JPS631443A - シ−ト状物のプラズマ処理装置 - Google Patents

シ−ト状物のプラズマ処理装置

Info

Publication number
JPS631443A
JPS631443A JP61143773A JP14377386A JPS631443A JP S631443 A JPS631443 A JP S631443A JP 61143773 A JP61143773 A JP 61143773A JP 14377386 A JP14377386 A JP 14377386A JP S631443 A JPS631443 A JP S631443A
Authority
JP
Japan
Prior art keywords
sheet
rotating shaft
vacuum container
vacuum
plasma processing
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP61143773A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0475777B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html
Inventor
Motoyasu Koyama
小山　元靖
Hideaki Teraoka
寺岡　英朗
Takao Akagi
赤木　孝夫
Shinji Yamaguchi
新司 山口
Takashi Sakamoto
隆志 坂本
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Kuraray Co Ltd
Original Assignee
Kuraray Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Kuraray Co Ltd filed Critical Kuraray Co Ltd
Priority to JP61143773A priority Critical patent/JPS631443A/ja
Publication of JPS631443A publication Critical patent/JPS631443A/ja
Publication of JPH0475777B2 publication Critical patent/JPH0475777B2/ja
Granted legal-status Critical Current

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
    • B01J19/00—Chemical, physical or physico-chemical processes in general; Their relevant apparatus
    • B01J19/08—Processes employing the direct application of electric or wave energy, or particle radiation; Apparatus therefor
    • B01J19/087—Processes employing the direct application of electric or wave energy, or particle radiation; Apparatus therefor employing electric or magnetic energy

Landscapes

  • Chemical & Material Sciences (AREA)
  • Health & Medical Sciences (AREA)
  • General Health & Medical Sciences (AREA)
  • Toxicology (AREA)
  • Organic Chemistry (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Plasma Technology (AREA)
  • Treatment Of Fiber Materials (AREA)
  • Treatments Of Macromolecular Shaped Articles (AREA)
  • Physical Or Chemical Processes And Apparatus (AREA)
JP61143773A 1986-06-19 1986-06-19 シ−ト状物のプラズマ処理装置 Granted JPS631443A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP61143773A JPS631443A (ja) 1986-06-19 1986-06-19 シ−ト状物のプラズマ処理装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP61143773A JPS631443A (ja) 1986-06-19 1986-06-19 シ−ト状物のプラズマ処理装置

Publications (2)

Publication Number Publication Date
JPS631443A true JPS631443A (ja) 1988-01-06
JPH0475777B2 JPH0475777B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1992-12-01

Family

ID=15346683

Family Applications (1)

Application Number Title Priority Date Filing Date
JP61143773A Granted JPS631443A (ja) 1986-06-19 1986-06-19 シ−ト状物のプラズマ処理装置

Country Status (1)

Country Link
JP (1) JPS631443A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)

Also Published As

Publication number Publication date
JPH0475777B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1992-12-01

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Legal Events

Date Code Title Description
LAPS Cancellation because of no payment of annual fees