser oscillation device that can obtain light.
（発明の溝成）
（課題を解決するだめの手段）
本発明は、レーザガス中に配設され、レーザ光軸を長手
方向とする一対の主電極を有し、前記主電極の測部に予
備電離ピンを設け、前記主電極間の主放電空間を予備電
離するパルスレーザ発振装置において、前記予備電離ピ
ンの材質を金Ａｕあるいは白金Ｐ↑としたものである。(Measures of the Invention) (Means for Solving the Problems) The present invention has a pair of main electrodes disposed in a laser gas and whose longitudinal direction is the laser optical axis, and a measuring section of the main electrodes has a spare part. In the pulsed laser oscillation device that is provided with an ionization pin and pre-ionizes the main discharge space between the main electrodes, the material of the pre-ionization pin is gold Au or platinum P↑.
（作 用）
本発明のパルスレーザ発振装置によれば、主放電部を予
（ｉｉ１ｉ電離するために設（プられている予備電離ピ
ンの材質をＡＩＪまたはＰｔとすることにより、レーザ
ガス中のＣＯを酸化ざＶて酸素を消費することができる
ので、ガスリサイクラーなどのような大きな装置を用い
ることなく、容易に安定したレーザ出力を得ることがで
きる。(Function) According to the pulsed laser oscillation device of the present invention, by using AIJ or Pt as the material of the pre-ionization pin provided for pre-ionizing the main discharge region, CO in the laser gas can be reduced. Since oxygen can be consumed by oxidizing, stable laser output can be easily obtained without using large equipment such as a gas recycler.
（実施例）
以下に、本発明の一実施例を図に基づいて具体した主電
極１，２の側部に白金Ｐｔ４４の予備電離ピン３，４が
配設され、ガス流５が主電極の長手方向に対して垂直方
向に流れている。このように、放電部の近くに予備電離
ピンの材質として白金Ｐｔを用いることにより、放電に
よって生じる酸素を効率よく消費することができる。(Embodiment) An embodiment of the present invention will be explained below based on the drawings. Pre-ionization pins 3 and 4 made of platinum Pt44 are arranged on the sides of the main electrodes 1 and 2, and the gas flow 5 is directed to the main electrodes. The flow is perpendicular to the longitudinal direction. In this way, by using platinum Pt as the material of the pre-ionization pin near the discharge section, oxygen generated by discharge can be efficiently consumed.
また、対向した主電極１．２の側部に金ＡＵ製の予備電
離ピンを配設し、カス流が主電極の長手方向に対して垂
直方向に流れるようにしてもよい。Furthermore, preliminary ionization pins made of gold AU may be arranged on the sides of the opposing main electrodes 1.2 so that the waste stream flows perpendicularly to the longitudinal direction of the main electrodes.
このように、放電部の近くに予備電離ピンの材質として
金Ａｕを用いることにより、白金Ｐｔと比べて低いピン
の温度でＣＯの酸化作用を起こすため、白金Ｐｔよりも
高効率で酸素を消費することができる。In this way, by using gold (Au) as the material for the pre-ionization pin near the discharge area, CO oxidation occurs at a pin temperature lower than that of platinum (Pt), so it consumes oxygen more efficiently than platinum (Pt). can do.
更に、対向した主電極の側部に白金Ｐｔ製の予備電離ピ
ンを放電部に対してガス流の上流側に配［直し、金Ａｕ
製の予備電離ピンを放電部に対してカス流の下流側に配
置するようにしている。ガス流は主型４への長手方向に
対して垂直方向に流れている。金へＵは一般に酸素が活
性な状態におるとぎに酸化反応を起こさせやすいので、
高効率で酸素を消費することができる。Furthermore, pre-ionization pins made of platinum (Pt) were placed on the sides of the opposing main electrodes on the upstream side of the gas flow with respect to the discharge section.
A pre-ionization pin made of aluminum is placed on the downstream side of the waste flow with respect to the discharge section. The gas flow is perpendicular to the longitudinal direction of the main mold 4. Since U generally tends to cause an oxidation reaction when oxygen is active,
It can consume oxygen with high efficiency.
