JPH0176035U - - Google Patents
Info
- Publication number
- JPH0176035U JPH0176035U JP1987171740U JP17174087U JPH0176035U JP H0176035 U JPH0176035 U JP H0176035U JP 1987171740 U JP1987171740 U JP 1987171740U JP 17174087 U JP17174087 U JP 17174087U JP H0176035 U JPH0176035 U JP H0176035U
- Authority
- JP
- Japan
- Prior art keywords
- gas
- glow discharge
- cleaning
- ratio
- discharge decomposition
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Drying Of Semiconductors (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1987171740U JPH0176035U (enExample) | 1987-11-10 | 1987-11-10 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1987171740U JPH0176035U (enExample) | 1987-11-10 | 1987-11-10 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0176035U true JPH0176035U (enExample) | 1989-05-23 |
Family
ID=31463753
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1987171740U Pending JPH0176035U (enExample) | 1987-11-10 | 1987-11-10 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0176035U (enExample) |
-
1987
- 1987-11-10 JP JP1987171740U patent/JPH0176035U/ja active Pending