JPS6314322B2 - - Google Patents
Info
- Publication number
- JPS6314322B2 JPS6314322B2 JP18907681A JP18907681A JPS6314322B2 JP S6314322 B2 JPS6314322 B2 JP S6314322B2 JP 18907681 A JP18907681 A JP 18907681A JP 18907681 A JP18907681 A JP 18907681A JP S6314322 B2 JPS6314322 B2 JP S6314322B2
- Authority
- JP
- Japan
- Prior art keywords
- etching
- diffraction grating
- single crystal
- silicon single
- silicon
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 238000005530 etching Methods 0.000 claims description 83
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims description 31
- 229910052710 silicon Inorganic materials 0.000 claims description 31
- 239000010703 silicon Substances 0.000 claims description 31
- 239000013078 crystal Substances 0.000 claims description 25
- 238000004519 manufacturing process Methods 0.000 claims description 14
- 238000000034 method Methods 0.000 claims description 11
- 230000003287 optical effect Effects 0.000 claims description 10
- 239000000758 substrate Substances 0.000 claims description 8
- 230000001419 dependent effect Effects 0.000 claims description 3
- 238000003486 chemical etching Methods 0.000 claims 1
- 238000007796 conventional method Methods 0.000 description 11
- 239000006185 dispersion Substances 0.000 description 4
- 230000007547 defect Effects 0.000 description 3
- 239000000126 substance Substances 0.000 description 3
- 239000007864 aqueous solution Substances 0.000 description 2
- 239000000203 mixture Substances 0.000 description 2
- 239000000243 solution Substances 0.000 description 2
- 230000007423 decrease Effects 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 239000013307 optical fiber Substances 0.000 description 1
- 238000000206 photolithography Methods 0.000 description 1
- 238000000992 sputter etching Methods 0.000 description 1
Classifications
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B5/00—Optical elements other than lenses
- G02B5/18—Diffraction gratings
- G02B5/1847—Manufacturing methods
- G02B5/1857—Manufacturing methods using exposure or etching means, e.g. holography, photolithography, exposure to electron or ion beams
Landscapes
- Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
- General Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Diffracting Gratings Or Hologram Optical Elements (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP18907681A JPS5891407A (ja) | 1981-11-27 | 1981-11-27 | シリコン回折格子の製造方法 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP18907681A JPS5891407A (ja) | 1981-11-27 | 1981-11-27 | シリコン回折格子の製造方法 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5891407A JPS5891407A (ja) | 1983-05-31 |
| JPS6314322B2 true JPS6314322B2 (zh) | 1988-03-30 |
Family
ID=16234899
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP18907681A Granted JPS5891407A (ja) | 1981-11-27 | 1981-11-27 | シリコン回折格子の製造方法 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5891407A (zh) |
Families Citing this family (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6180822A (ja) * | 1984-09-27 | 1986-04-24 | Nec Corp | ブレ−ズド回折格子の作成方法 |
| EP0620201A3 (en) * | 1993-04-12 | 1995-01-25 | Hughes Aircraft Co | Process for the preparation of microoptical elements. |
| US6517734B1 (en) * | 2000-07-13 | 2003-02-11 | Network Photonics, Inc. | Grating fabrication process using combined crystalline-dependent and crystalline-independent etching |
-
1981
- 1981-11-27 JP JP18907681A patent/JPS5891407A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5891407A (ja) | 1983-05-31 |
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