JPS63140064U - - Google Patents
Info
- Publication number
- JPS63140064U JPS63140064U JP3145987U JP3145987U JPS63140064U JP S63140064 U JPS63140064 U JP S63140064U JP 3145987 U JP3145987 U JP 3145987U JP 3145987 U JP3145987 U JP 3145987U JP S63140064 U JPS63140064 U JP S63140064U
- Authority
- JP
- Japan
- Prior art keywords
- glow discharge
- reaction chamber
- decomposition device
- amorphous semiconductor
- substrate
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000006243 chemical reaction Methods 0.000 claims description 7
- 238000000354 decomposition reaction Methods 0.000 claims description 6
- 239000000758 substrate Substances 0.000 claims description 5
- 239000004065 semiconductor Substances 0.000 claims 3
- 238000010586 diagram Methods 0.000 description 4
- 230000002093 peripheral effect Effects 0.000 description 1
Landscapes
- Photoreceptors In Electrophotography (AREA)
- Chemical Vapour Deposition (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3145987U JPS63140064U (enExample) | 1987-03-03 | 1987-03-03 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3145987U JPS63140064U (enExample) | 1987-03-03 | 1987-03-03 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS63140064U true JPS63140064U (enExample) | 1988-09-14 |
Family
ID=30837211
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP3145987U Pending JPS63140064U (enExample) | 1987-03-03 | 1987-03-03 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS63140064U (enExample) |
-
1987
- 1987-03-03 JP JP3145987U patent/JPS63140064U/ja active Pending
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