JPS63139754U - - Google Patents
Info
- Publication number
- JPS63139754U JPS63139754U JP3239487U JP3239487U JPS63139754U JP S63139754 U JPS63139754 U JP S63139754U JP 3239487 U JP3239487 U JP 3239487U JP 3239487 U JP3239487 U JP 3239487U JP S63139754 U JPS63139754 U JP S63139754U
- Authority
- JP
- Japan
- Prior art keywords
- refrigerant
- emitter
- tank
- gas
- recovery pipe
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000011084 recovery Methods 0.000 claims description 4
- 239000003507 refrigerant Substances 0.000 claims 5
- 238000001816 cooling Methods 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 2
- 238000000605 extraction Methods 0.000 description 1
- 229910052734 helium Inorganic materials 0.000 description 1
- 239000001307 helium Substances 0.000 description 1
- SWQJXJOGLNCZEY-UHFFFAOYSA-N helium atom Chemical compound [He] SWQJXJOGLNCZEY-UHFFFAOYSA-N 0.000 description 1
- 239000007788 liquid Substances 0.000 description 1
Landscapes
- Rigid Pipes And Flexible Pipes (AREA)
- Electron Sources, Ion Sources (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP3239487U JPH0353404Y2 (fr) | 1987-03-05 | 1987-03-05 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP3239487U JPH0353404Y2 (fr) | 1987-03-05 | 1987-03-05 |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS63139754U true JPS63139754U (fr) | 1988-09-14 |
JPH0353404Y2 JPH0353404Y2 (fr) | 1991-11-21 |
Family
ID=30839029
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP3239487U Expired JPH0353404Y2 (fr) | 1987-03-05 | 1987-03-05 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPH0353404Y2 (fr) |
Cited By (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2009147894A1 (fr) * | 2008-06-05 | 2009-12-10 | 株式会社日立ハイテクノロジーズ | Dispositif à faisceau d'ions |
JP2009289670A (ja) * | 2008-05-30 | 2009-12-10 | Hitachi High-Technologies Corp | イオンビーム装置 |
WO2011001600A1 (fr) * | 2009-06-30 | 2011-01-06 | 株式会社 日立ハイテクノロジーズ | Microscope ionique |
JP2015092496A (ja) * | 2014-12-26 | 2015-05-14 | 株式会社日立ハイテクノロジーズ | イオンビーム装置 |
JP2020129547A (ja) * | 2020-04-22 | 2020-08-27 | 株式会社日立ハイテク | ガリウム集束イオンビームとイオン顕微鏡複合装置 |
-
1987
- 1987-03-05 JP JP3239487U patent/JPH0353404Y2/ja not_active Expired
Cited By (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2009289670A (ja) * | 2008-05-30 | 2009-12-10 | Hitachi High-Technologies Corp | イオンビーム装置 |
WO2009147894A1 (fr) * | 2008-06-05 | 2009-12-10 | 株式会社日立ハイテクノロジーズ | Dispositif à faisceau d'ions |
JP5097823B2 (ja) * | 2008-06-05 | 2012-12-12 | 株式会社日立ハイテクノロジーズ | イオンビーム装置 |
WO2011001600A1 (fr) * | 2009-06-30 | 2011-01-06 | 株式会社 日立ハイテクノロジーズ | Microscope ionique |
JP2011014245A (ja) * | 2009-06-30 | 2011-01-20 | Hitachi High-Technologies Corp | イオン顕微鏡 |
US8455841B2 (en) | 2009-06-30 | 2013-06-04 | Hitachi High-Technologies Corporation | Ion microscope |
JP2015092496A (ja) * | 2014-12-26 | 2015-05-14 | 株式会社日立ハイテクノロジーズ | イオンビーム装置 |
JP2020129547A (ja) * | 2020-04-22 | 2020-08-27 | 株式会社日立ハイテク | ガリウム集束イオンビームとイオン顕微鏡複合装置 |
Also Published As
Publication number | Publication date |
---|---|
JPH0353404Y2 (fr) | 1991-11-21 |
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