JPS6346835U - - Google Patents
Info
- Publication number
- JPS6346835U JPS6346835U JP13969686U JP13969686U JPS6346835U JP S6346835 U JPS6346835 U JP S6346835U JP 13969686 U JP13969686 U JP 13969686U JP 13969686 U JP13969686 U JP 13969686U JP S6346835 U JPS6346835 U JP S6346835U
- Authority
- JP
- Japan
- Prior art keywords
- raw material
- gas introduction
- introduction pipe
- tube
- vapor phase
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000002994 raw material Substances 0.000 claims description 5
- 238000006243 chemical reaction Methods 0.000 claims description 3
- 125000002524 organometallic group Chemical group 0.000 claims 2
- 238000001947 vapour-phase growth Methods 0.000 claims 2
- 238000000354 decomposition reaction Methods 0.000 claims 1
- 239000011521 glass Substances 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 2
- 238000002488 metal-organic chemical vapour deposition Methods 0.000 description 2
- 238000010438 heat treatment Methods 0.000 description 1
- 239000000758 substrate Substances 0.000 description 1
Landscapes
- Crystals, And After-Treatments Of Crystals (AREA)
- Chemical Vapour Deposition (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13969686U JPS6346835U (enExample) | 1986-09-10 | 1986-09-10 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13969686U JPS6346835U (enExample) | 1986-09-10 | 1986-09-10 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6346835U true JPS6346835U (enExample) | 1988-03-30 |
Family
ID=31045844
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP13969686U Pending JPS6346835U (enExample) | 1986-09-10 | 1986-09-10 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6346835U (enExample) |
-
1986
- 1986-09-10 JP JP13969686U patent/JPS6346835U/ja active Pending
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