［発明の効果〕
以上述べたように、本発明によれば、主放電部の両側に
設置する予備電離用のピンの材質を金Ａｕまたは白金Ｐ
ｔにすることにより、レーザの出力低下の原因となる酸
素の量を低減し、安定したレーザ出力を得られるパルス
レーザ発振装置を提供することができる。[Effects of the Invention] As described above, according to the present invention, the material of the pre-ionization pins installed on both sides of the main discharge section is gold (Au) or platinum (P).
By setting it to t, it is possible to reduce the amount of oxygen that causes a decrease in laser output, and to provide a pulsed laser oscillation device that can obtain stable laser output.
第１図は本発明の一実施例を示す要部拡大図である。 １・・・主電極 ２・・・主電極 ３・・・予備電離ピン（上流側） ４・・・予備電離ピン（下流側） ５・・・ガス流 FIG. 1 is an enlarged view of essential parts showing an embodiment of the present invention. 1... Main electrode 2...Main electrode 3...Preliminary ionization pin (upstream side) 4...Preliminary ionization pin (downstream side) 5...Gas flow
Claims (1)
極間に生じるグロー放電により放電部のレーザ媒質ガス
を励起し、レーザ出力するパルスレーザ装置において、 予備電離ピンの材質として白金Ｐｔ又は金Ａｕを用いた
ことを特徴とするパルスレーザ発振装置。[Scope of Claim] In a pulse laser device that applies a high voltage between a pair of main electrodes arranged opposite each other, and excites a laser medium gas in a discharge part by a glow discharge generated between the two electrodes to output a laser, a pre-ionization pin is provided. A pulsed laser oscillation device characterized in that platinum Pt or gold Au is used as a material of the pulse laser oscillation device.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP25578288A JPH02103973A (en) | 1988-10-13 | 1988-10-13 | Pulsed-laser oscillating apparatus |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP25578288A JPH02103973A (en) | 1988-10-13 | 1988-10-13 | Pulsed-laser oscillating apparatus |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH02103973A true JPH02103973A (en) | 1990-04-17 |
Family
ID=17283556
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP25578288A Pending JPH02103973A (en) | 1988-10-13 | 1988-10-13 | Pulsed-laser oscillating apparatus |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH02103973A (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE4233634A1 (en) * | 1992-10-06 | 1994-04-14 | Lambda Physik Gmbh | Pre-ionising and/or discharge laser - has at least one anode and cathode with different materials having different standard electrode potentials |
Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS58103186A (en) * | 1981-12-16 | 1983-06-20 | Nec Corp | Rf discharge carbon dioxide wave guide type laser tube |
| JPS58216481A (en) * | 1982-06-09 | 1983-12-16 | Nippon Sekigaisen Kogyo Kk | High frequency discharge sealing type gas laser |
| JPS6189687A (en) * | 1984-10-08 | 1986-05-07 | Mitsubishi Electric Corp | Pulse-laser oscillation system |
| JPS639177A (en) * | 1986-06-30 | 1988-01-14 | Toshiba Corp | Gas laser oscillator |
| JPS63146478A (en) * | 1986-12-10 | 1988-06-18 | Tohoku Ricoh Co Ltd | Electrode for carbon dioxide gas laser |
| JPS63228682A (en) * | 1987-03-18 | 1988-09-22 | Toshiba Corp | Gas laser oscillator |
-
1988
- 1988-10-13 JP JP25578288A patent/JPH02103973A/en active Pending
Patent Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS58103186A (en) * | 1981-12-16 | 1983-06-20 | Nec Corp | Rf discharge carbon dioxide wave guide type laser tube |
| JPS58216481A (en) * | 1982-06-09 | 1983-12-16 | Nippon Sekigaisen Kogyo Kk | High frequency discharge sealing type gas laser |
| JPS6189687A (en) * | 1984-10-08 | 1986-05-07 | Mitsubishi Electric Corp | Pulse-laser oscillation system |
| JPS639177A (en) * | 1986-06-30 | 1988-01-14 | Toshiba Corp | Gas laser oscillator |
| JPS63146478A (en) * | 1986-12-10 | 1988-06-18 | Tohoku Ricoh Co Ltd | Electrode for carbon dioxide gas laser |
| JPS63228682A (en) * | 1987-03-18 | 1988-09-22 | Toshiba Corp | Gas laser oscillator |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE4233634A1 (en) * | 1992-10-06 | 1994-04-14 | Lambda Physik Gmbh | Pre-ionising and/or discharge laser - has at least one anode and cathode with different materials having different standard electrode potentials |
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