JPS63139512U - - Google Patents
Info
- Publication number
- JPS63139512U JPS63139512U JP3238887U JP3238887U JPS63139512U JP S63139512 U JPS63139512 U JP S63139512U JP 3238887 U JP3238887 U JP 3238887U JP 3238887 U JP3238887 U JP 3238887U JP S63139512 U JPS63139512 U JP S63139512U
- Authority
- JP
- Japan
- Prior art keywords
- slit
- scanning
- imaging device
- vertical scanning
- dimensional position
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000003384 imaging method Methods 0.000 claims 4
- 238000005259 measurement Methods 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 3
- 238000006243 chemical reaction Methods 0.000 description 1
- 238000001514 detection method Methods 0.000 description 1
- 238000000034 method Methods 0.000 description 1
Landscapes
- Length Measuring Devices By Optical Means (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3238887U JPS63139512U (enrdf_load_stackoverflow) | 1987-03-05 | 1987-03-05 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3238887U JPS63139512U (enrdf_load_stackoverflow) | 1987-03-05 | 1987-03-05 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS63139512U true JPS63139512U (enrdf_load_stackoverflow) | 1988-09-14 |
Family
ID=30839017
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP3238887U Pending JPS63139512U (enrdf_load_stackoverflow) | 1987-03-05 | 1987-03-05 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS63139512U (enrdf_load_stackoverflow) |
-
1987
- 1987-03-05 JP JP3238887U patent/JPS63139512U/ja active Pending
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