JPS63145592U - - Google Patents
Info
- Publication number
- JPS63145592U JPS63145592U JP3258287U JP3258287U JPS63145592U JP S63145592 U JPS63145592 U JP S63145592U JP 3258287 U JP3258287 U JP 3258287U JP 3258287 U JP3258287 U JP 3258287U JP S63145592 U JPS63145592 U JP S63145592U
- Authority
- JP
- Japan
- Prior art keywords
- chamber
- vacuum
- deaeration
- pressure control
- upper pressure
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000001816 cooling Methods 0.000 claims description 2
- 239000002184 metal Substances 0.000 claims description 2
- 238000005192 partition Methods 0.000 claims 2
- 239000002826 coolant Substances 0.000 claims 1
- 239000000853 adhesive Substances 0.000 description 1
- 230000001070 adhesive effect Effects 0.000 description 1
- 238000007872 degassing Methods 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 238000009413 insulation Methods 0.000 description 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3258287U JPH024796Y2 (cg-RX-API-DMAC7.html) | 1987-03-07 | 1987-03-07 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3258287U JPH024796Y2 (cg-RX-API-DMAC7.html) | 1987-03-07 | 1987-03-07 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS63145592U true JPS63145592U (cg-RX-API-DMAC7.html) | 1988-09-26 |
| JPH024796Y2 JPH024796Y2 (cg-RX-API-DMAC7.html) | 1990-02-05 |
Family
ID=30839398
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP3258287U Expired JPH024796Y2 (cg-RX-API-DMAC7.html) | 1987-03-07 | 1987-03-07 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH024796Y2 (cg-RX-API-DMAC7.html) |
-
1987
- 1987-03-07 JP JP3258287U patent/JPH024796Y2/ja not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| JPH024796Y2 (cg-RX-API-DMAC7.html) | 1990-02-05 |
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