JPS63145324U - - Google Patents
Info
- Publication number
- JPS63145324U JPS63145324U JP3883087U JP3883087U JPS63145324U JP S63145324 U JPS63145324 U JP S63145324U JP 3883087 U JP3883087 U JP 3883087U JP 3883087 U JP3883087 U JP 3883087U JP S63145324 U JPS63145324 U JP S63145324U
- Authority
- JP
- Japan
- Prior art keywords
- gas
- valve
- reaction
- exhaust
- closed
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Crystals, And After-Treatments Of Crystals (AREA)
- Chemical Vapour Deposition (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3883087U JPS63145324U (enExample) | 1987-03-16 | 1987-03-16 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3883087U JPS63145324U (enExample) | 1987-03-16 | 1987-03-16 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS63145324U true JPS63145324U (enExample) | 1988-09-26 |
Family
ID=30851444
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP3883087U Pending JPS63145324U (enExample) | 1987-03-16 | 1987-03-16 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS63145324U (enExample) |
-
1987
- 1987-03-16 JP JP3883087U patent/JPS63145324U/ja active Pending